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Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

None 20stafrcns Bracket vK300-43-1A Port size 01T 1/s NPTF E With brackel ' (Not mounted) NVV3KF3-o42-@-@ Applicable valves NVKF334O .ooo Base mounted / Type 42 (A port: side porting) Base mounted / Type S42 /Position ol solenoid \ \same as A port side./ Applicable blank plate ass'y vK300-42-1A Position ol solenoid .

Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Base Mounted Type Common SUP, Common EXH Type 40/for base mounted type (Port A bottom ported) How to Order Applicable solenoid valves VKF334VV3KF3-40 05 01 Applicable blanking plate assembly VK300-42-1A Option Port P: Rc(PT) 1/8 Port R: Rc(PT) 1/8 Valve stations None With bracket (not mounted) Nil 1 station 01 Bracket VK300-43-1A F 20 stations 20 Port

None 20stafrcns Bracket vK300-43-1A Port size 01T 1/s NPTF E With brackel ' (Not mounted) NVV3KF3-o42-@-@ Applicable valves NVKF334O .ooo Base mounted / Type 42 (A port: side porting) Base mounted / Type S42 /Position ol solenoid \ \same as A port side./ Applicable blank plate ass'y vK300-42-1A Position ol solenoid .

Series VP342 VP542 VP742 VP300-27-1A VP500-27-1A VP700-27-1A Bracket (With screw) Use external pilot model in the following cases: Body ported For vacuum or for low pressure less than 0.2 MPa Please consult with SMC for use in a vacuum hold application.

VXS VXS VXB VXE (3) Formula for flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + T When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + T Conversion with sonic conductance C: VXP VXR VXH VXF VX3 VXA S = 5.0 x C(5) Q : Air flow rate[L/min(ANR)] S : Effective area [mm2] P1 : Upstream pressure [MPa] P2 : Downstream

Material 16 25 40 50 Standard AS568-122V AS568-129V AS568-140V AS568-231V External seal e AS568-122 AS568-129 AS568-140 AS568-231 XLAQ XLDQ Special Standard B2401-V15V B2401-V24V B2401-P42V AS568-227V Valve seal w B2401-V15 B2401-V24 B2401-P42 AS568-227 Special S valve seal assembly r XLD40-2-9-1A XLD50-2-9-1A Standard XLD50-2-9-1A XLDQ XLD40-2-9-1A Special Note 1) Add a suffix for the

S 1 p c . n n p c s . L Long leads uountng B Front Nose Mount C -Rear Pivot E -Double End K -Non-Rotating Rod R -Block Mount W-Double Rod Auto.Switch 853. D-853 Gsg D-G59 B54. D-854 K59 D-K59 864 .

Blanking plate assembly (Manifold option) Part no: V100-77-1A Place notch mark on the blanking plate to 2 port side when assembling.

R Port M5 0.8 R Port M5 0.8 S 20 20 stations A, B Port M3 0.5 P Port P Port M5 0.8 A, B Port M3 0.5 Applicable solenoid valve: SYJ3 30SYJ3 33M5 0.8 Type 32(4 Port / Base mounted type) Applicable blank plate ass'y: SYJ3000-21-2A SS5YJ3-32-05 --M5T Type 32 Type S32 ( ) Single solenoid coil is located on same side as the A, B port.

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

Attachment Port size for intermediate air release Applicable models Attachment mounting position Description Symbol None Nil AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve Thread type AW + [K] + AL AC20A to 40A Metric system thread (M5) Rc NPT G AF + AR + [S] + AL AC20 to 60 Nil AW + [S] + AL AC20A to 40A N Note 1) S Pressure switch AF + [S] + AR AC20B

Nil None AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size AW + [S] + AL AC20A to 40A S Body size Port size Pressure switch AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AF + AFM + [S] + AR AC20C to 40C M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 AW + [S] + AFM AC20D to 40D

PD07PD09 (DO) ON/OFF 4.5.1(1)(d) JOGDO TM 4.5 MR Configurator2 No.PC09 MR Configurator2 11.8 TM master-slave masterslave C1 5.4.3 1 5 1 1.5 (1) LECS S 1 S5 50W,100W SSCNET S ACS5, S6 S5 ACS7 S7 200W ACS8 S8 400W AC100VAC120V 50Hz60Hz 1 AC200VAC230V 50Hz60Hz 2 1 6 1 (2) aSSCNET 5 A S LE C S M A AC S B M B E 2m 2 5m 5 10m A S R bSSCNET LE-CSS-MR-J3BUSM 1 LE C S S

Applicable model Attachment mounting position Description Symbol Nil None VY1 AC20: 1/8 AC25: 1/4 AC30: 1/4 AC40: 3/8 AF + AR + [K] + AL AC20 to 40 K Check valve G AW + [K] + AL AC20A to 40A AF + AR + [S] + AL AC20 to 60 Port size PPA AW + [S] + AL AC20A to 40A Pressure switch Body size Port size S AF + [S] + AR AC20B to 60B Symbol 10 20 25 30 40 50 55 60 AL AF + AFM + [S] + AR AC20C to

2 20m/s 2/ 2 150m/s 2 100m/s 110500Hz XYZ 2 () 2XYZ 3 3 1 / 1 ZB1-VQ110UZB1-VQ120UZB1-VQ110LZB1-VQ110N.C. 1 N.C.

VQ7-8-FG-S-A03 VQ7-6-FG-S-A03 VQ7-8-FG-S-A04 VQ7-6-FG-S-RA02 VQ7-8-FG-S-RA03 VQ7-6-FG-S-RA03 VQ7-8-FG-S-RA04 3-10-5 6 For details about certified products conforming to international standards, visit us at www.smcworld.com.

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Rotations per Second Distance of movement per second Distance of movement per rotation Rotation Speed (rpm) = Speed (mm/s) Lead (mm) }60 (S) = {500 (mm/s) 20 (mm) }60 (s) =1500 (rpm) -38- 6.6.3 Acceleration/deceleration Time Configuration < Acceleration/deceleration Time Configuration> Acceleration/deceleration time (ms) configuration: The acceleration/deceleration time sets the amount