CA2

5 !6 !7 !8 !

EXxx-OMY0004

Clock pulse for Ch.1 and Ch.5 (input connector 1) 0 0 Input 1 power source: UT1 with clock pulse Input 5 power source: UT2 with clock pulse 0 1 Input 1 & 5 power source: UT1 with clock pulse 1 0 Input 1 & 5 power source: UT2 with clock pulse 1 1 Input 1 & 5 power source: each power source without clock pulse Bit 6 Bit 5 Bit 4 Discrepancy time for Ch.1 and Ch.5 (input connector 1) Same as

10

M18 x 1.5 31.5 1/4 94 5 10.5 210 63 16 5 M18 x 1.5 31.5 3/8 94 9 12 210 80 16 5 M22 x 1.5 38 3/8 114 11.5 14 258 100 16 5 M26 x 1.5 38 1/2 114 17 15 258 * Model without air cushion is designed to include rubber bumpers.

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area Flow direction symbols on body Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Models Symbol JIS symbol Metric sizes 3.2, 4, 6 3.2, 4 6 6 8 10 12 6, 8, 10 8, 10 4 10, 12 Tubing O.D. 1/8 5/32 3/16, 1/4 5/16 1/4, 5/16 3/8 1/8, 5/32 3/16, 1/4 Inch sizes 5/32 3/16 5/16 3/8 1/2 3/8 1/4 Flow rate l/min (

AC

5 !6 Block packing !

HRX-OM-S010

-5 5.4 Communication sequence . 5-11 5.5 Message configuration . 5-12 5.5.1 Message format . 5-12 5.5.2 Message example . 5-14 5.6 BCC . 5-15 5.7 Command . 5-15 5.8 Command explanation . 5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature . 5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R) . 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command

Fieldbus system PROFINET compatible SI Unit

pin) B code IN 3 With DIN rail bracket (SY/JSY valve) 3 7/8 inch (5 pin) IN 4 M12 (4 pin/5 pin) A code IN/OUT (PIN layout 1) 5 M12 (4 pin/5 pin) A code IN/OUT (PIN layout 2) : Refer to Connector Pin No.

HRX-OM-T004

5-5 5.4 Communication sequence. 5-11 5.5 Message configuration . 5-12 5.5.1 Message format . 5-12 5.5.2 Message example . 5-14 5.6 BCC . 5-15 5.7 Command . 5-15 5.8 Command explanation . 5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature . 5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R) . 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command

1.1

Time Note 2) HRG001to HRG015Note 1) HRG001-5 to HRG005-5 Note 3) The value shown applies to a stable load state with no outside interference.

HRX-OM-Q033

5-5 5.4 Communication sequence. 5-11 5.5 Message configuration . 5-12 5.5.1 Message format . 5-12 5.5.2 Message example . 5-14 5.6 BCC . 5-15 5.7 Command . 5-15 5.8 Command explanation . 5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature . 5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R) . 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command

CL

5 !6 !7 !8 !

ZP

L D 10 39.5 23.4 12.5 10 5 10 10 2 13 16 40 23.9 13 10.5 E2 2 M5 x 0.8 20 25 46.5 29.3 15.5 12.5 B5 N S U F GN GS 30 8 12 12 3 32 47 29.8 16 13 40 49.5 32.3 18.5 12.5 2.5 19 5 50 50.5 33.3 19.5 13.5 20 25 B8 (Rotating angle) 04 06 08 ZP R F 10 to 32 46.5 29.3 15.5 12.5 2 M8 x 1.25 8 12 12 3 32 47 29.8 16 13 40 49.5 32.3 18.5 12.5 2.5 19 5 50 50.5 33.3 19.5 13.5 M Width across flats H F G

EXxx-OMQ0016

50005 V output (3)The resolution from 1 to 5 V is 1/1000 based on the calculation. (5 V 1 V) / (5000 1000) = 1/1000 Settable value by PLC (AD value) Output signal range (a to b) Voltage [V] Current [mA] Decimal number 0 to 10 1 to 5 0 to 5 0 to 20 4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 If the data format is scaled data format,

Swivels

16-12 1-5/16-12 103.8 mm 66.2 mm 41.3 mm 47.6 mm UN-2A UN-2A A Part Number A B Wrench Flats Dia.

HRX-OM-M091

5-5 5.4 Communication sequence. 5-11 5.5 Message configuration . 5-12 5.5.1 Message format . 5-12 5.5.2 Message example . 5-14 5.6 BCC . 5-15 5.7 Command . 5-15 5.8 Command explanation . 5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature . 5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R) . 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

center/pressure center 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 4 (A) 5 (EA) 1 (P) 3 (EB) 2 (B) 5 (EA) 1 (P) 3 (EB) Parts list 2 position single with back pressure check valve Material Note Description No.

CRBU

on the type of L3 = 30 3 to 6 L2+3 Y 5 20 7 to 13 5 to 20 3 to 5 X 3.5 L1+2 machining required.

HRX-OM-R028

sequence .5-11 5.5 Message configuration.5-12 5.5.1 Message format .5-12 5.5.2 Message example.5-14 5.6 BCC .5-15 5.7 Command .5-15 5.8 Command explanation .5-16 5.8.1 Command:PV1 Circulating fluid discharge temperature.5-16 5.8.2 Command:SV1 Circulating fluid set temperature (R).5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W).5-18 5.8.4 Command:LOC Key-lock setting (R) .5-19

Vacuum System Peripherals:

Nil Non-locking push type Push-locking slotted type 1 2 3 4 5 5 24 VDC 12 VDC Must be the same voltage as that of the manifold. D 6 N Must be the same common specifications as that of the manifold.

Rotary Actuator/Vane Style Series CRB2

(mm) Q1=M Q2 Y L2 max Size (mm) L2-(3 x P) C1=C 10 Q1 X L1 max Size 3 5.5 to 8 Y-1 DY= 10 15 7.5 to 14 X-3 3 3, 4 7.5 to 9 Y-1.5 L2= C2=C 15 20 10 to 18 X-4 3, 4 3, 4, 5 9 to 10 Y-1.5 L1-(3 x P) X= 20 30 12 to 20 X-4.5 3, 4, 5 3, 4, 5, 6 11 to 13 Y-2 L1= Q2=M 30 40 14 to 22 X-5 3, 4, 5, 6 3, 4, 5, 6, 8 14 to 15 Y-4.5 71 Series CRB2 Axial: Top (Long shaft side) Axial: Bottom (Short shaft side