ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Mass (g) Internal capacity (cm3) 1.7 ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX 1.7 4.3 IN/OUT straight piping Metric size ZR Easy installation

S Couplers Series KK130

/O.D. mm Symbol 01 02 03 04 N01 N02 N03 N04 Symbol 07 09 11 13 Applicable tube O.D. mm 6 8 10 12 1/4" 5/16" 3/8" 1/2" Symbol 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose. Inch size 1

Size: -, Port Size: -, Manifold Base: -, Stations: -

Size: -, Port Size: -, Manifold Base: -, Stations: -

Size: -, Port Size: -, Manifold Base: -, Stations: -

Air Cylinder NCA1 Series

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1

NCA1

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1

A

16 3/8 3/8 3/4 5/8 1.57 1 1/2 3 3/4 1 1/4 1 3/8-24 325 (3.25) 1 1/8 3.9 1/2 0 7 1/2 1 1 1/4 1.18 2.34 4 1/4 1 3/8 3/4 5/8 2.72 8 1/4 3/4-16 3/4 7/8 1/2 5/8 1.57 1 1/8 1 1/2 3/8-24 4 1/2 1 1/4 1 400 (4) 4.7 1/2 0 7 1/2 1 1 1/4 1.18 2.34 4 1/4 1 3/8 3/4 5/8 2.72 8 1/4 3/4-16 3/4 7/8 1/2 5/8 Courtesy of Steven Engineering, Inc. !

smcmaintenancepartslist

1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Actuators Modular F.R.L.

Table of Contents

1/4 3/8 1/2 3/4 1/8 1/4 1/4 Port size 3/4 1 1 G 1 1/4 3/8 3/8 PPA How to Order Refer to the next page.

SQ1000/2000

to 8 (16) 1 to 4 (8) S D side 1 to 8 (16) 1 to 4 (8) 1 to 8 (16) Note 1) Separately order the cable assembly for type 20P P kit.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

Mechanically Jointed Rodless Cylinder Series MY1

1 1 6 M4 x 0.7 10 4 7 3.5 1 1 6 Note) A set of brackets with floating mechanism consists of a left bracket and a right bracket.

ZP

ZM 4, 6, 8 tube M6 x 1 M8 x 1 ZH 6, 8 tube M6 x 1 M8 x 1 M6 x 1 M8 x 1.25 ZU How to Order ZL Vacuum entry port Mounting thread ZY Pad type Pad dia.

Vacuum

.72 '1 .09 1 . 7 1 2.67 4.37 6.83 1o.7 1 0.015 0.060 0.'135 0.239 o.374 0.63 0.96 1.50 2.33 3.83 6.00 9.34 0.013 0,051 0 . 1 1 5 0.205 o.320 0.54 o.82 1.28 2.OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

EXxx-OMY0004

msec 1 1 1 100 msec Bit 5 Bit 4 Bit 3 Value for ON feedback delay time for Zone M 0 0 0 Reserved 0 0 1 Reserved 0 1 0 Reserved 0 1 1 5 sec 1 0 0 1 sec 1 0 1 500 msec 1 1 0 200 msec 1 1 1 100 msec Bit 6 Output feedback for Zone M 0 Disable 1 Enable Bit 7 Reserved 55 No.EX##-OMY0004 Table 10-9 Byte2 Output feedback parameter zone 1 for Safety Mode (Module Passivation/xxx) Bit 2 Bit 1 Bit 0

Vacuum

.72 '1 .09 1 . 7 1 2.67 4.37 6.83 1o.7 1 0.015 0.060 0.'135 0.239 o.374 0.63 0.96 1.50 2.33 3.83 6.00 9.34 0.013 0,051 0 . 1 1 5 0.205 o.320 0.54 o.82 1.28 2.OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

EXxx-OMY0006CN

Valve diagnostics 1 Table 9-9 Valve diagnostics 1 Bit 0 12 0: 1 1 34 0: 1 2 56 0: 1 3 78 0: 1 4 910 0: 1 5 1112 0: 1 6 1314 0: 1 7 1516 0: 1 9.1.2.3. General diagnostics 2 Table 9-10 General diagnostics 2 Bit 0 1 0:1: 1 2 0:1: 2 3 0:1: 3 4 0:1: 4 5 0:1: 5 6 0:1: 6 7 0:1: 7 8 0:1: 9.1.2.4.

HRX-OM-Q026

HRX-OM-Q026 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.