MHZ

D4-MM thread depth L (Thread for mounting attachment) 20K K J J B A A D G D B F C S W O (mm) Model A B C D F G Open Closed Double acting Single acting J K L Weight (g) MM W MHZL2-103 MHZL2-163 MHZL2-203 MHZL2-253 +2.2 0 2H9 2.5H9 3H9 4H9 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 5 8 10 12 0 0.05 0 0.05 0 0.05 0 0.05 70 145 290 505 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 60 135 270 460 7 9

Air Slide Table Series MXQ

Solid State Auto Switch: D-M9B, D-M9N, D-M9P, D-M9BW, D-M9NW, D-M9PW Stroke B Stroke E Model A 10 20 30 40 75 100 125 150 10 20 30 125 75 100 40 50 150 50 B MXQ6 0.5 0.5 0.5 7.5 7.5 9.5 9.5 9.5 17.5 17.5 10 MXQ8 26 2 2 6 10 25 12 12 16 20 36 35 11.5 MXQ12 34.5 34.5 18.5 8.5 8.5 15.5 15.5 28.5 18.5 18.5 25.5 44.5 44.5 25.5 15.5 MXQ16 27.5 45.5 45.5 24.5 14.5 14.5 14.5 20.5 34.5 24.5 24.5

ZX

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators NDh8 NDh8 Section Y detail GA GC Y YY GA GC Mounting nut Relief port 2 x M5 x 0.8 Section YY detail NN NN MM Rod end nut Piping port 2 x M5 x 0.8 MM C D D B 0 0.3 NA H A F B 0 0.3 F NA S + Stroke A Z + 2 x Stroke H + Stroke M12 x 1.0 M10 x 1.0 NN (mm) 16 10 15 15 18.3 15 20 17 8 8 5 5 11 11 28 28 20.5 20.5 D H Bore size B F MM NA GC GA C A

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

NDh8 WB WA Section Y detail Y GB GC GA Section YY detail NN YY Mounting nut Relief port M5 x 0.8 MM NN WW Rod end nut Piping port 2 x M5 x 0.8 C D B 0 0.3 B 0 0.3 F Z + Stroke S + Stroke NB H NA F A (mm) NDh8 GC 5 5 22.9 22.9 10 16 109.5 110.5 73.5 74.5 45 45 13.4 13.4 20 20 29.5 29.5 M4 x 0.7 M5 x 0.8 28 28 6.5 6.5 8 8 4 5 17 20 15 18.3 15 15 Z S WW WB WA NB NA NN MM H GB GA F D C B A Bore

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Manifold Specifications Porting specifications Applicable stations Series Port size 1(P), 3(R) C6 4(A), 2(B) C3, C4, C6, M5 Port location Top VQ1000 Max. 16 stations U side D side 1 2 3 Stations D-sub Connector (25 pins) Cable assembly AXT100-DS25015 030 050 Wire Color by Terminal No. of D-sub Connector Cable Assembly The D-sub connector cable assembly can be ordered individually or included

SZ3000

2 B 2 B 2 B 2 PE R 3 B 2 R 3 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 24 13.3 (Pitch) P= 10.5 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 2n1-M5 x 0.8 (A, B ports) (L4) L3 (3.2) 101.2 U Side D Side 8 3.1 18 28.8 35 36.3 58.2 3.5 5.5 DIN rail Manual override

Rotary Clamp Cylinders

Auto Switch Proper Mounting Position Applicable Cylinders: MK2 Series D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-A72/A7H D-A80H/A73C D-A80C/F7/F79F D-J79/F7V/J79C D-F7BA/F7W D-J79W/F7WV A Auto switch model D-A79W D-F7NTL D-A9 D-A9V D-A73 D-A80 D-P4DWL B B A A B A B A B B B A A Bore size 12 7 34 29 4 26 8 4 6.5 30 26 28.5 20 14 9 34.5 30 6 27 10 6 8.5 31 27 29.5 25 15.5 10.5 38 33.5 7.5

