3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

How to Order Rated pressure range ISE20B 0.1 to 1 MPa M For positive pressure ISE20B M5 X For vacuum/ compound pressure ZSE20B X M M5 q w e r t y u q Rated pressure range w Output specification e Unit specification ZSE20B 0 to 101 kPa ZSE20BF 100 to 100 kPa Symbol Description R NPN open collector 2 outputs + Analog voltage output*1 S NPN open collector 2 outputs + Analog current output*1

VQ5000

Leakage voltage Particularly when using a C-R element (surge voltage suppressor) for protection of the switching element, take note that leakage voltage will increase due to leakage current flowing through the C-R element, etc.

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Table of Contents

condition r C = 0.90 based on condition r 2 2 Based on condition t, A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

F

D E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

CY1

Construction/Dimensions (mm) R Note 2) F Note 1) PA M MD MM LA L C HB B HA W Model A CY1B 6 12 M3 x 0.5 x 3l 15 17 6.3 11 35 18 10 2.5 CY1B10 17 M3 x 0.5 x 3l 15 38 18 25 9.5 26 10 2.5 CY1B15 4 25 M3 57 25 M4 x 0.7 6.5 23 16 35 5.5 16.5 6 36 CY1B20 27 4 30 M4 x 0.7 M3 66 18 36 6.5 5.5 17 23.5 6 37 CY1B25 36 M5 x 0.8 M4 5 30 46 8.0 21 28.5 70 47 20 5.5 7 CY1B32 M5 6 47 M6 x 1.0 9.5

LEC-OM07605CN

d1 a a1 B c d d1 e e LECSS2-T5LECSS2-T7 LECSS2-T8 6 6 1560.5 6 M5 b LECSS2-T9 c 12 12 1560.5 6 420.3 M5 d a 4.9 /LECS / 1./ YES [ ]NO [ ] 2.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

of P and R port Type 40R Applicable solenoid valve SYJ514R-SYJ524R-How to Order SS3YJ5-40R-05 -01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

R Port M5 0.8 R Port M5 0.8 S 20 20 stations A, B Port M3 0.5 P Port P Port M5 0.8 A, B Port M3 0.5 Applicable solenoid valve: SYJ3 30SYJ3 33M5 0.8 Type 32(4 Port / Base mounted type) Applicable blank plate ass'y: SYJ3000-21-2A SS5YJ3-32-05 --M5T Type 32 Type S32 ( ) Single solenoid coil is located on same side as the A, B port.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

10 16 4.3 2-3.2 Mounting holes Manual override 24.5 7.8(C3, C4, C6) (M5: 5.7) Cover dia 1.6 Cross section 0.34mm2 (Lead wire) 34 35 300 (53) 27.5 16.3 18 1.2 13.8 13.6 7 (7.8) (24.5) 2-3.4 Mounting holes 41 Foot bracket M5 X 0.8 P port M5 X 0.8 R port R 3 P 1 10.7 9 M5 X 0.8 External pilot port 32 (Only external pilot style (R)) L plug connector (L): VQZ115-lLl-C3, C4, C6, M5-PR M plug connector

Modular Type Lubricators Series AL

D E R L U B R I C AT O R S E R I E S NAL NAL800-N12 (1 14 NPT) NAL800-N14 (1 12 NPT) NAL900-N20 (2 NPT) T E C H N I C A L SPECIFICATIONS D I M E N S I O N S L U B R I C AT O R NAL800 NAL900 Max Supply pressure 1.5MPa / 220PSI Max Operating Pressure 1MPa / 145PSI Operating Temp Range 5~60C /40~140F Recommended lubricant Turbine oil #1 (ISO VG32) Bowl Polycarbonate Pipe Size 114, 112 2 Min

XL

(a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

4/5 Port Air Operated Valve SYJA3000 Series

along with the manifold base model no. 5(R) 1 (P) (R)3 3(R) 1 (P) 3 position exhaust center 3 position exhaust center 4(A) (B)2 4(A) (B)2 (Example) SS5YJA3-41-03-M5 1 pc.

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Intrinsically Safe Valve

(TT) 2 A B C 53-SY5 40(R)-TT-02 Max. 10 177 L (Lead wire length) Lead wire marking No. 1 (+), No. 2 () 0.75 mm2 5.9 (88.5) 24 Series 53-SY5000/7000/9000 Dimensions: 53-SY5000 3-position closed center/exhaust center/pressure center L-type plug connector (L) 53-SY5 40(R)-L-02 19 18 9.5 3 4 5 37.2 15.5 15.5 48 4 2 x 4.3 (For mounting) M5 x 0.8 (External pilot port) 4 Insulator: Black () B A

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Note ) 2 position double and 3 position cannot be mounted. 40.6 3(R2) 5(R1) P1 Po 1(P) Circuit diagram Plug-in type Plug lead type SUP blocking plate VVQ5000-16A-1 EXH blocking plate VVQ5000-16A-2 18.5 20.2 When 2 or more different pressures are supplied to one manifold, blocking plates are installed between stations under different pressures. 28.8 44.6 R P R R P R R P R SUP/EXH passages

3 Port Solenoid Valve Metal Seal Series VZ200 1

Rc 1/8 VQ 1.0 0.30 0.25 0.85 0.35 0.22 C[dm3/(sbar)] b Cv C[dm3/(sbar)] b Cv 0.60 0.43 0.15 0.52 0.35 0.13 0.60 0.43 0.15 0.52 0.35 0.13 0.90 0.25 0.21 0.85 0.35 0.22 Flow characteristics 1 2 (P A) VKF 2 3 (A R) VQZ Body ported Max. operating frequency (c/s) (AC/DC) (1) 20 17/17 or less 0.085 20 17/17 or less 0.155 VZ Response time (ms) (AC/DC) (2) Weight (kg) (3) VS Note 1) Minimum

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

4/5 Port Air Operated Valve Series SYJA3000 1

closed center (B) 2 (A) 4 (B) 2 (A) 4 Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold base model no. 1 (P) 3 (R) 5 (R) 1 (P) 3 (R) 3 position exhaust center 3 position exhaust center (B) 2 (A) 4 (B) 2 (A) 4 (Example) SS5YJA3-41-03-M5 1 pc.