Modular Type Regulators Series AR

14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

CLQ 25 32 40 ML1-A25H ML1-A32H ML1-A40H Stroke Adjusting Unit Specifications MLGP Side Support Part No. 25 32 40 Applicable cylinder size (mm) RLQ Bore size (mm) Any position on the entire stroke Stroke adjustment range 25 32 40 0 to 11.5 0 to 12 0 to 16 Stroke fine adjusting range (mm) Type MLU Side support A MY-S25A MY-S25B MY-S32A MY-S32B MY-S40A MY-S40B RB1412 RB2015 RB2015 Shock absorber

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

CLQ 25 32 40 ML1-A25H ML1-A32H ML1-A40H Stroke Adjusting Unit Specifications MLGP Side Support Part No. 25 32 40 Applicable cylinder size (mm) RLQ Bore size (mm) Any position on the entire stroke Stroke adjustment range 25 32 40 0 to 11.5 0 to 12 0 to 16 Stroke fine adjusting range (mm) Type MLU Side support A MY-S25A MY-S25B MY-S32A MY-S32B MY-S40A MY-S40B RB1412 RB2015 RB2015 Shock absorber

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

CLQ 25 32 40 ML1-A25H ML1-A32H ML1-A40H Stroke Adjusting Unit Specifications MLGP Side Support Part No. 25 32 40 Applicable cylinder size (mm) RLQ Bore size (mm) Any position on the entire stroke Stroke adjustment range 25 32 40 0 to 11.5 0 to 12 0 to 16 Stroke fine adjusting range (mm) Type MLU Side support A MY-S25A MY-S25B MY-S32A MY-S32B MY-S40A MY-S40B RB1412 RB2015 RB2015 Shock absorber

ZPT/ZPX

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 0 0 1 1 0 5 8 16 27 53 84 0 0 0 1 1 3 1 1 2 3 5 8 Misc.

CRQ2

L Size Screw M4 M4 M6 M8 M8 L 13 16 22.5 24.5 28.5 10 15 20 30 40 3 Series CRQ2 Construction Standard type Sizes 10, 15 Standard type Sizes 20, 30, 40 Parts list Parts list Description Material Note No. Description Material Note No.

Nozzle Type Ionizer

61 61 Pivoting bracket IZN10-B2 20 3.4 64 56 90 (Mounting angle adjustable range) 11.4 28 20 20 9 24 3.4 4 14 40 18 2 x Hexagon socket head cap screw M3 x 16 (Accessory) 13.7 59 18 IZN10E Series Dimensions DIN rail mounting bracket IZN10-B3 17 (Mounting angle adjustable range) 40 50 Internal mounting 20.5 2 x 3.4 33 30 30 44 61 55 26 17 11 8 x 3.4 9 2 x Hexagon socket head cap screw M3 x

PFxx-OMA1007

Incorrect internal data processing of the product (Er0, 4 to 16, 40) System error (Er0, 4 to 16, 40) is displayed (2) Check if the power supply voltage is in the range 24 VDC 10%. (2) Check that the Power supply voltage is within 24 VDC 10%.

Compact Guide Cylinder

Add -XB10 to the end of standard model number. 12, 16 1 to 249 12, 16 11 to 249 Applicable stroke 20, 25, 32 1 to 399 20, 25, 32 21 to 399 mm) 40 to 100 5 to 395 40 to 100 26 to 395 Part no.: MGQM20-39 Part no.: MGQM20-39-XB10 A spacer 1 mm in width is installed in the MGQM20-40. Special body manufactured for 39 stroke. Example C dimension is 77 mm. C dimension is 76 mm. 6.

