Pin Clamp Cylinder Series CKQ/CLKQ

) (Clamp stroke) 10.5 65 40 A 10 0 -0.5 Lock at extended direction 15 3 2 (H) (L) (L) (H) 17 85 (Same measurement on 2 sides) (Same measurement on 2 sides) 3 LOCK 40 600.05 (t=1 x 1, t=0.5 x 2) Depth 15 4 x M10 x 1.5 2 sides x (Same measurement on 2 sides) 40 (when the shims are attached) 40 2 sides x 40 (M10) 400.05 (8) 2 x 8H7 Depth 13 (Same measurement on 2 sides) With shims 47 13 91 P1

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

approx. 0.77MPa, for orifice 3 (VDW30) is P1 approx. 0.45MPa, for orifice 4 (VDW30) is P1 approx. 0.24MPa.

VEX-OMO0001

. -4VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / ( ( ( ( ) ) ) ) -5VEX-OMO0001 3 VEX1 3 Series 0 ON-OFF (AF ) (AMAFM ) (P.2.3) [1 P][1P] PE ( ( ( ( ) ) ) ) IR2000 VEX 33 ITV VY 11 (0.5MPa ) (0.1MPa ), 2 Nm 1/6 MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa -6VEX-OMO0001 3 VEX1 3 Series 0 +0.1MPa 2 PE(ASN2-M5) 0.1MPa P1 O M5 P1 O VEX1-A30-3 O P1 P1 P1

VDW Series

approx. 0.77MPa, for orifice 3 (VDW30) is P1 approx. 0.45MPa, for orifice 4 (VDW30) is P1 approx. 0.24MPa.

VXA21/22

(ANR) Orifice 3 (VXA3135 4)P1 0.1MPa Orifice 2.2 (VXA3125 4)P1 0.23MPa Orifice 1.5 (VXA311 5 4)P1 0.55MPa How to Calculate Flow/Air qEquation in the domain of subsonic flow P1+0.1013=(1 to 1.8941)(P2+0.1013) Calculation by Cv factor Q=4073.4Cv gP(P2+0.1013)l/min(ANR) Calculation by effective area Q=226.3S gP(P2+0.1013) l/min(ANR) wEquation in the domain of sonic flow P1+0.1013 1.8941

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Calculation of Load Factor for Static Load m3: Mass m3 max (from q of graph MY1H/m3) = 50 (kg) Load factor 1 = m3/m3 max = 6.525/50 = 0.13 m3 Z M2: Moment M2 max (from w of graph MY1H/M2) = 50 (Nm) M2 = m3 x g x Z = 6.525 x 9.8 x 37.4 x 103 = 2.39 (Nm) m3 Load factor 2 = M2/M2 max = 2.39/50 = 0.05 M2 1206 Model Selection MY1H Series X M3: Moment M3 max (from e of graph MY1H/M3) = 38.7 (Nm

MHZ

hexagon socket head cap screws with 3.3 top diameter, or JISB1101 type M2 round head screws.

Electric Actuator with Integrated Guide

For the dimensions of the motor mounting position, refer to the dimensions on page 70 for the guidelines for assembly and designing. 80 46 (2 x n1)-6.6, Drill through 13, counter bore depth 6 5 thread depth 4 4-M2 x 0.4 Photo micro sensor 12 (Groove depth 1) E D Proximity sensor 7.5 Stroke + 96 (Table movement range) (25.5) 97.5 4.5 1 60 2 x n2-M2.6 x 0.45 4-C3 PCD3 56 8 4 5.8 3.3 thread

MHZ

hexagon socket head cap screws with 3.3 top diameter, or JISB1101 type M2 round head screws.

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

, m3 max. m1, m2, m3 max.

17

m2 M3 m3 1.

SX

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted 32 Series SX3000/5000/7000 Dimensions: Series SX3000 2 position

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Stability of suction position,

At this time, read vacuum pressure P1, obtain the suction flow rate from the flow rate characteristics graph for the ejector that is being used, and render this amount as the leakage of the workpiece.

VN-OMP0002

) (P1) (P1) (P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) 15A 211 420-04 1/2 B(12.7) 20A 311 500-06 3/4 B(19.1) 25A 411 600-10 1 B(25.4) 2 32A 511 800-12 1 1/4 B(31.8) VNA01 VNA02 VNA03 VNA1 40A 611 900-14 1 1/2 B(38.1) (P1) () 12 50A 711 900-20 2 B(50.8) (P2) () 10 (),12(P1) 10(P2) EXH , 6 VN-OMP0002 1 2 3 () 4 P2 5 6 7 8 9 10 11 O O 12 13 14 7 VN-OMP0002 No. 1 2 3 4

VN-OMT0001

) 12(P1) 12(P1) 12(P1) 10(P2) 10(P2) 10(P2) 10(P2) 12(P1)10(P2) VND0D VND02D 12(P1) 10(P2) 1mm 12(P1) 10(P2) 2(B) 1(A) 6 VN-OMT0001 No. 7 VN-OMT0001 : TT 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Ejector Valve Unit, Series ZYY/ZYX

A A A B A B P1 B B Section A-A (ejector) Section B-B (solenoid valve) Replacement parts list Parts list No. 1 2 3 4 5 6 7 8 Description Material No. Description Part No.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Max. operating pressure differential (MPa) Weight (g) Max. operating pressure differential (MPa) Weight (g) Flow characteristics Flow characteristics Max. system Note) Max. system Note) Orifice Orifice size (mm) Model AC DC Port size Port size (mm) Model AC DC pressure pressure size (MPa) Av x 10-6 m2 Cv converted (MPa) Av x 10-6 m2 Cv converted 2 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120

Slider Type/Ball Bushing Bearing

L2 L1 xStatic moment Examine M2. Since M1 & M3 are not generated, investigation is unnecessary. M2 = W L1 = 10 0.05 = 0.5 [Nm] 2 = M2/M2 max = 0.5/16 = 0.031 W = 1 [kg] = 10 [N] W M Find the value M2 max when Va = 300 mm/s from Graph (3).

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

L1 M2 = m g (L1 + B) 103 2. Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.