CXS

stick-slip even at 5 to 50mm/s.

Electric Actuators

5 !4 !3 e u !

Step Motor Driver （ Pulse input type ）

pulse sign 3 NP+ R type 24 VDC 10% 3.3 k 5% NP4 R (0.5W or more) Pulse PP+ 5 5 VDC 5% 390 5% (0.1W or more) 6 PP1) The pulse input circuit of NPN type and PNP PNP open collector input for 1 pulse mode *1) type is the same.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

) 5% F.S. (0 to 50C) 0.5% F.S. 0.5% F.S. 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. 5% F.S. (0 to 50C) (0 to 50C) (0 to 50C) (0 to 50C) Repeatability 1% F .S.

LJ1H

10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting 143

Slider Type Ball Screw Drive/11-LEFS Series

0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Title not found

1 5 7 (40) 4.02 l102) 3.07 (78) 0.98 (25) 205 (52) 0 5 5 (14) 0 8 3 (21) Ml2x1.75 ( 1 1 ) \'17) lV22x1.5 (37) 4 5 7 ( 1 1 6 ) 2 7 9 (71) a m (204) 256 (65) 049 (r2 5) 3 1 5 (80) 8 3 9 1213) E 1 5 7 (40) l r 1 6 ) 3 6 2 (92) (30) 205 (52) 0 5 5 (14) 0 8 3 (21J Ml2x1.75 ( 1 1 ) o 6 7 <17) lV26x1.5 '| 57 (40) 4 9 6 (126) 243 \721 (21s) 2 5 6 (6s) 0 5 5 3 1 9 (81) L A 2 t.2241 "Min Stroke = 0

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

For connector cable of M8 connector, refer to page 90. 3 Series SYJ3000 Construction (A) 4 (B) 2 (A) 4 (B) 2 2 position single 2 position double 5 (R) 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) t e q t r w qr w (B) 2 (A) 4 (B) 2 (A) 4 u u 3 (R) 1 (P) 5 (R) 3 (R) 1 (P) 5 (R) y 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t r w 5 (R) 3 (R) 1 (P) (B) 2 (

Auto Switch Guide

Put a flat washer (8 x 3.3) through a hexagon socket head screw (with spring washer, M3 x 0.5 x 5 l) and passing through the hole of a switch mounting bracket, then turning it lightly down to a mounting nut of switch. (2 locations) 5.

SZ3000

0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Zinc die-casted Body r u !

Rotary Actuator

LL LL Key dimensions [mm] Size Key dimensions LL 30 3 x 3 x 14 3 50 5 x 5 x 25 5 63 6 x 6 x 30 5 80 6 x 6 x 40 5 100 8 x 7 x 45 5 D215 CRA1 Series Symbol Shaft Pattern Sequencing2 -XA33 to -XA59 Applicable shaft type: X, Z, T, J, K How to Order C RA1 Z X D B J 50 90 M9BW A33 A34 C8 C30 Number of auto switches Magnet Nil 2 pcs. S 1 pc.

SZ3000

0 e w t y q o 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center 4(A) (A) 4 (B) 2 2(B) 5 (EA) 1 (P) 3 (EB) 5(EA) 1(P) 3(EB) i Component Parts 2 position single with back pressure check valve Material Note Description No. q w e r t y u i Body Zinc die-casted r u !

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

How To Order: Valve Port size : Without sub-plate Body ported SYJ3 2 5 LZ 1 M3 3 Base mounted (4 Port) SYJ3 3 5 LZ 3 2 Base mounted (5 Port) (With gasket and screws) 2 SYJ3 4 LZ 3 5 M5 : With sub-plate Manual override Type of actuation : Non-locking push type 1 2 3 4 5 2 Position single solenoid 2 Position double solenoid 3 Position closed center 3 Position exhaust center 3 Position pressure

Compact Manifold Regulator

32 1/4 Symbol C4 C6 N3 N7 Size 6 8 10 1/4 5/16 3/8 Symbol C6 C8 C10 N7 N9 N11 Semi-standard Semi-standard VY1 Description None Oil-free Description None Oil-free Symbol Nil X17 Symbol Nil X17 VBA VBAT AP100 Straight type Straight type Elbow type Elbow type 6.5 X X 12.5 X X Y Y X X Y X X Y Fitting size Fitting size Fitting size Fitting size 5 5 5.5 5 6 4, 5/32 4, 5/32 6 3 11.5 19 19 20 8,

Rotary Clamp Cylinders

5 !3 !7 !8 !6 !6 !0 !2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !

CATALOG VC10

PSI PSI 10 10 5 01 01 02 02 05 05 1 2 5 WATER FLOW-GPM SERIES 58 FLOW CHARTS 97 SOLENOID VALVES . . .

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

type) Normally closed Normally open Port size Bracket Series M5 01 M5 x 0.8 1/8 (10-SYJ700 only) Nil Without bracket F With bracket 3 5 7 10-SYJ300 10-SYJ500 10-SYJ700 3 port (Type 20, 21 manifold) 1 5 10 M SYJ 2 5 WAO M5 Body ported 5 1 SYJ 4 5 WAO 01 10 M Base mounted CE-compliant 3 port Nil Q CE-compliant Sub-plate type, type 40, 41, S41, 42, S42 manifold Body option Electrical entry

Speed Controller with Indicator

Inch size 1/8" 1/4" 5/32" 1/8" 5/32" 1/4" 5/16" 1/8" 5/32" 1/4" 5/16" 3/8" 1/4" 5/16" 3/8" 3/8" 1/2" Free flow 0.2 0.3 0.4 0.6 0.6 0.7 1.0 1.3 1.5 1.6 1.7 2.5 4.4 4.8 C values: Sonic conductance dm3/(sbar) Controlled flow 0.2 0.3 0.4 0.7 0.8 0.6 0.9 1.3 2.1 2.4 3.3 4.4 4.9 Free flow 0.3 0.4 0.2 0.3 0.3 0.4 0.4 0.3 0.3 b values: Critical pressure ratio Controlled flow 0.2 0.2 0.3 0.3 0.3

Model Selection 1

4 P. 17-5-117 Elbow LQ2L 5 VXA 2 VN 3 Female LVC 4 P. 17-5-118 5 LVA 2 LVH 3 Male LVD 4 P. 17-5-119 Run tee LQ2R 5 LVQ 2 LQ 3 Female LVN 4 P. 17-5-120 5 TI/ TIL 2 PA 3 Male PAX 4 P. 17-5-121 Branch tee LQ2B 5 PB 2 3 Female 4 P. 17-5-122 5 2 3 Union elbow LQ2E 4 P. 17-5-123 5 2 3 Union tee LQ2T 4 P. 17-5-123 5 Note) Basic size With reducer 17-5-95 24 Series LQ 1 2, LVN, TL/TIL Port size Tubing

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)