-B, AC40B-06-B, AC40C-06-B, Piping connection port diameter: G 1/4

-B, AC40B-06-B, AC40C-06-B, Piping connection port diameter: G 3/8

-B, AC40B-06-B, AC40C-06-B, Piping connection port diameter: NPT 1/4

-B, AC40B-06-B, AC40C-06-B, Piping connection port diameter: NPT 3/8

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Compact Guide Cylinder

a e d c T-slot dimensions 2 x P XAH9 depth XL 2 x P (Plug) XAH9 depth XL S Q G J K PB GB GA [mm] FA PA + Stroke Bore size [mm] a b c d e FB A + Stroke B + Stroke C + Stroke 32 6.5 10.2 5.5 3.5 9.5 40 6.5 10.5 5.5 4 10 50 8.5 12.5 7.5 4 12.5 E The use of a slot (width XA, length XB, depth XC) allows for a relaxed pin pitch tolerance, with the pin hole (XAH9, depth XL) as the reference, without

ML1

C B A A B A B A B ML1C25 ML1C32 ML1C40 MY-S25 MY-S32 MY-S40 5.5 9.5 5 8 M6 X 1 50 35 117 103 6.6 11 6 11.7 M8 X 1.25 64 45 146 128 9 14 5 14.8 M10 X 1.5 80 55 170 148 4.7-9 Series ML1 Construction Component Parts Component Parts Description Note Material No Description Note Hard anodized Hard anodized Hard anodized Hard anodized Hard anodized Material No Aluminum alloy Aluminum alloy Aluminum

CRB1/Size: 10, 15, 20, 30

Note) Depths of mark Q1, Q2 indicate that the body(A)/(B) are penetrated respectively.

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Temperature Data A or B = Series IDUS: Data A Series IDFS: Data B Air pressure Data C = 2 Calculate corrected air flow by using A or B and C. Corrected air flow = (Air flow) (Data A x Data C) Corrected air flow = (Air flow) (Data B x Data C) 3 Select a model having an air flow capacity that is higher than the corrected air flow.

IDUS/IDFS

Series IDFS IDFS6E/8E/11E Evaporation thermometer G H Illumination switch Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J K Draft air outlet A B D E Power cord outlet Air outlet Air inlet 22 C Draft air inlet F L 16 M A B Model IDFS6E IDFS8E Port size J C D M F

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

2-Rc P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350

VXA31/32

Series VXA31/32 Dimensions P port Bracket Pilot port J (Spanner flat) Port size P Port size Rc With bracket K 6 7.5 Symbol Model A B C D E F G H J L 29 32 M 14.5 17 1 8 1 4 VXA31 VXA32 19 25 20 20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 , , 1 4 3 8 17-3-104 The VX series will be revised shortly.

XMD/XYD Series

Dimensions C D L1 L2 Fd Fc C Fn (Fc) (KF Flange) (K Flange) (CF Flange) K B J H A G A Unit: mm Model A B C D Fn Fd Fc G H J KK P.C.D.

MGP

MGPS50 50 11 12 A 13 B 14 1 2 3 4 5 50 80 7 8 9 A 10 B 15 16 6 17 NBR 18 NBR 19 A NBR 20 B NBR / (mm) 50 MGP50-PS 19 18 17 80 MG80-PS 20 17 20 GR-S-010(10g 18 18. 18-1.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

A, B port P port -+ -+ A B R P -+ -+ A B B R port R P For detailed specifications about SYJ3000, refer to page 14.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Type S31 Manifold: Side Ported 91.7 [96.1] Approx. 300 (Lead wire length) SS5YJ3-S31Stations -M3 L1 L2 3.5 2-3.5 (For mounting) Manual override M5 x 0.8 (P, R port) 5.2 29.2 7.5 52.2 [54.4] 51.4 [53.6] 17.3 30 3 91.7 [96.1] 78.8 [83.2] 78.8 [83.2] 13.5 A A A A A B B B B B P R P R P R 29.2 P R 30 17.3 25 7.5 12 25 51.4 [53.6] 52.2 [54.4] 13.5 B B B B B A A A A A 3 5.2 2-3.5 (For mounting)

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

Rubber seal 5 Port Solenoid Valve Series SYJ5000

B B B B 43.9 24 24 44 23 A A A A A 10.5 0.5 (DIN 1.7) 33 10.4 15.9 ( DIN 17.1) 1/4 (P, R port) 1/4 (P, R port) (Pitch) P = 17 24.5 (Station n) (Station 1) (Station n) (Station 1) Built-in speed controller (Light/surge voltage suppressor) (Light/surge voltage suppressor) 56.5 Max. 13.5 61.6 [68.6] 61.6 [68.6] + + + + + + 46.2 46.2 A A A A 33 24.5 25 B B B B 1 6 8.5 8.5 (Pitch) P = 16 33 (Pitch

XSA Series

Exterior dimensions Grommet: G Face seal fitting / compression fitting Terminal part Flat terminal connector 250 Series Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Fast on: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 -2V 50 1/4 XSA2-2S 63 31.5 73.5 63 32.5

CY1F

Surface B Hexagon socket head set screw Slide table Gasket (apply grease) Replacement shock absorber Guide Cylinder fixing bolts End cover Mounting hole (round hole) Surface B Surface C Surface A Slider Actuator (cylinder) Mounting hole (Oval hole) Enlarged view of end cover Surface A Enlarged view end cover 3. Be sure to fasten the cylinder fixing bolts.