Series AP500

) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400 -48 300 -61 200 -75 100 -88 0 -101

PSE3xxA.eng

Current pressure value (Main display) -101 kPa Connected sensor range Display units kPa Item (Sub display (left)) Set value or peak/bottom value (Sub display (right)) NPN/PNP Switch output specifications Caution Panel mount adapter Turn the power off and on again. If the failure cannot be solved, contact SMC. : Depends on part number.

PSE300.eng

They are all important notes for safety and must be followed in addition to International standards (ISO/IEC) and other safety regulations. ( ) For compound 101 kPa ( ) For low pressure 100 kPa ( ) For positive 1 MPa ( ) For vacuum -101 kPa [Default setting] ( ) For low differential 2 kPa ( ) For positive 500 kPa N.C.

HRX-OM-M090

Product Warranty HRS Series 10-2 Revision Rev fDec.2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

HRX-OM-R016

Product Warranty HRS Series 10-2 Revision Rev.NDec.2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

HRX-OM-O021

Product Warranty HRS Series 10-2 Revision Rev UDec.2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

HRX-OM-R005

Product Warranty HRS Series 10-2 Revision Rev.MDec.2020 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation All Rights Reserved

7ND9071en

Independncia, 2500-Iporanga, 18087-101, Sorocaba-So Paulo, Brazil. Tel. +55 15 2102 9700. Fax +55 15 2102 9748 Asia Pacific, 238B Thomson Road, #17-01 Novena Square Tower B, Singapore 307685. Tel. +65 6511 1011. Fax +65 6250 0830 China, 11/F, China Youth Plaza, No.19 North Rd of East 3rd Ring Rd, Chaoyang District, Beijing 100020, China. Tel. +86 10 6566 6600.

SFOD-OMT0009CN

. / . 96 13.1 . 96 13.2 . 97 13.3 . 97 13.4 . 98 13.5 . 99 13.6 . 100 14. . 100 14.1 / . 100 14.2 . 101 14.3 . 102 3 No.SFOD-OMT0009CN-B 14.4 . 102 14.5 . 102 14.6 . 103 14.7 . 103 15. . 104 15.1 . 104 15.2 . 106 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 4 No.SFOD-OMT0009CN-B JXC73/83 Series/

LECP6_C

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

CXS

Operating pressure (MPa) Operating direction Piston area (mm) Rod size (mm) Bore size (mm) 0.15 0.7 0.6 0.5 0.4 0.3 0.2 0.1 8.4 39.2 33.6 28.0 22.4 16.8 11.2 56 OUT CXS6 4 4.6 21.7 18.6 15.5 12.4 9.3 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 15.7 157 OUT CXS10 6 70.0 60.0 50.0 40.0 30.0 20.0 10.0 100 IN 247 212 177 141 106 70.6 35.3 353 OUT CXS15 8 176 151 126 101 75.6 50.4 25.2 252 IN 440

Air Fittings & Tubing

47 32 49 54 M5 X 0.8 8 10.4 16 10.4 4 13.4 1 8 1 8 1 4 1 8 1 4 1 4 3 8 3 8 1 2 15.5 29.5 25.5 KQ2ZF04-01S 14 Ml 15.5 22 17 22 22 29.5 25.5 35 27 35 35 39 39 42 KQ2ZF06-01S 13.4 22 14 6 12.8 17 12.8 41 KQ2ZF06-02S 20.6 25.5 19 31 41 41 17 KQ2ZF08-01S 17.6 25.5 Hl 8 15.2 15.2 18.5 19 19 22 22 24 KQ2ZF08-02S 20.6 27 KQ2ZF10-02S 20.6 29 Dl 10 18.5 18.5 21 24.5 45.5 KQ2ZF10-03S 74 77 101

Series KP/KPQ/KPG

Stud Chuck SUS304 stainless steel Guide, Stopper, Drive bushing SUS304 stainless steel Collet, Release button Polypropylene resin Seal, O-ring, Bumper EPDM Particulate Generation Grade Classifications Relationship of Operating Temperature and Maximum Operating Pressure 1.2 104 Average particle concentration Particles/ft3 Maximum operating pressure MPa Grade 4 1.0 103 0.8 102 Grade 3 0.6 101

MGG

Auto switch capable (water resistant type) Note) RBL (coolant resistant) type shock absorbers are used. 20 to 50 Front mounting flange Dimensions 32 to 50 Front mounting flange R Y + Stroke Front mounting flange 63 Y + Stroke Q X 63 to 100 Front mounting flange R Y + Stroke (mm) Bore size (mm) 63 50 40 32 25 20 R 16 16 15 14 14 14 Y 119 116 101 90 88 88 Dimensions other than the above are

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

Series KP/KPQ/KPG

Stud Chuck SUS304 stainless steel Guide, Stopper, Drive bushing SUS304 stainless steel Collet, Release button Polypropylene resin Seal, O-ring, Bumper EPDM Particulate Generation Grade Classifications Relationship of Operating Temperature and Maximum Operating Pressure 1.2 104 Average particle concentration Particles/ft3 Maximum operating pressure MPa Grade 4 1.0 103 0.8 102 Grade 3 0.6 101

SYJ3000/5000/7000

119 97 111 98 153 96 109 Body ported Base mounted 0.32 0.53 1.6 2.2 0.33 0.4 2 position C6 (One-touch 0.33 0.49 1.4 1.1 1.8 [0.78] 1.9 2.5 [1.3] 1.6 0.27 0.37 0.35 0.27 1/8 SYJ720--C6 SZ fitting for 6) 0.32[0.54] 0.30 0.61 [0.38] 0.39 129 121 163 119 3 position 0.36 [0.40] 0.45 [0.22] SY 101 119 97 111 98 153 96 109 2.0 2.3 0.34 0.61 0.39 0.52 2 position C8 (One-touch SYJ 1.7 1.2 1.9 [0.86

Rubber seal 5 Port Solenoid Valve Series SYJ7000

119 97 111 98 153 96 109 Body ported Base mounted 0.32 0.53 1.6 2.2 0.33 0.4 2 position Double C6 (One-touch 0.33 0.49 1.4 1.1 1.8 [0.78] 1.9 2.5 [1.3] 1.6 0.27 0.37 0.35 0.27 Closed center 1/8 SYJ720--C6 fitting for 6) 0.32[0.54] 0.30 0.61 [0.38] 0.39 Exhaust center 129 121 163 119 3 position 0.36 [0.40] 0.45 [0.22] Pressure center Single 101 119 97 111 98 153 96 109 2 position 2.0 2.3

Low Maintenance Filter Series FN1

101 101 110 FN1 FN1 FN1 FN Filtration efficiency (%) Filtration efficiency (%) 60 60 40 40 20 20 0 0 10 5 20 50 75 25 20 35 65 90 Particle diameter (m) Particle diameter (m) 3 Low Maintenance Filter Series FN1 Blocking Characteristics (Repeatability Characteristics) Fluid: Potable water Supply pressure: 0.2MPa Flow rate: 20l/min Test dust: AC course test dust Test method: Per P/A test method

Multistage Ejector (N)ZL Series

span) Class 3 Port exhaust 0 to 50C (32 to 122F) Housing: Polycarbonate/ABS resin Symbol Standard P V 5 Series (N)ZL Multistage Ejector Option Specifications Digital vacuum pressure switch specifications With digital vacuum pressure switch (ZSE4) ZSE4-00--X105 ZSE4B-00--X105 ZSE4E-00--X105 Part number Display Pressure setting range Maximum operating pressure LCD LED LCD with back light 101