Electric Actuator with Integrated Guide

a=1000 a=2000 a=3000 L2 (mm) Mer Rolling Yawing 100 m L2 Mer 0 30 20 10 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100 L3 m Mey a 0 30 20 10 Transfer load m (kg) Refer to page 71 for deflection data. 34 38 Non-standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPF(X10) Scale: 20% Photo micro sensor 50 30 thread depth 8 4-M5 x 0.8 E D Proximity sensor (2

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(Example) For M4: L2 = 8 mm Applicable shaft types: X, Z Q1 = M C1 = C L2 = L2 = D1 = L1 + (3 x P) L1 = C1 Q2 = M Q2 = M Z axis X axis L1 = X = (mm) (mm) (mm) D1 5 to 7.9 5 to 14.9 5 to 16.9 8 to 19.9 8 to 24.9 L1 max Size 30 50 63 80 100 X 3 to 25 3.5 to 36 3.5 to 41 4 to 50 5 to 60 Q2 M3 M4, M5, M6, M8 M4, M5, M6, M8, M10 M4, M5, M6, M8, M10, M12 M5, M6, M8, M10, M12 Q1 M3 M4, M5, M6,

CQS

B + Stroke A + Stroke 20, 25 Rod end male thread Rod end nut Rod End Male Thread Bore size (mm) 12 16 20 25 H1 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 X 10.5 12 14 17.5 L1 14 15.5 18.5 22.5 C1 9 10 12 15 Basic Style Without auto switch With auto switch Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 C E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5

SZ3000

M5 x 0.8 Mixed C4 C6 M5 M 1 2 3 4 5 5 6 24VDC 12VDC Match to the voltage specifications of the manifold.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Panel mount adapter A1 Bracket A e Unit specification r Piping specification Symbol Description Nil Units selection function*2 M SI unit only*3 P Units selection function (Initial value psi)*3 Symbol Description 02 R1/4 (M5 female threaded) N02 NPT1/4 (M5 female threaded) F02 G1/4 (M5 female threaded) C01 Rc1/8 A2 URJ1/4 (Face seal fitting) B2 TSJ1/4 (Compression fitting) ZS-46-B Panel mount

MGP

D (mm) B 0.2 MGC B 0.2 MGF CY1 A 0.2 A 0.2 Hex socket head mounting screw 140 214 50 66 116 170 M12 X 1.75 M16 X 2 Hex socket head mounting screw 50 56 72 82 98 106 130 142 180 210 D(mm) Bore (mm) A (mm) B (mm) C (mm) Bore (mm) A (mm) B (mm) C (mm) MY1 MGPM MGPL 32 47 M4 X 0.7 M5 X 0.8 M5 X 0.8 M6 X 1.0 M8 X 1.25 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 10 12 14 18

VFS

A A A B B B P P P 1.0 MPa 1.5 MPa Set pressure range (1) 0.1 to 0.83 MPa 0.05 to 0.83 MPa Ambient and fluid temperature 5 to 60C (No freezing) Port size for connection of pressure gauge Weight (kg) Effective area at supply side (mm2) (2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Rc 1/8 M5 x 0.8 0.16 5.5 5.1 P A P B 12 11 A EA B EB 0.83 38 40 11 12 26 24 32 31 21 18.5 35 31 44 38 90 77 0.46 18.5

MXS Series Air Slide Table

Applicable model P(Hexagon socket head screw) Q(Hexagon socket head screw) Mounted to body J M I F B C D E H A MXS-AS6 5 16.5 MXS 6 P M 17.8 10.5 M2.5 X 10 12.5 8.5 M2.5 X 8 6 2.5 7 6 M5 X 0.8 C A MXS-AS6-X11 15 26.5 MXS-AS8 5 16.5 MXS 8 21.5 14.6 10 M3 X 10 11 M3 X 12 7 3 8 7 MXS-AS8-X11 15 26.5 M6 X 1 MXS-AS8-X12 25 5 36.5 B MXS-AS12 20 E MXS12 18.5 13 M4 X 12 16 M4 X 15 10 4 12 31 9.5

