Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2max (from 3 of graph MY1MW: M2) = 24 (Nm) m1 M3 = m1 x g x Y = 6.525 x 9.8 x 29.6 x 10 3 = 1.89 (Nm) Load factor 3 = M2/M2max = 1.89/24 = 0.08 M2 MX 5.

REA/REB

Static moment M2 = WL1 = 100.2 = 2 [Nm] 2 = M2/M2 max = 2/16 = 0.125 W = 1 [kg] = 10 [N] W Review M2. Since M1 & M3 are not generated, review is unnecessary. M L1 3. Dynamic moment We = 5 x 10-3WgU = 5 x 10-319.8300 = 15 [N ] Me3 = 1/3We(L2-A) = 1/3150.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 Me3 Guide central axis We W L2 Review Me3.

REA/REB

moment M2 = WL (mm) Model REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 A 15 17.5 19.5 23.5 L L A L M2 0 M1 0 M3 Since there are 2 guides, the guides central axis and the cylinders central axis are the same.

REA/REB

Static moment M2 = WL1 = 10 x 0.2 = 2 [Nm] 2 = M2/M2max = 2/16 = 0.125 W = 1 [kg] = 10 [N] W C J G5-S Examine M2. Since M1 & M3 are not generated, investigation is unnecessary. M CV MVGQ L1 CC We = 5 x 103 WgU = 5 x 103 x 1 x 9.8 x 300 = 15 [N] Me3 = 1/3We (L2A) = 1/3 x 15 x 0.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 3.

Two Hand Control Valve

VHS P1 P1 within 0.5 s P2 Output Output stops if either of the inputs are applied or neither are applied.

Series 10-, 21- AW-B Filter Regulator

tubing 6/4 Y C Q V BB W K H IN OUT IN OUT Z P2 (Pressure gauge port size) Pressure gauge (Option) 2 x P1 (Port size) Plate thickness 10-/21-AW30K-B: Max. 3.5 10-/21-AW40K-B: Max. 5 B Hexagon width across flats 17 Clearance for maintenance G 1/4 Drain E CC A AW60K-B 1021S N T D J J M U Applicable tubing 6/4 R C Q BB K H IN OUT P2 Pressure gauge (Option) 2 x P1 (Port size) (Pressure gauge

VN-OMJ0001

) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 2 4 4 VNB0 VNB02 VNB03 VNB1 12 () (P1) (P2) () 10 ()12(P1) 10(P2) 2 VNB01V VNB02V VNB1 V 12 (P1) 10 (P2) VNB 1V (N.C.) 0 6 VN*-OMJ0001-B () P2 O O 7 VN*-OMJ0001-B No. 1 2 3 4 5 6 7 8 9 10 11 P2N.C.

Pin Clamp Cylinder Series CKQ/CLKQ

) (Clamp stroke) 10.5 65 40 A 10 0 -0.5 Lock at extended direction 15 3 2 (H) (L) (L) (H) 17 85 (Same measurement on 2 sides) (Same measurement on 2 sides) 3 LOCK 40 600.05 (t=1 x 1, t=0.5 x 2) Depth 15 4 x M10 x 1.5 2 sides x (Same measurement on 2 sides) 40 (when the shims are attached) 40 2 sides x 40 (M10) 400.05 (8) 2 x 8H7 Depth 13 (Same measurement on 2 sides) With shims 47 13 91 P1

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

approx. 0.77MPa, for orifice 3 (VDW30) is P1 approx. 0.45MPa, for orifice 4 (VDW30) is P1 approx. 0.24MPa.

VEX-OMO0001

. -4VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / ( ( ( ( ) ) ) ) -5VEX-OMO0001 3 VEX1 3 Series 0 ON-OFF (AF ) (AMAFM ) (P.2.3) [1 P][1P] PE ( ( ( ( ) ) ) ) IR2000 VEX 33 ITV VY 11 (0.5MPa ) (0.1MPa ), 2 Nm 1/6 MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa -6VEX-OMO0001 3 VEX1 3 Series 0 +0.1MPa 2 PE(ASN2-M5) 0.1MPa P1 O M5 P1 O VEX1-A30-3 O P1 P1 P1

VDW Series

approx. 0.77MPa, for orifice 3 (VDW30) is P1 approx. 0.45MPa, for orifice 4 (VDW30) is P1 approx. 0.24MPa.

VXA21/22

(ANR) Orifice 3 (VXA3135 4)P1 0.1MPa Orifice 2.2 (VXA3125 4)P1 0.23MPa Orifice 1.5 (VXA311 5 4)P1 0.55MPa How to Calculate Flow/Air qEquation in the domain of subsonic flow P1+0.1013=(1 to 1.8941)(P2+0.1013) Calculation by Cv factor Q=4073.4Cv gP(P2+0.1013)l/min(ANR) Calculation by effective area Q=226.3S gP(P2+0.1013) l/min(ANR) wEquation in the domain of sonic flow P1+0.1013 1.8941

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Calculation of Load Factor for Static Load m3: Mass m3 max (from q of graph MY1H/m3) = 50 (kg) Load factor 1 = m3/m3 max = 6.525/50 = 0.13 m3 Z M2: Moment M2 max (from w of graph MY1H/M2) = 50 (Nm) M2 = m3 x g x Z = 6.525 x 9.8 x 37.4 x 103 = 2.39 (Nm) m3 Load factor 2 = M2/M2 max = 2.39/50 = 0.05 M2 1206 Model Selection MY1H Series X M3: Moment M3 max (from e of graph MY1H/M3) = 38.7 (Nm

MHZ

hexagon socket head cap screws with 3.3 top diameter, or JISB1101 type M2 round head screws.

Electric Actuator with Integrated Guide

For the dimensions of the motor mounting position, refer to the dimensions on page 70 for the guidelines for assembly and designing. 80 46 (2 x n1)-6.6, Drill through 13, counter bore depth 6 5 thread depth 4 4-M2 x 0.4 Photo micro sensor 12 (Groove depth 1) E D Proximity sensor 7.5 Stroke + 96 (Table movement range) (25.5) 97.5 4.5 1 60 2 x n2-M2.6 x 0.45 4-C3 PCD3 56 8 4 5.8 3.3 thread

MHZ

hexagon socket head cap screws with 3.3 top diameter, or JISB1101 type M2 round head screws.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

, m3 max. m1, m2, m3 max.

17

m2 M3 m3 1.

SX

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted 32 Series SX3000/5000/7000 Dimensions: Series SX3000 2 position

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.