ML2B

D25 32 40 0.015 0.015 0.040 2.89 4.75 6.87 0.10 0.21 0.32 25 32 40 0.016 0.016 0.041 ML2B MY-A40L Type MY-A25L MY-A32L -X Side Support Part No. As for 3 point preset counter and multi counter, it will be common to CEP1 and CE1 series. For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

ML2B

D25 32 40 0.015 0.015 0.040 2.89 4.75 6.87 0.10 0.21 0.32 25 32 40 0.016 0.016 0.041 ML2B MY-A40L Type MY-A25L MY-A32L -X Side Support Part No. As for 3 point preset counter and multi counter, it will be common to CEP1 and CE1 series. For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

ML2B

D25 32 40 0.015 0.015 0.040 2.89 4.75 6.87 0.10 0.21 0.32 25 32 40 0.016 0.016 0.041 ML2B MY-A40L Type MY-A25L MY-A32L -X Side Support Part No. As for 3 point preset counter and multi counter, it will be common to CEP1 and CE1 series. For details, refer to 3 point preset counter/CEU1 on page 10-12-30, and Multi counter/CEU5 on page 10-12-27 respectively.

17

Model Rc1/8 PC 55 PD 6 PG 7 VV QQ 16 SS 6 XX UU 18 MY1B25 MY1B32 MY1B40 60 30 12 206 42 15 10 14.5 23.3 11 15.5 38.5 46 220 Rc1/16 MY1B25 MY1B32 MY1B40 26.5 Rc1/8 80 35 70 10 16 8 51 16 10 16 28.5 12 20 55 280 Rc1/16 264 48 16 11 32 40 Rc1/4 100 85 12 18.5 9 59 23.5 14 20 35 14 67 340 Rc1/8 40 23.5 322 60.5 24 12 35 47 Port Variations Bottom Ported MY1BG Y Y Head cover piping connection

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

Port) (42.9 ) (20.0) (15) (5) (7.5) 5.0 n-M5x0.8 P=10 15.0 *Dimensions 9 122 171 191 225 235.5 n: Stations(Max.18 stations) Equation : L1=10n+32 L2=10n+43 n L 2 52 101 121 150 160.5 3 62 111 131 162.5 173 4 72 121 141 175 185.5 5 82 131 151 175 185.5 6 92 141 161 187.5 198 7 102 151 171 200 210.5 8 112 161 181 212.5 223 10 132 181 201 225 235.5 13 162 211 231 262.5 273 14 172 221 241 275

ZQ

x 0.8) 66.9 Vacuum port (V port) Note 4) PE SMC (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 107 3.5 10 Note 1) The above dimensions are for ZQ11U-G2 L-DC.

Support Guide/11-LEFG Series

ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEJ LEL 10 10 Suction flow rate: 0 L/min Particle concentration [particles/m3] Particle concentration [particles/m3] LEM ISO Class 5 upper limit Suction flow rate: 0 L/min LEY 10 10 LES ISO Class 5 upper limit Suction flow rate: 10 L/min LEPY LEPS 1000 1000 Suction flow rate: 20 L/min LER ISO Class 4 upper limit ISO Class 4 upper limit

Compact Vacuum Ejector Series ZQ

) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.

Series MLGP

Minimum auto switch mounting stroke (mm) Bore size (mm) Auto switch Number of auto switch mounted 20 25 32 40 50 63 80 100 model 1 pc. 5 D-A9(V) D-M9(V) 2 pcs. 10 1 pc. 5 N o t e 2 ) D-M9W(V) D-M9AV 2 pcs 10 1 pc. 5 N o t e 2 ) D-M9A 2 pcs. 10 N o t e 2 ) 1 pc. 5 N o t e 1 ) 5 D-Z7/D-Z80 D-Y59/D-Y7P 2 pcs. 10 1 pc. 5 D-Y69 D-Y7PV 2 pcs. 5 1 pc. 5 N o t e 2 ) D-Y7W(V) D-Y7BA 2 pcs. 10 N o

VQ4000

8 61.5 143 10 1.6 99 32 14.5 8 (182.5) Min. 0 to max 4 unit (0 to 216 mm) DI unit U side 54 VQC SQ L2 (In the case of 2 pcs.

