Profile Design ISO/VDMA Air Cylinder Series CP95

94 40 24 35 16 G1/4 14 M6 6.5 M12x1.25 13 27 16 105 50 32 40 20 G1/4 15.5 M8 8 M16x1.5 16 31.5 16 106 63 32 45 20 G3/8 16.5 M8 8 M16x1.5 16 31.5 16 121 80 40 45 25 G3/8 19 M10 10 M20x1.5 21 38 16 128 100 40 55 30 G1/2 19 M10 10 M20x1.5 21 38 16 138 4 4 4 6.5 26 146 190 46 32.5 15 4 4 4 4 9 30 163 213 52 38 17 4 6 4 5 10.5 37 179 244 65 46.5 24 5 6 4 9 12 37 194 259 75 56.5 24 5 8 4 11.5

High Power Cylinder Series RHC

(123) 20 8, 10 1/4 500 9.5 0 1,000 2,000 3,000 Maximum speed Vmax [mm/s] 50 12, 16 1/4, 3/8 1000 19 63 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 1500 2000 2500 3000 28.5 3/8, 16 3/8, 16 3/8, 16 1/2, 16 100 =0.7 38 47 0.5 56.5 0.1 0.3 50 10, 12, 16 1/4, 3/8 500 15 63 1000 1500 2000 2500 3000 30 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16

Table of Contents

Refer to How to Order for standard specifications on pages 14-20-3, 16, 23, and 31.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 B series rod 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 H0.1 0.4 D 50 40 185 145 57 79 M48 x 1.5 76 M8 x 1.25 40 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 C 31.5 20 90 70 30 40 M20 x 1.5 31 M5 x 0.8 20

CG5-S

Bore size (mm) W P S WA WB WH ZZ 20 30 M5 x 0.8 83 22 16 23 118 25 30 M5 x 0.8 83 22 16 25 123 32 25 1/8 85 22 16 28.5 125 40 20 1/8 93 22 16 33 143 50 20 1/4 109 25 18 40.5 167 63 20 1/4 109 25 18 47.5 167 80 20 3/8 130 30 22 60.5 201 100 20 1/2 131 31 22 71 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS X165US inch rod option dimensional changes S + Stroke H GA GB Width across

CJ2X/CUX/CQSX/CQ2X/CM2X

, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option

CJ2X/CUX/CQSX/CQ2X/CM2X

, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16 20, 25 32, 40 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 10, 16, 20 25, 32 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50 mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50 mm/s Piston speed Air cushion on both ends Shock absorber (CX2: Option

RHC

, 16 3/8, 16 1/2, 16 1500 2000 2500 3000 28.5 Composed effective area So (mm2) Composed effective area So (mm2) Composed effective area So (mm2) 100 RHC = 0.7 38 47 0.5 56.5 MK(2) 0.1 0.3 10, 12, 16 1/4, 3/8 50 RS Q G 500 15 63 RS H A 3/8, 16 1/2, 16 1/2, 16 3/4, 16 3/4, 16 1000 1500 2000 2500 3000 30 0 45 1,000 2,000 3,000 60 RZQ Maximum speed Vmax (mm/s) 75 89.5 80 MI W S 16 3/8, 1/2 500

CV/MVGQ

90 + 40 n = 4, 8, 12, 16 85 + 40 n = 4, 8, 12, 16 80 + 40 n = 4, 8, 12, 16 n -X n = 4, 8, 12, 16 2 (Different sides, Same side), 1 75 80 90 10 65 20D-Y69/Y7PV D-Y7WV (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 n 90 + 30 80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

range (mm) Effective thread length (mm) A B1 CD CX D E F GA1 GA2 GA3 GB1 GB2 GB3 H H1 I +0.109 0 +0.109 0 +0.109 0 +0.034 -0.015 20 18 13 16 10 8 16 10 12 12 8 10 10 41 5 31 10 25 to 300 15.5 25 22 17 16 12 10 16 10 12 12 8 10 10 46 6 34 10 25 to 400 19.5 32 24 22 16 16 14 19 11 13 13 8 10 10 53 8 40 12 25 to 500 21 40 24 24 24 18 16 21 12 17 17 11 16 16 54 10 48 16 25 to 500 21 (mm) Bore

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" O.D. 5/32" 5/32" 1/4" 5/16" Meter-out type Meter-in type Inch size 5/16" 3/8" 3/16"

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

(mm) 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry 32 32 40 B5 40 M5 x 0.8 50 50 Pad material N NBR Pad type S Silicon rubber F Ball joint U Urethane rubber F Fluoro rubber GN Conductive NBR GS Conductive silicon rubber 20 and larger are manufactured upon receipt of order.