Parallel Style Air Gripper Series MHZ

Max. tightening torque (Nm) 21H9 3 MHZ2-40 M8 x 1.25 11.8 MHL M2.5 x 0.45 0.49 26H9 3.5 M2.5 x 0.45 0.49 34H9 4 MHR M3 x 0.5 0.88 42H9 4 M4 x 0.7 2.1 MHK Perpendicular mounting (Body tapping) M5 x 0.8 4.3 M5 x 0.8 4.3 MHS M6 x 1 7.3 Note) Use body tapped for D-Y59, D-Y69, D-Y7P with auto switch types.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

model D-C7/C8 D-C73C/ C80C D-H7W D-H7NF D-H7BAL D-H7 D-H7C C85 D-B5/B6 D-B59W D-G5NTL D-H7C D-C73C D-C80C D-B5/B6 D-B59W D-G5NTL C95 Applicable bore size (mm) A B A B A B A B A B HS HS HS CP95 20 9 3 6 8 4.5 24.5 27 27.5 20.5 15.5 17.5 19.5 16 25 9 3 6 8 4.5 27 29.5 30 20.5 15.5 17.5 19.5 16 NCM 32 10 4 7 9 5.5 30.5 33 33.5 21.5 15.5 18.5 20.5 17 40 14.5 8.5 11.5 13.5 10 35 37.5 38 23.5

24

With head end lock D-M9 D-M9V D-M9W D-M9WV D-Z7 D-Z80 D-Y59 D-Y69 D-M9A D-M9AV D-A9 D-A9V D-Y7P D-Y7PV D-Y7W D-Y7WV D-Y7BA Auto switch Auto Switch Proper Mounting Position [mm] *1 D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV Auto switch model D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV D-Y7BA *1 D-A9 D-A9V *3, *4 D-P3DWA *2 D-P4DW Bore size A B A B A B A B A B 20 9 38 5 34 4 33 25 9.5 38 5.5 34 4.5

REA/REB

Auto switch model Bore size (mm) D-A9 A dimension D-M9 B dimension C dimension D dimension D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7

REA/REB

A RE A B A dimension B dimension Auto switch model REC D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F CX D-A73/A80 D-F7NTL D-A73/A80 D-F7NTL CY Bore size (mm) MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

VQC

D-side w How to order applicable valves VQC 4 0 5 E B 0 Y 1 Series VQC4000 F E D A C B Stations are numbered in ascending order from the D-side.

LX

(A contact) F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL Slide screw Lead screw type N.O. (A contact) N.C. (B contact) S N.C. (B contact) Lead screw lead N.C. (B contact) A B 6mm 12mm N.C. (B contact) N.O. (A contact) N.O. (A contact) Stroke N.O.

Series VQ Metal Seal/Rubber Seal Body Ported

Porting specifications Applicable stations Series Port size P, R Port location A, B C6 C3, C4, M5 VQ0 VQ1000 VQ2000 Side Max. 16 C3, C4, C6, M5 C4, C6, C8 C6 Side Max. 16 C8 Side Max. 16 D-sub connector (25 pin) 015 AXT100-DS25-030 050 Cable Assembly Wire color table by terminal number of D-sub connector cable assembly: ( ) The D-sub connector cable ass'y can be ordered individually or included

KR

0.8 Hose Nipple: MS-5H-4/6 Weight (g) 2.5 3.7 Effective area (mm2) 2.1 4.0 F E Model L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 7 8 7 8 1.8 2.5 M5 x 0.8 Width across flats B Hose Elbow: MS-5HLH-4/6 Weight (g) 4.2 6.2 Effective area (mm2) 1.4 2.5 Model L A lB C D E F M N Width across flats 7 MS-5HLH-4 MS-5HLH-6 15.8 17.8 12 13.5 7 8 8.5 9.5 1.8 2.5 7 8 6.5 8.5 15 16 5.5 6 M5 x 0.8 Universal

Modular/F.R.L. Units Series AC

AF F F E E B C AR Cross spacer E: 4 x Rc F: Without thread E D A AL A 23 B 16 C 14 D 25 Applicable model AC10 Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 AW AC20 40 40 22 40 AG AC25, AC30 49 43 28 48 AV AC40 60 48 36 54 AF800 AF900 Caution on Mounting AC40-06 72 62 40 62 1.

LX

(A contact) F9N F9P F9G F9H F9GL F9HL F9B F9NL F9PL F9BL D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL Slide screw Lead screw type N.O. (A contact) N.C. (B contact) S N.C. (B contact) Lead screw lead N.C. (B contact) A B 6mm 12mm N.C. (B contact) N.O. (A contact) N.O. (A contact) Stroke N.O.

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9