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Slotted locking type B (tool required) 7 240 VAC 50/60 Hz 15 (11) 2 Semi-standard For other rated voltages, please consult with SMC. 20 (14) 3 25 (16) 4 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F Nil: Non-locking push type 40A 1 1 2 Valve size 2 to 9 40 (28) 6 1 B 1 2 Flange 40F 2 50A 50 (33) 7 50F 2B Flange Semi-standard 2 B 1 2 Flange 65F 65 (45) 8 Electrical entry/With light/surge voltage

Dimensions inch (mm) AK3542 & 4542 M5 x 0.8 Actuation port 1.57 (40) 2.24 (57) 2 x Compression 2 x R, NPT male 2 x Rc, NPT female 0.44 (11.2) B B A A A Connections: N, BRN Connections: 4T, 6T Connections: 4, 6, BR 4 6 4 6 4 6 Ports A B Connections inch (mm) inch (mm) 4T 2.56 (65.0) 1.12 sq. (28.4) 1/4 inch compression 4BR 1.70 (43.2) Rc 1/4 4BRN 2.32 (58.9) 1.12 sq. (28.4) R 1/4 4 1.70

20,000 (6 ) 1 B 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 2 (IDF150F3) A 20,000 (6 ) 1 A 20,000 (6 ) 1 A 20,000 (6 ) 12 /JEMA 300 A B IDFA100F150F 6 9 6.6 IDX-OM-U022 7. 7 7.1 / IDF100150F 7.1 7 1 A2020 11 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject

No.VQZ100V-OM0001 VQZ V100 / / / / -2,3 -4,5 -4,5 -6 -6 -6 -6 -7 -7 -7 -814 -15,16 -1No.VQZ100V-OMT0001 *1) ISO 4414: Pneumatic fluid power ISO 4413: Hydraulic fluid power IEC 60204-1: Safety of machinery ISO 10218-1992: Manipulating industrial robots JIS B 8370: JIS B 8361: JIS B 9960-1: JIS B 8433-1993: *2) (ISO/IEC)(JIS) (JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

AW*-OMF0053-A PRODUCT NAME MICRO MIST SEPARATOR REGULATOR MODEL/ Series AWD20-(F,N)01(F,N)02(B,C,E,G,H)(-1,2,6,C,J,N,R,Z) AWD30-(F,N)02(F,N)03(B,C,D,E,G,H)(-1,2,6,8,J,N,R,W,Z) AWD40-(F,N)02(F,N)04(B,C,D,E,G,H)(1,2,6,8,J,N,R,W,Z) Contents PAGE 1. SAFETY INSTRUCTIONS 15 2. APPLICATION 6 3. SPECIFICATIONS 6 4. HOW TO ORDER 6 5. MAXIMUM APPLICABLE FLOW RATE 7 6.

5 is attached. 1045 AL800/900 Series Dimensions Semi-standard AL800/900 Metal bowl Metal bowl Port size D A B B B C B Maintenance space E IN OUT Metal bowl with level gauge With drain cock Semi-standard/Dimensions B Model Metal bowl Metal bowl with level gauge AL800 AL900 Model Port size With drain cock 297 303 306 312 D A B C E AL800 AL900 286 292 125 125 1 , 1 2 100 100 286 292 59 63 1

Model A B C A B C A B C A B C 500 1000 1500 1000 2200 3000 2000 3300 4000 4000 5700 7000 34.5 38 40 33 36.5 38 34 36 37 34 35 36 35 40 44 35.5 40 42 37 40 41.5 38 40 42 35.5 42.5 47.5 36 42.5 44 38.5 42.5 45 39 43 45 HAA7 HAA15 HAA22 Maintenance HAA37 Caution 1. Inspect the cooler at least once a week and clean it to prevent it from becoming obstructed. 2.

Series 10 16 20 25 32 40 50 63 80 100 125 MHZ2 3.0 5.5 6.5 8.0 7.5 MHZJ2 3.0 5.5 6.5 MHS2 (2 fingers) 1 4.0 4.0 6.5 6.5 8.0 6.5 MHS3 (3 fingers) 1 5.0 4.0 6.5 6.5 8.0 6.5 7.5 7.5 7.5 MHS4 (4 fingers) 1 5.0 3.0 6.5 6.5 8.0 6.5 MHC2 2 -10 to -10 to 11 16 Air cylinder Unit: mm Tube I.D.

B B B With bracket H H H H With hexagon panel nut (for panel mount) + Pressure gauge Nil Nil Nil Nil Without pressure gauge Option Note1) Semi-standard G G G G Round type pressure gauge 5 EA EA EA EA NPN open collector 1 output b With digital pressure switch PNP open collector 1 output EB EB EB EB EC EC EC EC NPN open collector 1 output + Analog voltage output NPN open collector 1 output

Analogue output A B C Voltage output 1 V 1.5 V (1.4 V) 5 V Current output 4 mA 6 mA (5.6 mA) 20 mA : The value in ( ) is when PF2W711 is used. Rated flow range Model Min. Max. PF2W704(T) 0.5 L/min 4 L/min PF2W720(T) 2 L/min 16 L/min PF2W740(T) 5 L/min 40 L/min PF2W711 10 L/min 100 L/min -46No.PF-OMO0012-E Revision history A: Contents revised in several places. B: Revision.

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

High Suction Vacuum Work 1 Work 2 Work n Max.A ON point OFF point Min.B Not adsorption Work 1 Work 2 Work n Atmosphere A B 4 A B 4 = A ON point Max.A: Maximum pressure value when work piece is vacuumed. Min.B : Maximum pressure value when work piece is not vacuumed.

1 1/4-12 2.00 2.375 1.88 6.88 800 (8") 1.75 1 1/4-12 2.00 2.375 1.88 7.00 Example: NCA1B500-0400-XC3BC (B = port, C = cushion) 11

: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 / 1 1.5 *3) *3) 1 1 () 3 (1) , (2) (3) (1) (2) (1) (2) (3) 4 (1) , (2) (3) (4) (1) &/(Best Pneumatics No.7) (2) (3) (4) (5) 5 (1) (2)1 ()ISO VG32 1 ISO VG32 1) (1) (2) (3) (4) 6 (1) (2) (3) (4) (5) (1) (1) (2) (3) 7 1-2. (1) (1) (2)PIL PIL1/10 (1) 23 (1) (2)VR21 1.41.6Nm 1.41.6Nm

Contamination and wear of emitters b. Loosening and damage of nozzles c. Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192

mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.

mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The total length of B direction is the length when the filter regulator knob is unlocked.