AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

High Purity Fluoropolymer

Model E M H W L 1/8 LQ1U11 LQ1U12 LQ1U21 LQ1U22 LQ1U31 LQ1U32 LQ1U33 LQ1U41 LQ1U42 LQ1U51 LQ1U52 LQ1U61 LQ1U62 4 3 6 4 10 8 6 12 10 19 12 25 19 10 11.5 29 10 Class 1 14 41 14 15 16.5 H W M 17 17 20 54 23 1/4 28 21 21 24 63 (E) (E) Class 2 to 5 77 26 26 29 39 L 102 39.5 36 49 36 M Inch sizes H Applicable tubing O.D.

SYJ300/500/700

Station n L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 4-4-13 14 Series SYJ300 Type 41 Manifold: Side Ported/SS3YJ3-41Stations -M3 [ ] for AC Grommet (G) Type 41 Manifold: Side Ported (Pilot valve is on

3 Port Solenoid Valve Metal Seal Series VZ200 1

suppressor With light/surge voltage suppressor 19.5 14.5 n-M5 x 0.8 2-4.3 8.5 mounting hole 21.6 17 P E PE 9.5 9.5 43 Max. 10 78 4-Rc 1/8 2-M5 x 0.8 (Pilot EXH) (Pilot EXH) 2-M5x0.8 2-M5 x 0.8 (Pilot EXH) 300 (Lead wire length) 300 (Lead wire length) 76 68.5 2-M5 x 0.8 (Pilot EXH) Stations n: Stations Formula L1 = 16n + 11 L2 = 16n + 22 2 43 54 3 59 70 4 75 86 5 91 102 6 107 118 7 123 134

SV

/N.O. 78 4 position dual 3 port (A) 4 (B) 2 99 Single solenoid SV3000 SOL.b SOL.a 102 Double solenoid 5 (EA) 3 (EB) 110 3 position 1 (P) 186 Single solenoid SV4000 190 Double solenoid 211 3 position Note) Weight of solenoid valve only. 1-2-15 13 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

VFS

port) (A, B port) G 1/2 electrical entry Rc 1/8 external pilot port (VFS6100R) 5-Rc , 1 3 4 2-Rc 1/8 pilot EXH port 2 position double: VFS6200-F Pilot valve manual override 4-9 mounting hole Light window (FZ) Solenoid valve mounting bolt (Hexagon socket head cap screw) 4-M8 x 80 with SW G 1/2 electrical entry 5-Rc , 1 3 4 Rc 1/8 external pilot port (VFS6200R) 2-Rc 1/8 pilot EXH port 3-8-102

Proposals for Energy Saving

flow rate ( ) Unit setting : l/min ( ) Switch specification: Real-time switch output ( ) Output mode: Inverted output ( ) Flow rate setting value: Real-time flow rate Full range median value Accumulated flow 0 Key lock mode: Unlocked ( ) Flow rate conversion conditions: 20, 101.3kPa, 65% RH (ANR) ( ) When the MODE button is pressed, the setting changes to without initializing the setting. 102

F

) Applicable tube* Nylon, Soft nylon, Polyurethane *Dimensions to BS5409 Part 1 D I M E N S I O N S KM11 Dimensions in mm Port B min Port Size Model (Metric Size) FA FB N L1 L2 L3 L4 L5 L6 P Q1 Q2 MA MB Mass (g) KM11-04-08-6 6 65 40 22 4 8 10 18 29.5 19.5 27 10.6 12 16 18.5 6 KM11-04-08-10 10 86 61.5 30 KM11-06-10-6 6 76 47 32 6 10 10 19.5 31.5 21.5 31 13 13.5 17 21 7.5 KM11-06-10-10 10 102

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

1/4 55 162 Up to 300 13 13 102 1/4 69 162 Up to 300 122 3/8 80 196 Up to 300 122 1/2 100 196 Up to 300 13

End Lock Cylinder Series CBG1

(114) 12 (13) 162 (174) DL1 63 23.5 12 (14) 102 (114) 12 (13) 162 (174) TB 80 27 16 (20) 124 (138) 198 (212) S + Stroke 100 30 16 (20) 124 (138) 198 (212) ZZ + Stroke Dimensions inside ( ) are for long strokes.

