SMC Corporation of America
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. * For HRSH250-A-20 Circulating fluid temperature [C] When a load is stable 0.1C Outdoor air temperature: 32C Circulating fluid temperature setting: 20C Heat load in the users equipment: 25 kW Power supply: 200 V 60 Hz Circulating fluid flow: 125 L/min@0.5 MPa External piping: Bypass piping + Heat load 21 Conditions 20 19 25 kW load Heat load fluctuation (0 kW 25 kW) 0 kW load 0 10 20 30

5H9 ( ) depth 6 +0.030 0 (160) 110 4 x M6 x 1 depth 10 LEJ 18 M4 x 0.7 depth 8 (F.G. terminal) 84 105 (3.1) LEL Motor cable (6) 56 100 130 100 LEM 35 LEY Encoder cable (7) 25.5 36.5 64 Note 2) (128) Note 2) 94 5H9 ( ) depth 6 +0.030 0 6 50.5 LES 58 LEPY LEPS LER Encoder Z-phase detecting position L LEH A (Table traveling distance) (58) 167 (B: With lock/207) LEY -X5 (60) Stroke 17 37 (4) 21

Standard M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 10-V14: 13(27) 10-V14A: 16(30) 10-V14: 12(26) 10-V14A: 15(29) Large flow capacity Standard 10-V124A Note 1) Large flow capacity Valve model 12 [32 Note 3)] Flow characteristics 23 [21 Note 3)] b b Cv Cv C[dm3/(sbar)] 0.054 0.099 0.037 0.076 C[dm3/(sbar)] 0.037 0.076 0.054 0.099 10-V114 10-V114A 10-V124 Note 1) 0.008 0.016 0.015 0.024 0.015 0.024

MPa) Inlet pressure: 60 psig (0.41 MPa) 1/2 inch Connection ) 1.50 (38.1) 50 0.34 40 0.28 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.50 (63.5) 10 0.07 0.88 (22.4) 0 0.00 0 40 80 120 160 200 Flow Rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AK1400TA Inlet pressure: 0 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg abs) -21

Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) , Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-), Types 10-, 11- and 22- are available with ball bushing or slide bearings, Types 12- and 21- have ball bushing bearings, Piston Rod Assembly, GUIDED CYLINDER

Clean specifications include 10- (relief type), 11- (vacuum suction type), and 12- (relief type with specially treated sliding parts) , Other specifications include copper, fluorine and silicon-free + low partical generation (21- and 22-), Types 10-, 11- and 22- are available with ball bushing or slide bearings, Types 12- and 21- have ball bushing bearings, Piston Rod Assembly, GUIDED CYLINDER

L2 = 21 x m + 89.8 L1 = 10.5 x n + 45 Do not operate in an atmosphere containing flammable or explosive gases. Fire or an explosion can result. This product is not designed to be explosion proof. Default settings At the time of factory shipment, the product is in "Remote Control Mode" and set to "Enable DHCP".

Generated error per unit when control and input power supply voltage goes over approx. 28 V or under 21 V. 0: False Does not generate an error. 1 Monitor 24V_C 1: True Generates an error.

Setting Screen 21 8.5.1. Reading IO-Link Module Parameters 21 8.5.2. Setting the IO-Link Module Parameters (Only possible when not connected to PLC) 22 8.6. Setting the IO-Link Devices 23 8.6.1. Reading Information on IO-Link Devices 23 8.6.2. IO-Link Device Process Data (Example using the ISE20B-L) 24 8.6.3. IO-Link Device Identification (Example using the ISE20B-L) 24 8.6.4.

PLC (23 ) Enforce (21 ) (22 ) -20No.EX-OML0010CN-C a) (52) b) 28 c) /(16) d) e) f) 3 () (ON) (OFF) OFF ON Set Cancel Set Cancel -21No.EX-OML0010CN-C a) (52) b) 28 c) /(16) d) e) f) () g) / g)# Set Cancel Set() g)* Cancel() g) -22No.EX-OML0010CN-C (0 ) A,B Z, 0,19 "Wrong Password" -23No.EX-OML0010CN-C 2. Diagnosis Data() [2.DiangosisDate] 1.& & 2. 3. 1. (1718) 2. 25 3.

