Series IDG

Note 1) Symbol P is for M type only. This is not applicable to the V type since it is equipped with a relief type regulator, 100 Note 2) This is not applicable in case of thread type symbols N and F, because barrel nipples are used for equipment connections.

PSxx-OMS0006CN

() 1 V (80 mA ) 1 1.5ms (20,100,500,1000,2000,5000 ms ) 2 0 2, 2,bar,psi,InHg,mmHg MPa,kPa,kgf/cm 3 MPa,kPa,kgf/cm bar,psi LCD 3 (X2) 1)/ 2) 1)4 (7 ) 2)4 (1 11 7 ) ON OUT1 4 0,10,50,100,500,1000,5000 ms -62No.PS-OMS0006CN-G ZSE20() ZSE20F() ISE20() IP40 AC1000 V 1 50 M(DC500 V ) -550 -1060 () 3585RH() CE/UKCA UL/CSA(E216656) 2 m 1(0 ms) 2 3MPa/kPa 490 M5 01 N01 C4H C6H

1

L M L Max.

ZSE3/ISE3

Wiring specifications Grommet type (Lead wire: 0.6 m) Nil Grommet type (Lead wire: 3 m) L Connector type (Lead wire: 0.6 m) C Connector type (Lead wire: 3 m) CL Without connector CN Analog output is only available in a grommet type. Please refer to page 16-4-5 for figure.

Series 10-, 21- AW-B Filter Regulator

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut Note 2) AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Round type Note 3) Pressure gauge Note 4) Standard 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

ZQ-OM01401

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Model Uni thread size Metric size Inch size Elbow type 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Gasket AS22l1FSl-U01 1/8 V V V V V V V V V AS22l1FSl-U02 1/4 V V V V V V V V V V Female thread AS32l1FSl-U02 1/4 V V V V V V V Rc, G NPT, NPTF Uni thread AS32l1FSl-U03 3/8 V V V V V V V AS42l1FSl-U04 1/2 V V V V V Shape of Uni thread ridge Use of the chamfered surface of the female thread

PSxx-OMU0008CN

mA 2.420 mA 3.220 mA 12 V 300 24 V 600 50 0.4 V 5 ms -77No.PS-OMU0008CN-D ZSE20C ZSE20CF ISE20C ISE20CH () () () () 3 MPa,kPa,kgf/cm 2,bar,psi,InHg, mmHg MPa,kPa,kgf/cm 2,bar,psi LCD 3 (X2) 1)/ 2) 1)4 7 2)4 (1 11 7 ) ON OUT1OUT2 4 0,10,50,100,500,1000,5000 ms IP65 AC250 V 1 2 M(DC50 V ) -550 -1060 () 3585RH() UL/CSA(E216656)CE(EMC RoHS ) 2 m 1(0 ms) 2 3MPa/kPa 490%

VSA4

VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double 1 4 1 8 Rc 0.70 1 8 Rc VA 1 8 Rc 3 position closed center 1 4 1 8 Rc 0.86 VM 1 8 Rc Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

ZSE1/ISE1

NPTF 1/8 Connector type (Lead wire: 0.6 m) T1 C Connector type (Lead wire: 3 m) CL Note) Single mounting style: M5 x 0.8 (female) threaded.

ZB-OM00301

FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V

VK300

type A port: Rc 1/8 V100 S070 Common SUP/Individual EXH VQD How to Order Type 21: Body ported (A port top ported) Applicable solenoid valve VK332--M5(-Q) VK332--01(-Q) VV3K3 05 21 VQD-V A port: Rc 1/8, M5 x 0.8 VK VK Applicable blanking plate assembly VK300-42-1A Valve stations P, R port thread type 01 1 station VT Nil Rc G NPT NPTF CE-compliant 20 20 stations 00F 00N 00T Q CE-compliant

ZL3-OM00801

ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 E A M G 1 ZL3 M 0 1 K1 5 LO Z 1 V A M W 1 1 2) 3) 4) 5) 6) 7) 8) 9) 10) 11) 12) 13) 14) 4) 2) 1) 3 300L/min(ANR) M 0.35MPa *2 P 6 600L/min(ANR) H 0.50MPa 3)P V/ *23 (V) (P) 5/ 06 Rc3/4 K1 N.C.+N.C. 8() 04 2xRc1/2 K2 N.C. *1 F06 G3/4 B1 N.0.+N.C. *1 F04 2xG1/2 B2 N.O.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Title not found

a v e Meial 0 3 3 0 3 9 N4ela 0 3 1 NC Va ve Base Mounted N O V a v e N C Valve lvleta 0 59 N O V a v e 3-port Base Mounted Valve conneclor with 300mrn lead wre M lpe plug teminalwithout lead wire Also Available 50700/5070 Manifolds Manifold 7mm width compacl 3 and 5 port valves with low power consumption of 0.35W (0.1W with power saving circuit) size (A port) 3-port Body Ported ffi ' Dc

3 Port Solenoid Valve Metal Seal Series VZ200 1

/surge voltage suppressor 2-3.4 mounting hole VFN Applicable cable O.D. 3.5 to 7 Pg7 With light/surge voltage suppressor 2-3.4 mounting hole 60 52.1 M plug connector: VZ4 2-M(Z)-01 1 2 30 26.7 23 4 With light/surge voltage suppressor 12 19.5 84 2-3.4 mounting hole Max.10 91 300 (Lead wire length) 4-15-13 14 Series VZ400 Dimensions: Sub-plate Mounted Grommet: VZ4 5-G H (S)1 2 01 02 2-4.5 mounting

Digital Flow Switches

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

VK3000

8 P port: Rc 1/8 F N T G S070 1 8 NPT 01 Rc C6 6 cassette B port: Rc 1/8 A port: Rc 1/8 NPTF Note) Applicable only for DIN terminal type VQD VQD-V Common SUP/Common EXH Type 21: Body ported (A, B port top ported) How to Order Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) VK VK A port: Rc 1/8, M5 x 0.8 A, B port: Rc 1/8, M5 x 0.8 VV5K3 21 05 VT VK3120

VXA31/32

Option Symbol and Composition Fluid Name and Option Option symbol and body material Brass Stainless steel Option symbol Seal material Body material Support material (Driving parts) Standard A B G H J M (Non-leak) N P V (Non-leak) Fluid (Application) V M Silicon oil A H NBR FKM EPDM NBR FKM EPDM FKM FKM EPDM FKM Note 1) Note 1) Vacuum (up to 1.3 x 101 Pa) Fuel oil (up to 60C) Brass A H V M