Process Pump

A 118 PAF3413S-1S13 PAF3413S-1S19 4 5 10 x 8, 12 x 10, 3/8" x 1/4", 1/2" x 3/8" 115 12 x 10, 19 x 16, 1/2" x 3/8", 3/4" x 5/8" With nut (with LQ3 fittings): PAF3413S-3S13 11 (40) 121 59 (Option) Foot 612 Process Pump Automatically Operated Type/Air Operated Type PAF Series Dimensions: Automatically Operated Type (PAF5000 Series) Female thread: PAF541006 N06 F06 204 10 PA PA(P) 255 120 PAX

MXF

10 20 30 10 20 30 40 Load (N) Load (N) Load (N) MXF12 Lr = 30 mm 0.10 0.08 0.08 MXF12-50 Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) 0.08 MXF12-50 0.06 0.06 MXF12-30 0.06 MXF12-30 MXF12-50 MXF12-20 MXF12-30 0.04 0.04 MXF12-20 0.04 MXF12-20 0.02 0.02 0.02 20 40 60 0 0 0 20 40 60 80 20 40 60 Load (N) Load (N) Load (N) 8-6-4 5 Low Profile Slide

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Applicable cylinder bore size (mm) 3.2 Metric size Inch size Model 1/8" 5/32" 3/16" 1/4" 6 8 5/16" 4 6, 10, 16, 20 AS1001FM 20, 25, 32 AS2001FM 20, 25, 32, 40 AS2051FM Specifications Air Fluid 1.5 MPa Proof pressure 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure 5 to 60C (No freezing) Ambient and fluid temperature 10 turns (20 turns (1)) Number of needle rotations Nylon, Soft

Output block / Power block

outputs 16 points EX126D-SMJ1 16 outputs 16 points EX250-SAS5, -SAS9 4 inputs / 4 outputs 4 points EX250-SAS3, -SAS7 8 inputs / 8 outputs 8 points EX500-Q002, -Q102 Gateway branch system 16 outputs 16 points Gateway branch system 2 16/32 outputs (Selected using built-in setting switch) 16 outputs (with setting of 16 outputs) EX500-S103 24 outputs (with setting of 32 outputs) : If the Output

High performance type Step Motor Controller (Servo/24 VDC)

Setting Data Entry 37 7.1 Step data 37 7.2 Basic parameter 40 7.3 Return to origin parameter 43 8.

Table of Contents

Maximum stations are 16.

DOC1023125

Specification Table Battery-less absolute encoder type (Step motor 24 VDC) Model EQFS25 EQFS32 EQFS40 Stroke[mm] Note1) 50 to 800 50 to 1000 150 to 1200 Horizontal 15 26 40 40 39.5 50 68 68 26 60 75 80 Work load [kg] Note.2) Vertical 2 6 12.5 15 4 10 16 20 4.5 4.5 25 40 to 400 20 to 1200 12 to 850 6 to 450 3 to 225 24 to 1100 16 to 750 8 to 450 4 to 125 30 to 1200 20 to 1000 10 to 500 5 to

High Vacuum L Type Valve

H5 Initial power / Power consumption (W) 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XLAQ/XLDQ

55 75 F 17 26 41 52 G 40 39 63 68 H 87 91 129 142 J XLAQ-16 XLAQ-25 XLAQ-40 XLAQ-50 40 50 65 70 Note) The heater (Option) is not available with XLAQ-16. 471 Aluminum One-touch Connection and Release High Vacuum Angle Valve 2-step Control, Single Acting/Bellows Seal, O-ring Seal XLDQ Series How to Order XLDQ M9N A 40 q w e r t y w Actuator port direction q Flange size Rear flange surface

High Vacuum L Type Valve

-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1

2/3 Port Valve

C.O. 4 220V AC 50/60Hz Valve size 1 to 4 1 6A 8A 10A 5 1 8 1 4 3 8 24V DC 12V DC 240V AC 50/60Hz 7 6 7 8 11 15 11 Other 10A 3 8 Option 2 15A 1 2 15 14 3 20 16 25 4 20A 3 4 Valve size 5 to 7 25A 1 32A 22 11 4 5 32 1 B 32F 22 32 28 40 6 28 40 1 4 Flange Electrical entry/Indicator light and surge voltage suppressor Grommet Grommet with surge voltage suppressor Grommet terminal Grommet terminal