RSH

RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40

ZSE2/ISE2

SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP 18 32 ISA2 58 52 10.2 IS PV 6.5 ZSM 8 V 10 PF2 10 17.6 5.5 Vacuum supply port M5 x 0.8 Vacuum pad connection port M5 x 0.8 2-3.3 Mounting hole IF Data Connector type: ZSE2-0X-15C Indicator light (Red) 20 L

PSxx-OMU0005CN

DC12~24V10% DC12~24V10% DC(+) DC(-) 8 DC12~24V10% DC12~24V10% DC(+) DC(-) 9 ( ) 10 11 -72No.PS-OMU0005CN-C No. / / 5m 12 1015 10 SI (kPaMPa) ( ) SI kPa,MPa 13 14 15 16 FUNC 17 -73No.PS-OMU0005CN-C No. 4m 4m FUNC 18 (Er13) 10 10 () 19 ( ) / () -74No.PS-OMU0005CN-C 80mA 7F.S.(3.5F.S.) 1 1 F.S. 1 -75No.PS-OMU0005CN-C ZSE20B() ZSE20BF() ISE20B() 0.0-101.0 kPa -100.0100.0

Transfer

Nil Without spacer Bore size Long spacer 6 7 Short spacer 25 32 40 25 mm 32 mm 40 mm Unit part no.

Slider Type Ball Screw Drive/11-LEFS Series

ISO Class 6 upper limit ISO Class 6 upper limit 10 10 LEJ LEL 10 10 Suction flow rate: 0 L/min Particle concentration [particles/m3] Particle concentration [particles/m3] LEM ISO Class 5 upper limit Suction flow rate: 0 L/min LEY 10 10 LES ISO Class 5 upper limit Suction flow rate: 10 L/min LEPY LEPS 1000 1000 Suction flow rate: 20 L/min LER ISO Class 4 upper limit ISO Class 4 upper limit

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

0.7 29 40 30 10 70 3.5 20.9 4 25 2.5 25 5 14 MXY12 M5 x 0.8 31 52 40 15 86 8.5 30.9 5 3 36 32 6 18 PH TB Z T WR RL QW R RH WE WD Q W PR P PL TH Model MXY6 5.1 2.9 88 4 12 60 5 7 30 11 13 3(depth 3) 3(depth 3) 2.5 9 20 25.5 MXY8 6.1 98 3.4 4 15 70 6.5 7 38 19 13 3(depth 3) 3(depth 3) 3 10 25 32 MXY12 7.8 114 4.5 21 5 8.5 90 7 50 29 18 4(depth 4) 4(depth 4) 4 13 33 42 n QL Model 50 100 150

Rotary Table Series MSU

x 0.8 (10-32 nominal) M3 x 0.5 Port size Top ports M3 x 0.5 M5 x 0.8 (10-32 nominal) Deflection accuracy 0.03mm or less (0.0012") 2.

EXxx-OMY0004

O N 1 2 3 4 5 6 7 8 9 10 F-Address 512 128 64 32 16 8 2 value 256 4 1 Fig. 10-7 PROFIsafe address switch Note: The F-Address bit numbering shown on the label has priority over any numbers printed on the DIP switch e.g. in the example above the DIP switch is printed with numbers 1 to 10 where 1 is on left and 10 is on the right.

Digital Pressure Switch

M5 01 N01 C4H C6H N7H C4L C6L N7L Port size M5 x 0.8 R1/8 NPT1/8 4 mm One-touch fitting Straight type 6 mm 1/4 inch 5/32 inch 4 mm One-touch fitting Elbow type 6 mm 1/4 inch 5/32 inch Pressure-sensing part Silicon Materials in fluid contact Piping port (Common) PBT, CB156, heat resistant PPS, O-ring: HNBR C3604 part (Electroless nickel Piping port POM, SUS304, NBR, C3604 plating), SUS304,

Compact Pressure Switch Series ZSE2 (For Vacuum)/ISE2 (For Positive Pressure)

ISA PV 6.5 PSE 8 V 10 IS 10 17.6 5.5 2 x 3.3 Mounting hole Vacuum supply port M5 x 0.8 Vacuum pad connection port M5 x 0.8 ISG ZSM Connector type: ZSE2-0X-15C Indicator light (Red) 20 L H SET Vacuum supply port Vacuum pad connection port 7 35.6 Pressure setting trimmer Pneumatic circuit 600 (3000) + O 32 59 58 10.2 PV 6.5 18 V 8 10 17.6 10 5.5 2 x 3.3 Mounting hole Vacuum supply port M5 x