Clamp Cylinder with Lock Series CLK1

locking type 50 and 63. 4 Series CLK1 Clamp Cylinder with Lock Dimensions (mm) CLK132/Standard Type 1in = 25.4mm Clamp side lock (B) 3-Rc 1/8 Clamp side port 25 60 34 + Stroke 20 Rear cushion valve 12 4 53 12 6 5 3-Rc 1/8 Unclamp side port 47 45 45 9.5 M10 x 1.25 12 40 26 26 10 Width across flats 10 Width across flats 36 R12 0.040 0.076 +0.022 0 Shaft: 10d9 +0.5 +0.2 12 12 6 Hole: 10H8 102

Large Bore Compact Cylinder Series CQ2

(D) Q2B20075DC M18 x 215 l M18 x 225 l 215 225 C (D) Q2B180-100DC C (D) Q2B200-100DC 3 Series CQ2 Compact Cylinder Double Acting: Single Rod Dimensions (mm) Dimensions are the same with and without auto switches. 1in = 25.4mm 180 2 x 4-31.5 depth of counter bore 26 29 29 2-Rc 1/2 (port size) 40 52 52 4-19 through 162 204 4.5 3 Note 1) Flat washer 4 pcs. 2 x 4-M22 x 2.5 thread depth 38 102

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

167 120 136 20 20 20 oz oz oz 2.79 2.40 2.68 2.22 6.46 8.15 7.58 3.67 3.14 7.02 5.36 5.89 4.23 4.80 g g g 113 98 108 92 247 308 287 146 127 267 206 227 166 186 25 25 25 oz oz oz 3.99 3.46 3.81 3.25 8.71 10.86 10.12 5.15 4.48 9.42 7.27 8.01 5.86 6.56 g g g 45 39 44 37 54 46 77 85 62 70 12 12 12 oz oz oz 1.59 1.38 1.55 1.31 1.90 1.62 2.72 3.00 2.19 2.47 g g g 59 51 58 49 71 60 102

Air Cylinder CLA Series Fine Lock Model

a 48.5 23 60 142 0 86 1 . 5 1 5 1 0 5 59 130 58 254 58 52 17.5 66 3/. 16 37 55 1 5 23 70 208 0 102 1 3 . 5 1 8 130 76 160 71 296 80 65 21.5 80 4D 56.5 1 5 25 80 226 0 1 6 1 3 . 5 1 8 1 5 0 92 180 3 1 5 80 65 2 1 . 5 81 $eries CLA lllmensio Rear Flange Type/CLAG with Rod Boot tvt14x1.5 M 1 8 X 1 . 5 rv18x1.5 M22)r.1.5 t\426X1.5 I n 2 0 27 ,/. 42 I I 20 45 153 8 60 9 1 2 80 42 100 5 1 2 1

Low Maintenance Filter Series FN1

Rc 1/4 108 Head end cylinder port Rc 1/4 Dustproof cover Rod end cylinder port (Manual lock release) D (Stroke) Rc 1/8 Unlocking port IN OUT (125) (102) C B A Rc 1 DRAIN 195 (270) Dimensions (mm) A B C D Model Bore size (Nominal size B) FN111 FN112 610 (730) (844) 20 Rc 1 860 (1000) (1134) 40 8 Series FN1 Options Reservoir Dust removal filter 108 32 0 315 45 P.C.D.220 70 70 90 270 (80) 50

Rotary One-touch Fittings Manifold Series KM

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB KM11-04-08-6 6 65 40 61.5 47 73 55 86 22 30 32 44 44 62 8 4 10.6 10 18 29.5 19.5 27 12 16 18.5 6 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 6 13 10 19.5 31.5 21.5 31 13.5 17 21 7.5 KM11-08-12-6 6 85 KM11-08-12-10 10 116 12 8 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 KM12/Dimensions Inch H (Hex.) Thead NPT T Applicable tube O.D.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Plug: M-5P) A 19 6.5 30 4-M6 x 1 Prepared hole dia. 5.1 4-M5 x 0.8 depth 7 32 0.05 W D B 80.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting reference planes B D 16.5 14.5 Section AA MXP16-30B Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting 8 2-M2 x 0.4 depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8 depth 7 20 20 L (mm) L K J V H S Z M MA W Model 36 40 93 82 58 20 102

Air Pilot Operated Series NVSA

SP 0300 trot Btock 1-lXT01&3Clrt t 4-fNXToa}la.t Hotd Down Bolt. l, 1{ {Or't lt .l DtitEl{stot{s A B c D E 4.01. (102) 2.13 (31) 0.$ (2s) o.17 114 0.31 (8) Mlrntars in Parenthoses Optlonal SPA02O0 Interface apeed control w/crossover pilot holes to connect with sub.olate.

Electro-Pneumatic Regulator IT1000/2000/4000

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

5 Port Solenoid Valve Series SV

Single solenoid 99 (.21) (A) 4 (B) 2 SV3000 Double solenoid 102 (.22) SOL.b SOL.a 3 (EB) 5 (EA) 3 position 110 (.24) Single solenoid 186 (.41) 1 (P) SV4000 Double solenoid 190 (.42) 3 position 211 (.46) Note) Weights of solenoid valve only. 3