MHZ

Required gripping force = 0.1 kg x 20 x 9.8 m/s2 () 19.6 N or more 0 10 20 30 40 50 60 Gripping point L (mm) Selecting MHZ2-16D. A gripping force of 24 N is obtained from the intersection point of gripping point distance L = 30 mm and pressure of 0.4 MPa.

MHZ

Gripping point L (mm) DMHZJ2-16D/11-MHZ2-16D 2050 Pressure 0.7 MPa Pressure 0.7 MPa Gripping force (N) 40 0.6 MPa 0.5 MPa 0.6 MPa 0.5 MPa 0.4 MPa 30 0.4 MPa 0.3 MPa 0.2 MPa 0.3 MPa 20 0.2 MPa 10 0 10 20 30 40 50 60 Gripping point L (mm) MHZJ2-20D/11-MHZ2-20D Pressure 0.7 MPa Pressure 0.7 MPa 60 0.6 MPa 0.6 MPa 50 Gripping force (N) 0.5 MPa 0.5 MPa 40 0.4 MPa 0.4 MPa 30 0.3 MPa 0.3 MPa 20

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

VDC + + Load Load 18 to 30 VDC U White N.C.

HRX-OM-Q026

the circulating fluid temperature that enters the user's equipment is 29 oC due to temperature drop while it is transferred to the user's equipment in the piping: Circulating fluid temperature: 30 This product Users equipment Serial communication Fluid discharge temperature: 30 Heat dissipation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 When

REA/REB

Cushion Stroke Allowable load weight Wv (kg) Maximum operating pressure Pv (MPa) Stroke (mm) Model Model 2.7 7.0 11.0 18.5 18.5 30.0 0.55 0.65 0.65 0.65 0.65 0.65 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 20 25 30 30 30 30 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 10-2-54 54 Sine Rodless Cylinder High Precision Guide Type Series REAH Stroke Adjustment The adjusting bolt is adjusted to

IDG

Construction Refer to pages 14-19-30 to 31.

REA/REB

Cushion Stroke Allowable load weight Wv (kg) Maximum operating pressure Pv (MPa) Stroke (mm) Model Model 2.7 7.0 11.0 18.5 18.5 30.0 0.55 0.65 0.65 0.65 0.65 0.65 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 20 25 30 30 30 30 REAH10 REAH15 REAH20 REAH25 REAHT25 REAHT32 10-2-54 54 Sine Rodless Cylinder High Precision Guide Type Series REAH Stroke Adjustment The adjusting bolt is adjusted to

2 Phase Stepper Motor/Without Motor Brake Series LXP

Positioning Time Guide (for Horizontal Mount) For transfer load of 0kg For transfer load of 6kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) 200 100 50 10 1 Positioning distance (mm) 100 200 50 10 1 10 20.1 10.1 5.1 1.1 0.2 10 10.1 20.1 5.1 1.1 0.2 Speed (mm/s) Speed (mm/s) 20 10.1 5.1 2.6 0.6 0.1 20 5.1 10.1 2.6 0.6 0.1 30 6.7 3.4 1.7 0.4 0.1 30 3.4 6.7 1.7 0.4

MGG

(mm) Bore size (mm) Stroke range (mm) AC AF AB AE AA AD AP N M L F K C E J A B D G H I 20 25 32 40 50 75, 100, 125, 150, 200 11 30 16.5 M5 x 0.8 depth 10 12 75 25 45 25 80 60 92 55 99 24 5.5 M8 x 1.25 depth 14 108 60 30 9.5 depth 6 13 16.5 30 M6 x 1 depth 12 16 85 30 54 35 100 70 113 65 109 26.5 6.6 M10 x 1.5 depth 18 130 65 35 11 depth 8 75, 100 125, 150 200, 250 300 16 35 19 M6 x 1 depth

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Because sizes 10, 20, 30 and 50 have the table press fit into an angular type bearing, they cannot be disassembled. 50 11-9-30

AC Servo Motor Driver (CC-Link Type ）

OFF: Lock is activated. 4 30 4.

CNA

(n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30

C85

It is necessary to use a solenoid valve with an electrical response time of 30 ms.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

For details, refer to page 8-30-52. Wide range detection type, solid state auto switch (D-G5NBL type) is also available. For details, refer to page 8-30-50.

CNA

(n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30

HRX-OM-X037

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 31 Circulating fluid display temperature 30 Heat radiation Circulating fluid set 1 temperature 30 Offset temperature 30 1 HRL Series 5.4 Description of the Screen 5-31 HRX-OM-X037 Chapter 5 Display and Setting of Various Functions Pump operation mode 4.

HRX-OM-W002

40 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] Circulating fluid temperature[] Circula Circulating fluid temperature[] 50Hz 60Hz 60Hz 50Hz 50Hz 60Hz

CM2

14 24 8 M8 X 1.25 24 25 13 8 41 20 20 33.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 10 30 25 13 8 45 25 26 34.5 37.5 M10 X 1.25 19.5 17 6 15 10 5.5 M26 X 1.5 9 9 22 19 30 14 30 12 25 13 8 45 32 26 21 41.2 M14 X 1.5 21.5 42.5 46.5 22 8 15 7 M32 X 2 11 10 24 30 39 18 38 14 16 11 50 40 32 Dimensions by stroke Built-in One-touch fitting (mm) Stroke 1 to 50 51 to 100 101 to

Series IDG

= 0.7MPa 30 30 40 50 0 40 100 200 300 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG50 IDG60 0 P1 = 0.3MPa P1= 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 50 50 0 200 400 600 800 0 200 400 600 800 Outlet air flow rate l/

LEC-OM071xx

CPRM_SEL_ MON1 14 15 16 17 CPRM_SEL_ MON2 18 19 20 21 Reserved MONITOR1 22 23 24 25 MONITOR2 26 27 28 29 MONITOR3 30 31 8-71 8 MECHATROLINK-III Commands Related Parameters Parameter No.