ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 3) 52-SY series are not available with resin type manifold (45 type). 4 B ATEX Compliant Body Ported Type Series 52-SY5000 Dimensions 2-position single L plug connector (L) 52-SY5120-L-01 (-F2) In case with foot bracket 52-SY5120-L-01-F1 22.6 21 47 16.7 4.5 38 16.6 1.2 22 29 2 x M3 x 0.5 Threads depth 3.5 (For bracket mounting) 65 2 x 3.2 (Mounting holes) 14.7 Insulation: Black () 11.6

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Description Material Note Body Aluminum die cast q Spool/Sleeve Metal seal Stainless steel w Spool valve Rubber seal Aliminum/NBR Piston Resin e Pilot valve r 2.10-27 VQZ100/200/300 Base Mounted Dimensions: VQZ100 Valve single unit Grommet (G): VQZ115(R)-lGl-01 23.4Mounting holes M5 X 0.8 External pilot port 53 (Only external pilot style (R)) 14.5 14.5 R3.5 3.5 12 X A 2 10 24 1 P 3 R Manual

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3

5 Port Air Operated Valve

) 40.5 2 45.5 2 x 2 (Breathing hole) 17.8 (Breathing hole) 7.5 1 P P 1 7.5 7.5 M5 x 0.8, 1/8 [1(P) port] M5 x 0.8, 1/8 [1 (P) port] 12.9 10 2 x M4 x 0.7 thread depth 5 (For mounting) 10 12.5 12.5 2 x M4 x 0.7 thread depth5 (For mounting bracket) VFA1120-01(-F)(-P) VFA1220-01(-F)(-P) (16.6) (16.6) (Distance between ports) (Distance between ports) 38 1/8 [4 (A), 2 (B) port] 12 11.5 1/8 [4 (

HRX-OM-W002

When a notice for maintenance is generated, "X" is displayed on the display panel. Table 5.4-1 shows the contents of the notice for maintenance number. X is displayed if a maintenance notification has occurred. RUN Table 5.4-1 Notice for maintenance list Contents No. Generation time Notice for pump maintenance MT.01 Cumulative operation time: It occurs at 20,000 hours.

ARM10/11

n) + 23 (79 x n) + 25 (188 x n) + 43 (187 x n) + 45 Common IN Individual IN Common IN Individual IN 1 8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

Secondary Batteries

2, Mounting bolt x 8 Flange x 1, Mounting bolt x 4 Trunnion pin x 2, Trunnion bolt x 2, Flat washer x 2 Clevis x 1, Mounting bolt x 4, Clevis pin x 1, Retaining ring x 2 Pivot bracket x 1 13 Air Cylinder: Standard Type Double Acting, Single Rod 40, 50, 63, 80, 100 CDA2 Series 9091How to Order CDA2 L 50 100 M9BWL 90 With auto switch Series compatible with secondary batteries Number of auto

ARM10/11

n) + 23 (79 x n) + 25 (188 x n) + 43 (187 x n) + 45 Common IN Individual IN Common IN Individual IN 1 8 1 8 1 4 1 8 1 8 1 8 1 8 1 8 ARM1000 57 ARM2000 136 How to Order Option ARM 1000 A1 5 01 G 1 1 0.2 MPa setting Note 1) Pressure gauge for 1.0 MPa is used.

AS-FG/ASD-FG

Min. 9.6 25.8 12.3 28.6 AS121FG-M5-23 AS121FG-U10/32-01 8 7 12.7 17.3 22.1 8.4 8.4 3.2 M5 x 0.8 25 1/8" 22.2 12.3 17.3 22.1 12.7 14.2 31.1 14.3 36.1 AS221FG-01-23 AS121FG-U10/32-03 12 16 12.7 20.4 27.5 9.3 9.3 3.2 32.1 5/32" 27.1 R(PT)1/8 8 10-32UNF 28.6 25.8 25 22.2 7 9.6 21.3 26.1 12.3 AS121FG-M5-04 AS121FG-U10/32-05 12.7 17.3 22.1 9.3 11.4 4 3/16" 16.5 M5 x 0.8 11.7 9.6 25.8 28.6 8 7 25

SV

n1 + 53 L4 = L3 + 81 + 21 x n2 L5 = (L1L4)/2 L6 = 10.5 x n1 + 42 L7 = 21 x n2 + 81 B A B A B A B A Dimensions are the ones for SV1300--.

HRX-OM-X084

When a notice for maintenance is generated, "X" is displayed on the display panel. Table 5.4-1 shows the contents of the notice for maintenance number. X is displayed if a maintenance notification has occurred. RUN Table 5.4-1 Notice for maintenance list Contents No. Generation time Notice for pump maintenance MT.01 Cumulative operation time: It occurs at 20,000 hours.

125

9.8)/Theoretical output) x 100% VEX VEX Conditions System Solenoid valve Speed controller Silencer Tubing diameter x Length A VEX31 22-02 AS4000-02 AN20-02 10 x 1 m B 12 x 1 m C VEX33 42-03 04 AS420-03 AN30-03 12 x 1 m D AS420-04 AN40-04 SGP15A x 1 m 1723 3 Port 3 Position Valve Body Ported VEX3 Series How to Order Air operated Pilot solenoid VEX3 B 12 0 01 1 Air operated VEX3 D B 5 1 12

VDW

174.5 192 2 stns. x 1 Manifold composition 3 stns. x 1 2 stns. x 2 2stns. + 3stns. 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold base is consisted of the junction of 2 and 3 station bases.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 77 77 79 87 102 102 122 122 18 22 22 30 35 35 40 40 13 17 17 19 27 27 32 41 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 24 29 35.5 44 55 69 80 100 1

3 Port Air Operated Valve Series SYJA300 1

x 0.5 (Mounting screw) M5 x 0.8 (P, A, R port) 44.5 1.8 (Breathing hole) With filter (80 mesh) 8.5 P R 6 1 1 .5 11 17 9 1.8 (Breathing hole) (P, A, R port) 1/8 42 With filter (80 mesh) Series SYJA700 Base mounted: SYJA74-01 02 Body ported: SYJA72-01 (-F) 2-3.2 25 25.5 (For manifold mounting) 12 1.5 13 A 18 1 23.5 11 M5 x 0.8 48.7 (Bracket) (Pilot port) (Pilot port) 2-3.2 M5 x 0.8 (For mounting

42

The load ratio is obtained by the following formula: ((Load mass x 9.8)/Theoretical output) x 100% Conditions MB, CA2 series CS1, CS2 series Series Condition 10A x 1 m SGP (Steel pipe) dia. x Length VQ4100--03 VQ4101--03 AS420-03 Speed controller AN30-03 Silencer 10A x 1 m SGP (Steel pipe) dia. x Length VQ5100--04 VQ5101--04 AS420-04 Speed controller AN40-04 Silencer 448 INDEX Page 446 Base

ZSE2/ISE2

0.8 depth 5 Piping port M5 x 0.8 depth 5 13 01: R 1/8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 IF Data 16-6-13

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa