SMC Corporation of America
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E U 1) (C E U 1-D ) CEU1 +12V + 12V 1 A 680 CO M +12V + 12V 1 B 680 COM +12V D C 1 2 V60 m A GND RS COM FG AC100V 6 6 6 6-3 3 3 3 1C E U 1 CE1-R** 25m 3 4 SFC-10 5CEU1 AC 6 AC100V ( TDK ZGB2203-01U) (DC12V)(:ERZV10D220 7CEU1 10cm 8DC24V (CEU1*-D)EMC (2004/108/EC) (AC/DC )CE 10m 6 6 6 6-4 4 4 4 NPN PNP NPN 50mA OUT DC30V CEU1 CEU1-D COM PNP 50m OUT CEU1P CEU1P-D DC30V

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

(Values at the initial period) VG JIS Symbol VP S070 VQ Model Valve model VKF VS3145 VS3135 P A C [dm3(sC [dm3(sC A E P A A E [dm3(sC VQZ [dm3(s

Dimensions Attached from top 6, 10 (1/4", 3/8") Note 2) Attached from bottom: MD Body 6, 10 (1/4", 3/8") (inch) F Note 1) R Note 2) M PA MD MM LA C L B W HB Model A HA NCY3B6 (1/4'') NCY3B10 (3/8'') NCY3B15 (5/8'') NCY3B20 (3/4'') NCY3B25 (1'') NCY3B32 (1-1/4'') NCY3B40 (1-1/2'') NCY3B50 (2'') NCY3B63 (2-1/2'') 0.47 No.5-40UNC 0.59 1.38 0.67 0.71 0.43 0.39 0.25 0.10 0.67 No.5-40UNC

When the IDF100F-30 is provided with options C, R and V and specified to have the facility water piping direction on the right side, the part number will be IDF100F-30-CRVW4. NIL IDF 100 F 30 4 W C 5 G Size K Size Air compressor size Note) 100kW 125kW 150kW 100 125 150 P R Note) The value is referential. Confirm the capability of the compressor used.

D E F G H J K L M N P Q R S 1B union union 1 2 B 1 13

Adjust the mounting surface level when using the side support. m m m L L L L Fig. 6 -9- Fig. 7 When using the product that has a stroke that exceeds the stroke fine adjustment range, use an intermediate fixing spacer. Refer to the table below for the stroke fine adjustment range and the stroke adjustment range when using the intermediate fixing spacer.

If it does not locked easily, turn the handle s l i g h t l y c l o c k w i s e o r counterclockwise; then, push it until the orange colored line is no longer visible.

M type connector w/ plug and 300 mm lead wire MO M type connector w/o plug and lead wire MN M type connector w/ plug and pins Air Operated Valve DXT474-A Valve Manifold Assembly DXT475 A * * * * * * 02 * Valve Actuation Type Sup.

Vacuum pressure (kPa) Vacuum pressure (kPa) How to read the graph Example: Tubing size 8/6, 1 m Calculation of average adsorption flow Ejector Q1 = ( to ) x Ejector Max. adsorption flow l/min (ANR) Vacuum pump Q1 = ( to ) x 11.1 x Effective area of vacuum pump (mm 2) 1 2 1 3 Adsorption flow Selection Procedure From the point of intersection of tubing length 1 m of lateral axis and tubing

Antistatic specifications (FGDE, FGDF) Note) For a comparison with the nominal filtration accuracy according to the element category, refer to pages 41 and 42. 24 C

Specifications (1) Standard specifications (2) Flow characteristics Model VHS20 VHS30 VHS40 Fluid Air Ambient and fluid temperature -5 to 60oC (No freezing) Proof pressure 1.5MPa Maximum operating pressure 1.0MPa Switching angle 90o Handle operation Rotating torque Note1) 0.8N-m or less 1.0N-m or less 3.0N-m or less Weight 95g 181g 400g Note 1) Supply pressure: 1.0 MPa Port size Supply (INOUT

Note 7) The sensor unit is conformed to CE mark. 1.0 Operating pressure [MPa] PF2D 504/520 0.5 PF2D 540 20 40 60 80 100 0 90 Fluid temperature [C] Series PF2D For Deionized Water and Chemicals Digital Flow Switch How to Order Remote Type Display Unit PF2D3 A 0 M 0 Unit specification Nil M With unit switching function Fixed SI unit Note 1) Output specifications Note 1) Fixed units: Real-time

If it does not locked easily, turn the handle s l i g h t l y c l o c k w i s e o r counterclockwise; then, push it until the orange colored line is no longer visible.

M 4.Types of air. 2.Ensure space for maintenance.

LT C edition Safety Instructions Be sure to read Precautions for Handling Pneumatic Devices (M-03-E3A) before using.

Elbow: KPL D 2-Applicable tubing Effective area mm Note 1) D Model L Applicable tubing O.D. mm Weight g M Q TPH TPS M M L Q L Q 20.7 4.5 18 3.5 3.5 3 10.4 KPL04-00 4 22.8 5.3 19.5 9 9 7 12.8 KPL06-00 6 D 26.3 6 21.5 22 15 11 15.2 KPL08-00 8 4.2 29.4 6.8 24 35 25 16 18.5 KPL10-00 10 M 8 31.4 7.5 25 50 40 20 20.9 KPL12-00 L 12 Note 1) D indicates the maximum diameter.

L D-M9P (Example) Nil Lead wire length 0.5 m 3 m L 5 m Z Note 1) Applicable auto switch with 5 m lead wire Z Reed switch: None Solid state switch: Manufactured upon receipt of order as standard. Note 2) To designate solid state switches with flexible specifications, add -61 after the lead wire length. Oil resistant flexible cab-tire cord is used for D-M9 as standard.