MHR2-30R 76 73 B MHR2-30E port position 3-M5 X 0.8 thread depth 10 P.C.D43 (Mounting thread) 80 120 15.5 120 C A 54 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 14 M5 X 0.8 Finger opening port M5 X 0.8 Finger closing port 25 25 6-M5 X 0.8 thread depth 10 (A, B, C common view) 50 3-5 +0.02 0 depth 10 16h9 0 0.043 (A, B, C common view) 2 10 38.5 22 (76) 70 11 25 2 12 0 -0.05 5
(R1)5 1 (P) 3(R2) For adding stations Rubber seal 3 position closed center 2(B) (A)4 3 Port plug mounting port (R1)5 1 (P) 3(R2) Nil A B None Port 4(A) Port 2(B) 3 position exhaust center 2(B) (A)4 4 Cylinder port (R1)5 1 (P) 3(R2) Symbol Port size Port location 3 position pressure center C3 C4 C6 M5 L3 L4 L6 L5 With 3.2 One-touch fittings With 4 One-touch fittings With 6 One-touch fittings
M3 Port size With One-touch fittings M3 X 0.5 M5 X 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 Thread U10/32 01 02 03 04 R(PT) Unified thread (10-32UNF) Meter thread (M3, M5) _ N NPT AS Needle Valve/Flow Characteristics ASN AS2301F-01, AS2311F-01 AS2201F-01, AS2211F-01 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AQ Supply pressure: 0.5MPa Supply pressure
A port R port B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) 00 M5 00 M5 01 00 01 02 00 02 03 04 Symbol Mounting Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Base mounted 1 8 1 4 2 Without sub-plate 1 4 3 8 1 2 4 JIS Symbol Note) A M5 01 02 02 03 04 04 06 10 10 12 14 20 Note) M5 1 8 1 4 1 4 3 8 1 2 1 2 3 4 1 Note) Note) 3 Body ported 5 1 1 11 4 7 1 4 11 2 1 2
( ) depth 4 +0.030 0 29.5 (Extension end adjuster) 10 Bottom view of MXQ12L-40 13228.5 J I 5.5 10 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 Max. 13 (Retraction end adjuster) 4H9 ( ) depth 4 +0.030 0 9 39 29 4H9 ( ) depth 4 +0.030 0 5 HA GA A B NN x M5 x 0.8 thread depth 10 9 8.5 9 4.2 4.2 A B 16 8 16 8 G (NN 1) x H H B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8
P.90 M-5ALHU-4 4/2.5 1 8 Rc(PT) -M5 female Gasket 6/4 M-5ALHU-6 P. 91 To seal M3 thread.
C D Side support B MY-SB 2 x J 2 x H C D A B A B C D E F G H J Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A 61 71.6 15 26 4.9 3 6.5 3.4 M4 x 0.7 B MY-S20A 67 79.6 25 38 6.4 4 8 4.5 M5 x 0.8 B MY-S25A 81 95 35 50 8 5 9.5 5.5 M6 x 1 B MY-S32A 100 118 45 64 11.7 6 11 6.6 M8 x 1.25 B 120 142 MY-S40A M10 x 1.5 55 80 14.8 8.5 14 9 B 142 164 MY-S63A 172 202
A B D Weight [g] ZP3P-T20PTSFK10-B5 32.5 68.5 23 28.5 ZP3P-T20PTSFK20-B5 42.5 106.5 51 41.8 6 ZP3P Series Dimensions: With Buffer ZP3P-T25PTSFJM-B5 ZP3P-T25PTSFKM-B5 M5 x 0.8 Width across flats 8 M5 x 0.8 Width across flats 8 Width across flats 14 Width across flats 14 5 5 3 3 3 3 17.5 21.5 A D B 17.5 21.5 A D B M10 x 1 M10 x 1 M5 x 0.8 Gasket M5 x 0.8 Gasket Width across flats 14 Width across
size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.