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

( ) depth 4 +0.030 0 29.5 (Extension end adjuster) 10 Bottom view of MXQ12L-40 13228.5 J I 5.5 10 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 Max. 13 (Retraction end adjuster) 4H9 ( ) depth 4 +0.030 0 9 39 29 4H9 ( ) depth 4 +0.030 0 5 HA GA A B NN x M5 x 0.8 thread depth 10 9 8.5 9 4.2 4.2 A B 16 8 16 8 G (NN 1) x H H B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Battery-less

C B M A W Model LES25 B side parallelism to A side 0.4 mm B side traveling parallelism to A side Refer to Graph 1.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

CRQ2

(Example) For M3: L1 = 6 mm Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Size 10 15 20 30 40 Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 (mm) Q1 Size 20 30 40 M3, M4 M3, M4,

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

U D B M CE-compliant SI unit part no.

Speed Controller with Indicator

-U10-32/23 AS131FSG1-M5-04 4 8.2 11.5 19.8 AS131FSG1-U10/32-04 AS131FSG1-M5-06 6 10.4 20.9 20.4 36.6 8 AS131FSG1-U10/32-06 7.2 M5 x 0.8 10/32UNF 8 9.6 9.4 Inch Size [mm] Model d T H D1 D2 D3 L1 L2 L3 L4 L5 A M W1 Y Weight [g] Unlocked Locked Unlocked Locked AS131FSG1-M5-01 1/8 7.2 9.4 9.4 11.6 19.4 17.5 33.8 39 36.5 35 33.5 13.3 13.6 9.6 7 AS131FSG1-U10/32-01 AS131FSG1-M5-03 5/32 8.2 19.8

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

It must be mounted on the top or bottom (Fig. b). Fig. a 50 40 30 20 m Work load m [kg] m LEYG25M 10 5 4 3 2 Fig. b 1 50 40 20 30 10 5 Transfer speed [m/min] 747 LEYG Series AC Servo Motor * These graphs show the work load when the external guide is used together. When using the LEYG alone, refer to pages 746 and 747.

SMC

x 0.8 thread depth 8 N 4-M4 x 0.7 thread depth 6 35 1 x F 2 4H9 depth 3.5 +0.030 0 27 M 0.5 30 32 Z ZZ (NN1) x H G 8.5 18.5 8.5 18.5 H B A 4.2 8.5 9 9 20 1 4H9 depth 3.5 +0.030 0 5 B A NN-M5 x 0.8 thread depth 10 4H9 depth 3.5 +0.030 0 HA GA Section AA Section BB (mm) Model F 35 35 35 50 35 55 65 ZZ 99 99 99 111 131 177 231 M 71 71 71 83 103 149 203 Z 70 70 70 82 102 148 202 K 26.5 36.5

Modular Design with Uniform Body Style

B B B AC20A-D 1/8 1/8 M5 x 0.8 Width across flats 14 Width across flats 14 N.O.: Black N.C.: Gray B AC30A-D to AC60A-D B B B B B B Thread type/Rc, G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Barb fitting applicable tubing: T0604 1/4 1/4 1/4 Width across flats 17 Width across flats 17 Width across flats 17 Standard specifications Bracket mount P1 P2 A B C E F G J K M Q1

Stopper Cylinder

across flats K T 0 0.1 E W M D E 2 x N through 4 x O counterbore 2 x P (Rc, NPT, M thread) Stroke A + 2 stroke B + Stroke V H + Stroke Width across flats K T 0 0.1 Y M Q F D E A + 2 stroke B + Stroke V H + Stroke Width across flats K M T 0 0.1 D E 2 x P (Rc, NPT, G) A + 2 stroke B + Stroke V H + Stroke Width across flats K M Q F Z Stroke 2 x P (Rc, NPT, G) M E J Q F Z Stroke 32 40 50 RSQB