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

Doc.No.LV50***-OMQ0002-G Product Name Electromagnetic Digital Flow Switch Model/ Series/ Product Number LFE# SMC Corporation No.LV50***-OMQ0002-G Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product Parts 13 Definitions and Terminology 14 Mounting and Installation 16 Installation 18 Piping Method 19 Wiring 21 Flow Setting 24 Function Settings 26 Default Setting

The piston rod moves to the position corresponding to the input current value of sig-in+ and sin-in-. *2 Perform calibration once again for correcting the set point. 21 Revision history 1st edition: October 2019 Rev.

PTFE Grease Specification Standard models -X446 Grease pack part number: GR-F-005(5g) 21 - Lubrication Caution 1) Lubrication for products using special grease Lubrication to this cylinder leads to operation failure. Otherwise, it may cause the operating failure. 2) Do not wipe off the grease on the sliding surface of the air cylinder.

C a u t i o n Confirm that there is no problem with operation and air tightness after assembly. 21 3-3. Consumable parts 3-3-1. Replacement parts Table 12 Seal kit 40 50 63 80 100 Seal kit CA2-40ZCA2-50ZCA2-63ZCA2-80ZCA2-100Zno.

(mm) CG5*N*SR CG5*N*SV CG5*A*SR CG5*A*SV 20 CG5N20SR-PS CG5N20SV-PS CG5A20SR-PS CG5A20SV-PS 25 CG5N25SR-PS CG5N25SV-PS CG5A25SR-PS CG5A25SV-PS 32 CG5N32SR-PS CG5N32SV-PS CG5A32SR-PS CG5A32SV-PS 40 CG5N40SR-PS CG5N40SV-PS CG5A40SR-PS CG5A40SV-PS NBR FKM NBR FKM GR-R-010(10g) 3-3-2. 1 2 3 4 5 21 3-4. 1. GR-R-010(10g) 2. 3. 4. 50mm/s 1. P18, 3-2-2. 2.

MGP50 1216 50 1216 50 2025 50 1 2 1225 18 19 20 21 22 1250 23 63100 3 32100 1240 50100 5 50100 1263 80100 7 8 9 10 11 12 13 A 14 B 15 4 24 NBR 6 25 NBR 26 A NBR 27 B NBR / (mm) (mm 12 MGP12-PS 40 MGP40-PS 24 25 16 MGP16-PS 50 MGP50-PS 24 25 20 MGP20-PS 63 MGP63-PS 26 27 26 27 1216 25 MGP25-PS 80 MGP80-PS 16 20100 17 32 MGP32-PS 100 MGP100-

P.21 10. P.22 -1- RS2H (ISO/IEC) (JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems. IEC 60204-1: Safety of machinery -Electrical equipment of machines. (Part 1: General requirements) ISO 10218-1992:Manipulating industrial robots-Safety.

Stainless steel 18 NO spring Stainless steel wire for Single acting normal spring open only 9 Rod cover Synthetic resin 19 NC spring Stainless steel wire for Single acting normal 10 Cap Synthetic resin Single acting normal spring close only open only 20 Rod seal NBR 11 Bumper Urethane rubber 21 Piston seal NBR 12 Rubber magnet Synthetic rubber 22 Gasket NBR Replacement parts Description MHZ2

MHZ-A1007 MHZ-A1607 MHZ-A2007 MHZ-A2507 MHZ2-K MHZ-A1008 MHZ-A1608 MHZ-A2008 MHZ-A2508 Ass'y MHZ2-M MHZ-A1009 MHZ-A1609 MHZ-A2009 MHZ-A2509 MHZ2-E MHZ-A1010 MHZ-A16010 MHZ-A2010 MHZ-A2510 Ass'y MHZ-AA1004 MHZ-AA1604 MHZ-AA2004 MHZ-AA2504 3 1= 2= 3= /GR-S-010 (10g) W= K= M=M5 E= Assy E 17 - 32,40 / / / / 11 1 12 2 13 3 14 C 4 15 A 5 16 6 17 NO 7 18 NC 8 19 NBR 9 20 NBR 10 21