Rodless Cylinder for Vacuum Series CYV ø15, ø32

Low leakage 1.3 x 10-Pam/sec Leakage:1.3 x 10-Pam/sec or less (at normal temperatures, excluding gas permeation) 10Standard value Note 1) The data indicates the leakage measured in a vacuum environment of 10-Pa. Leakage [Pam3/sec] 10Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.

Self-seal Fittings Series KC

L M Nylon Urethane M5 0.8 KCH04-M5 KCH04-01S KCH06-M5 KCH06-01S KCH06-02S KCH08-01S KCH08-02S KCH08-03S KCH10-02S KCH10-03S KCH12-03S KCH12-04S 2.1 2.6 2.4 18 2.1 2.6 2.4 27.3 22.1 28.9 33.4 22.9 38.4 39.7 27.5 44.5 45 47.7 33.6 9.8 30.8 26.1 32.4 37.4 28.9 42.4 45.7 34 50.5 51.5 54.2 41.6 4 8 1 8 10 11.8 12 14 M5 0.8 10 16 14 20 27 25 34 43 48 41 19.5 1 8 1 4 1 8 1 4 3 8 1 4 3 8 3 8 1 2

5 Port Air Operated Valve Series VFA3000 1

Piping port) ( ): Value for Rc 1/2 5-3-17 10 Series VFA5000 Dimensions: Base Mounted 01 02 04 3 4 5 3 position closed center/exhaust center/pressure center: VFA5 44-X1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Breathing port) (Mounting hole) (Pilot port) (Piping

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T Base size A, B Port size 5 3 4 6 1 Symbol 04 Port size VVPA450 VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

AC Servo Motor Driver (MECHATROLINK-II type)

5 20 10 5 (Pulley ratio 4/7) ratio) Initial value Recommended value Parameter *1,*2 Para.

High Vacuum L Type Valve

Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No.

Metering Valve with Silencer Series ASN2

Dimensions (Hexagon width across flats) Dimensions Min L1 H Screw D D Model Max 20.5 20.5 30 34.2 37 49 ASN2-M5 ASN2-U10/32 ASN2-01 ASN2-02 ASN2-03 ASN2-04 8 8 12(12.7) 17(17.5) 19 24(23.8) 23.3 23.3 35 39.2 42 54 10 10 15 20 25 30 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Screw D Note) (in parentheses) are the dimensions of NPT screw specifications. Caution Be sure to read before handling.

Diaphragm Style Flow Switch Series IFW5 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Body BC6 Operating lever SPCC q w e r t 0.02 Rod C3604B Adjusting gear POM Gear POM 10 20 30 40 50 60 70 Flow rate (l/min) 16-12-2 Diaphragm Style Flow Switch Series IFW5 Dimensions IFW50--00 to 04 (Without terminal box) ZSE ISE PSE Z I SE3 PS With neon light Lead wire length 500 Z I SE1 2 ZSP ISA2 IS ZSM PF2 IF 2-3/8, 1/2, 3/4 Data IFW50--10 to 24 (With terminal box) With neon light 2-3

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

Trimmer Auto Switch

Series 10 12 16 20 25 32 40 50 63 80 100 MHZ2 3.0 5.0 7.0 7.0 8.0 8.5 MHZL2 6.0 7.0 10.0 11.0 MHL2 7.0 8.0 8.5 10.5 11.0 12.5 MHS2 6.5 7.0 7.5 8.5 MHS3, MHS(L)3 6.5 7.0 7.5 8.0 MHS4 6.5 7.0 7.5 8.5 MHC2 30 to -10 30 to 30 to 22.5 to -10 -10 -10 MHW2 88 to 54 to 58 to 41 to 30 to -4 -5 -6 -5 -5 Air cylinder Unit: mm Tube I.D.

Magnetically Coupled Rodless Cylinder (Slider Type: Slide Bearing)

Model selection PsAllowable pressure Refer to page 21, Table 10 PsAllowable pressure Refer to page 21, Table.10 Es Allowable kinetic energy Refer to page 21, Table 10 13/28 In this series, the work load and the maximum operating pressure are restricted to prevent the magnetic coupling from being separated.

SI unit for EtherNet/IP TM

Assembly and disassembly of the SI unit -35No.EX-OMP0013-E Specifications Specifications General specifications Item Specifications Ambient temperature -10 to +50 oC Ambient humidity 35 to 85%RH (No condensate) Ambient temperature for storage -20 to +60 oC Withstand voltage 500 VAC applied for 1 minute Insulation resistance 500 VDC, 10 M or more Operating atmosphere No corrosive gas Pollution

Low Differential Pressure Sensor

PSE531 PSE541 PSE561 Applicable pressure sensor PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) 5%R.D.

ISA2

The voltage variation must stay within the 10% to +10% range of the rated voltage. In case importance is attached to response characteristics due to use of a DC power source, keep the variation within the 5% to +5% range. The voltage drop is the value at the lead wire to which the coil is connected.

Trimmer Auto Switch

to 10 30 to 10 22.5 to 10 180 Angular style MHW2 88 to 5 54 to 6 58 to 5 41 to 5 30 to 4 Air Cylinders (mm) Description/Series Bore size 10 12 16 20 25 32 40 50 63 80 100 Compact guide cylinder MGP 3.5 5.0 4.5 4.5 5.5 5.5 5.5 5.5 5.5 6.0 Non-rotating double power cylinder MGZ 5.5 6.5 6.5 Air cylinder CA2 4.0 4.0 6.0 6.0 6.0 Sensor Unit D-F7K Air Cylinders (mm) Description/Series Bore

AC Servo Motor Driver (MECHATROLINK-III type)

5 20 10 5 (Pulley ratio 4/7) ratio) Parameter *1,*2 Para.

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 7

End Lock Cylinder Series CBG1

204 100 10 26 M26 x 1.5 23 100 1/2 21 130 40 204 4 End Lock Cylinder Series CBG1 With front lock: CBG1BN Bore size Stroke R GB (mm) Bore size (mm) DL1 GB S TB ZZ 20 19.5 10 (12) 80 (88) 11 117 (125) 25 19.5 10 (12) 80 (88) 11 122 (130) 32 20 10 (12) 81 (89) 10 (11) 123 (131) 40 19 10 (13) 87 (96) 10 (12) 139 (148) 50 23.5 12 (14) 102 (114) 12 (13) 162 (174) DL1 63 23.5 12 (14) 102 (114

VP4

04 0 5 VK Thread type Series VP 5 port solenoid valve Manifold Nil Rc VZ G F N NPT Base size NPTF T VF Common EXH 5 6 3 4 A/B Port size 1 VFR Symbol Port size 04 06 10 M Note) 1 Mixed VVP460 VVP450 1 2 3 4 VP4 Porting specifications Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com