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Manifold Type: 41P (Base Mounted), Valve Stations: 6 Stations, A, B Port: M5 (M5X0.8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 6 Stations, A B Port Size: M5 (M5X0.8)

Table of Contents

VB 4 4 5 6 6 SA 4.2 4.2 5.1 6.6 6.6 UB 10 10 12 16 16 O 4.5 4.5 5 5.5 6 R 44 52 63 78 98 TB 8 8 10 10 12 WA YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Model MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0

Air Slide Table

M5 x 0.8 4.4 4 9 MXQ12B M6 x 1 7.4 7 12 MXQ16B M6 x 1 7.4 10 15 MXQ20B M8 x 1.25 18 14 20 MXQ8C M4 x 0.7 2.1 6 9 MXQ12C M5 x 0.8 4.4 8 12 3.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D L P Z E F G H I K1 K2 Th9 J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 3.5 25 1.5 32 5.2 5 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 1.5 6 3.5 29 38 6 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 2 8 4.5 36 47 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

Table of Contents

) Q2 3.4 (6) Q3 M3 (5) CRB2BW15-D CRB2BW15-DE CRB2BW20-D CRB2BW20-DE CRB2BW30-D CRB2BW30-DE 5 11 9 14 10 15.5 25 10 25 13 25 14 0 0.043 0.004 0.012 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0 0.043 0.004 0.012 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions:

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

) Q2 3.4 (6) Q3 M3 (5) CRB2BW15-D CRB2BW15-DE CRB2BW20-D CRB2BW20-DE CRB2BW30-D CRB2BW30-DE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014 0 0.043 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions:

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

) Q2 3.4 (6) Q3 M3 (5) CRB2BW15-D CRB2BW15-DE CRB2BW20-D CRB2BW20-DE CRB2BW30-D CRB2BW30-DE 5 11 9 14 10 15.5 25 10 25 13 25 14 0 0.043 0.004 0.012 5 12 34 20 9 18 4 1.5 6 10 0.5 29 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0 0.043 0.004 0.012 6 14 42 29 10 20 4.5 1.5 7 10 0.5 36 M5 M5 (18) M5 (10) 5.5 (16.5) 0 0.043 0.005 0.014 8 16 50 40 13 22 5 2 8 12 1.0 43 M5 11-2-15 15 Series CRB2 Dimensions:

CRB2/CRBU2/CRB1

(13.5) 0.004 0.012 0 0.043 6 29 36 10 20 14 4.5 1.5 7 10 0.5 42 M5 M5 (10) 5.5 (16.5) M5 (18) 0.005 0.014 0 0.043 40 13 43 22 16 5 2 8 12 1.0 8 50 M5 10 Rotary Actuator Vane Type Series CRB2 Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

CQ2

40 10 2 10 12 12 5 M6 X 1.0 M5 X 0.8 15 5 M5 X 0.8 0 0.052 32 5.5 34 53.5 39.5 12.5 M8 X 1.25 21.5 49.5 4.5 60 45 14 2 14 13 16 7 14 21 10 to 50 RC(PT)1/8 Refer to p.2.3-18 for details rod end nut and optional bracket.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style Bore size (mm) Stroke range (mm) A B C D E G H K1 K2 L P Th9 Z F I J M N Q W 12 5 to 30 37.2 30.2 10 M3 x 0.5 M5 x 0.8 6 6 25 1.5 5.2 5 3.5 32 15.5 3.5 15 15 0 0.043 16 5 to 30 38 31 10 M4 x 0.7 M5 x 0.8 8 8 3.5 29 1.5 6 6 38 20 3.5 15 20 0 0.052 20 5 to 50 43 34 9.5 M5 x 0.8 M5 x 0.8 7 10 4.5 36 2 47 8 8 25.5 5.5 17.5 13 0 0.043 25 5 to 50 47 37 11 M6 x 1.0 M5 x 0.8

CJ2

M5 x 0.8 Piping port M5 x 0.8 S + Stroke Z + Stroke Rod end nut Rod End Nut 2-LC Mounting hole Material: Iron Applicable bore (mm) 10 16 B H C d Part no.

15

x 0.8 10 70 50 3.5 22.5 78 M3 x 12 1.5 M5 x 22 3 14 17.7 NY M4 x 0.7 8 70 50 3.5 22.5 78 M3 x 12 3.6 M5 x 22 3 14 17.7 NX M5 x 0.8 10 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NW M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 9 11.7 NV M4 x 0.7 8 63 40 3.5 27.5 78 M4 x 12 3.6 M5 x 22 3 9 6.7 NU M5 x 0.8 10 70 50 3.5 22.5 78 M4 x 12 3.6 M5 x 22 3 11 11.7 NT M5 x 0.8 10 70 50 3.5

Rotary Actuator/Vane Type

5 12 1.0 26 14 43 M5 x 0.8 depth 10 M5 x 0.8 14 24 25 40 63 45 31 30 100.005 0.020 25 0 0.052 6.5 20 1.0 31 20 56 M5 x 0.8 depth 10 M5 x 0.8 17 30 31 59 A CDRB2 Series Dimensions: Standard Type (With Auto Switch) 10 Double vane Following figures show the intermediate rotation position when A or B port is pressurized.

MY1

bracket mounting thread (2-M3 x 0.5 thread depth 5) 2-5 counterbore depth 2 25 24 3.5 1 2-M5 x 0.8 (Port) 1 3 3 2.2 6.8 1.7 7.3 SMC SMC 27 20.2 19.5 10 10 10 10 15 15 8.5 12 12 8.5 55 110 + Stroke 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) 8-11-21 21 Series MY1B Standard Type/Centralized Piping Type 16, 20 Refer to page 8-11-9 regarding centralized piping

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5

CJ2

B H B H d C C d 10 8 21 M4 X 0.7 16.2 Y-J010B SNJ-006B 16 11 21 M5 X 0.8 16.6 Y-J016B M6 X 1.0 4 8 9.2 6 NTJ-006A 2.4 M3 X 0.5 6.4 5.5 6 SNJ-010B M8 X 1.0 4 11 12.7 10 NTJ-010A 3.2 M4 X 0.7 8.1 7 10 Part No.

MXQ

M4 x 12 M4 x 12 M4 x 10 2.1 2.1 2.1 M5 x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 16 M6 x 16 M5 x 14 7.0 7.0 4.4 M8 x 18 M8 x 18 M6 x 18 18.0 18.0 7.0 Shock Absorber Shock absorber model RB0805 RB0806 RB1007 RB1411 RB1412 Applicable size MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 Caution 1.

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting