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Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

5-Port Solenoid Valve

0 Manual override q w r e t y u i o !0 !

Electric Actuators

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

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1 w @0 !8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

ZP

(Pad diameter: 20 mm or less) ZP T 02 U N A5 From p. 33 p. 115 p. 117 From p. 121 With adapter ZP T 02 U N J 6 B3 A8 From p. 43 p. 116 p. 118 From p. 124 With buffer q w e r t y u i Flat type q Vacuum inlet direction w Pad diameter t Buffer stroke 02 2 16 16 04 4 20 20 06 6 25 25 08 8 32 32 10 10 40 40 13 13 50 50 e Material Nil Pad unit T Vertical R Lateral (With One-touch fitting) Y Lateral

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0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

E-ITV-STD-RF-A

Pl ease execut e t he "reset " f unct i on, w hen you w ant t o ret urn t he pressure set t i ng and t he sw i t ch set t i ng t o an i ni t i al val ue.

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Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

V

www.stevenengineering.com I 6.3 VACUUM VACUUM EJECTOR SERIES NZM H O W T O O R D E R NZM V A C U U M E J E C T O R D I M E N S I O N S W I T H VA LV E A N D VA C U U M S W I T C H W I T H V A LV E S A N D S W I T C H (N)ZM HK5LZ V O LTA G E 5 24VDC 6 12VDC N O Z Z L E D I A M E T E R 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm V A C U U M S W I T C H Nil Without E15L Solid State (NPN) E55L Solid

V100

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

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8 w $4 t e $2 !5 $3 y!7 @8 !4 !

&snac

, v i t h 6 p c s ' o f s c r e t v s . p r o p e r t Y @ N o t e : E n s u r e t h e p r o t r u s i o n a t b o d v f i x a t s L o t o f M e m b r a n e m o d u l e ' l n s t a I L n e w o r i n s a t b e l o w o f m o d u l e ' T h e n , i n s e r t c o v e r a n d f a s t e n i t w i t n 4 @ S C T E W S f r o m t h e b e t o w o f c o v e [ . @ u n s c r e w t n e c o v e r .

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7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 No. q w e r t y u i o !

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

7 No. q w e r t y u i o !

CC-Link-E

t y w i t h l ow ri ppl e.

Profi-E

W i t h t erm i nat or( At shi pm ent ) W /O W /O W hen t he product i s connect ed t o t he t erm i nal of PRO FI BU S com m uni cat i on l i ne, be sure t o set i t t o w i t h t erm i nat or . 7 Pressure set t i ng and out put m oni t ori ng Pressure can be set by sendi ng t he i nput dat a, i n w hi ch F.

LJ1H

Mitsubishi Electric Corporation Yaskawa Electric Corporation Nil W F R L T B None Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

AC Servo Motor Driver (Pulse input type/Positioning type ）

215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.