(one each on three sides) 3-R2.5 12 2 +0.030 0 3-5H9 long groove depth 4 (one each on three sides) 50h9 0 -0.062 M5 x 0.8 Port A M5 x 0.8 Port B 4-M6 x 1 depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 R SMC R E 16 8 O P P T A I R R G Y R A I 48 36 Side A Side B 12-11-15 16 Series MRHQ Dimensions MRHQ25 A 70 58 B 93 4-M6 x 1 depth 10 47 64 Courtesy of Steven Engineering, Inc.-230 Ryan
106 46.8 59.2 9 9 U side 83.5 55.5 M5 ground screw 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 6 Indicator light B 2 A 4 A B 5 SMC SMC SMC SMC SMC A B B B B B B 2 A 4 Manual override A B 4 A L2 L1 58.5 P = 41 B 2 A 4 A B 3 A B 2 A 4 A B 2 A 34.5 48 68.5 P = 41 B 2 A 4 A 1 A X 12 Stations R4.5 15.5 17 22 51 69 117 D side 107.8 179 (Single, Double, 3 position, Rubber type) 184.5
16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5 Mounting hole 300 300 15.5 P = 10 1 2 3 4 5 n U side D side 40.2 15.5 46.2 19.4 A A 9.5 16.7 P = 10 n-M5 x 0.8
Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 1/4 10 One-touch fitting Width across flats 17 O S Accessory specification Standard specification Panel mount With auto drain With pressure gauge Bracket mounting size Port size Model B 173 201 239 C 73 86 92 D 52 59 75 E 40 57 73 G 45 50 70 A 40 53 70 H 63 66 76 J 27
C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A B M12 x 1.75 70
G3-G4 120V AC/DC 0.5A/4.8VDC 2.4VA 11 15 11 (4) (a) LEC-MR-RB-12 [mm] TE1 TE1 G3 36 40 6 6 G4 P 15 C 2AWG24~2.5mm 2AWG12 0.2mm 0.50.6[Nm] 0.2mm2(AWG24)2.5mm2(AWG12) 0.5~0.6[Nm] M5 3.24[Nm] M5 3.24[Nm] 5 TE1 1.1[kg] 6 149 2 (20) 169 (b) LEC-MR-RB-032 [mm] TE1 TE1 6 6 30 G3 15 G4 P C 0.50.6[Nm] 0.2mm2(AWG24)2.5mm2(AWG12) 2AWG24~2.5mm 2AWG12 0.2mm 0.5~0.6[Nm] M5 3.24[Nm] M5 3.24[
A Black zinc chromated MY-16B-Stroke B Nickel plated MY-16BW-Stroke 8-12-17 18 Series MY1W Dimensions: 16, 20 L (LL) 4-MM depth M 4-B counterbore depth C LD through-hole bottom side J depth K PA YW PB QW LW PG Q+ Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) W CH LH RR SS NE H RR SS QQ NH NC M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) 2 x 2-M5 x 0.8 PP TT UU This port
bolt B Adjustment bolt B Adjustment bolt B adjustment amount adjustment amount adjustment amount 90 Rotation 90 Rotation 90 Rotation 9 Rotary Table Series MSQ Construction o i t !
AC200230V AC100120V 40 6 AC100120V AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 M5 3.24[Nm] U U CNP3 V CNP3 V W W 11 3 11 11.2 (1) Mini Delta Ribbon(MDR)(3M()) (a) [mm] E D A C Log 39.0 23.8 B 12.7 A B C D E 10126-3000PE 10326-52F0-008 25.8 37.2 14.0 10.0 12.0 AWG2430 (b) M2.6 [mm] E D A C F Log
mm2 L 234.1 (Lead wire length) Max.10 13
ATEX Compliant Base Mounted Type Series 52-SY5000 Dimensions 2-position single L plug connector (L) 52-SY5140 (R) -L-02 19 18 9.5 2 x 4.3 (Mounting holes) Manual override 60.3 37.2 8.3 48 M5 x 0.8 (External pilot port) 15.5 15.5 4 Insulation Black () B A 17.5 A B 35 X P EB EA Insulation Red (+) E P 17 4.3 56 17 M5 x 0.8 (Pilot EXH. port)