Series KV2 Fittings

16 16 16 17 17 17 17 21 21 21 21 21 21.8 21.8 21.8 22 22 22 25 17 16 16 16 21 17 17 17 17 17 21 21 21 16.8 20.4 20.4 2 22 22 25 1.6 1.6 1.6 1.6 3.5 3.5 3.5 3.5 3.5 3.5 5.4 5.4 5.4 4.6 7.0 7.0 8.5 8.5 8.5 9.8 23 15 16 23 40 16 23 37 40 53 36 44 68 76 64 76 43 51 76 126 100/400 100/400 100/400 100/400 100/200 100/400 100/400 100/400 100/200 100/200 100/200 100/200 100/100 100/100 100/100 100

Microspeed Cylinder

, 20 25, 32, 40 50, 63, 80 100 6, 10 15, 20 25, 32 12, 16, 20 25, 32, 40 50, 63, 80 100 10, 16 20 25, 32 12, 16 20, 25 32, 40 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 20, 25 32, 40 50, 63 12, 16 20, 25 6, 10 16 20, 25, 32 40, 50 10, 15 25 6, 10 16 20, 25 32, 45 Bore size (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Rubber bumper (basic cylinder section) Shock absorber

MY1

16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 SS 5.1 4.0 9.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 070 088 104 Z 240 300 360 ZZ XX 38 48 54 Bore size (mm) 25 32 40 Rc1/8 Rc1/16 Rc1/8 Rc1/16 Rc1/4 25.50 29 .0 Rc1/8 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

SI Unit for Vacuum Manifold

Vendor defined parameters Index(dec) Subindex Access Parameter name Size[byte] Data Storage Section 0x0040(64) 1...16 R/W Pressure P1 2 Y 3.4.1 0x0041(65) 1...16 R/W Hysteresis H1 2 Y 3.4.2 0x0042(66) 1...16 R/W Pressure P2 2 Y 3.4.3 0x0043(67) 1...16 R/W Hysteresis H2 2 Y 3.4.4 0x0044(68) 1...16 R/W Pressure P3 2 Y 3.4.5 0x0045(69) 1...16 R/W Hysteresis H3 2 Y 3.4.6 0x0046(70) 1...16 R/W

5 Port Solenoid Valve, Series VQC

B 16 44 8 (2.4) SMC SOL. A 2 () (+) Brown None Connector DB-25SF-N manufactured by Japan Aviation Electronics Industry, Ltd. Station 2 SOL. B 15 () (+) Pink Black SOL. A 3 () (+) Red None 55 Station 3 SOL. B 16 () (+) Blue White Socket side SOL. A 1425 4 () (+) Orange None Station 4 SOL. B Terminal no. 17 () (+) Purple None 5 () (+) Yellow None SOL. A Station 5 SOL.

15

12.5 14 4.5 98 M5 x 0.8 8.5 70 50 4.6 11 60 NY M4 x 12 3.6 M4 x 12 2.7 M8 x 16 12.5 14 4.5 98 M4 x 0.7 8 70 50 4.6 11 60 NW M4 x 12 3.6 M4 x 12 2.7 M8 x 16 12.5 9 4.5 98 M5 x 0.8 8.5 70 50 4.6 11 60 NT M4 x 12 3.6 M4 x 12 2.7 M8 x 16 12.5 12 8 98 M5 x 0.8 8.5 70 50 4.6 14.5 60 Included Parts List Motor Mounting Diagram Size: 63 Return box Mounting procedure 1) Fix the motor (provided by

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Flow Direction Symbols on Body Flow Rate and Sonic Conductance Meter-out type Meter-in type Indication symbol Symbol AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8", 3/16", 1/4", 1/4", 5/16", 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8"

Vacuum Unit

(Example -EP) 16 Vacuum Pump System Vacuum Unit ZK2mA Series Manifold Refer to page 16 for the vacuum pump system for the manifold.