Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

32 40 50 63 80 100 25 31 38.5 39.5 45.5 54 79 90 110 120 153 178 32 36 45 50 63 75 64 72 90 100 126 150 10 10 12 12 16 16 3 3 2 2 4 4 7 9 9 9 12 14 up to 700 50 55 70 80 100 120 up to 800 Fd up to 1000 FY B up to 1000 CJ1 up to 1000 up to 1000 FX CJP FT FE FZ CJ2 CM2 Rear flange/(G) C85 Port Cushion valve 4-FD Rear flange (mm) CG1 Bore size (mm) Stroke range ZZ FZ FY FX FT FD B FY B MB 32

Air preparation filter

Dimensions H Bracket K L N M D Auto drain (MAX1.6MPa) C I Bracket (accessory) () P E A F J B 1/4 1/4 female Maintenance G OUT IN Drain space Drain guide A A 3/8 female 3/8 G Maintenance Drain space Thread type Rc, G: 10 NPT: 3/8 Rc,G10 NPT3/8" Maintenance space Drain G Auto drain (MAX1.0MPa) Auto drain (MAX1.6MPa) Drain guide B C D E F G Model Port size A AFF,AM,AMD 70D 11 1/2

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

10,11,12 08,09 1000 10 15 8 500 06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-85 12 Construction ASD230F ASD330F/430F ASD530F/630F ASD530F02 Component Parts No.

IZ-OMK0015

DC power supply Black DC2(-) (Power supply 0V) Black DC2(-) (Power supply 0V) 24V DC +/-10% 0V 0V Blue DC1(-) (F.G.)

ZL3-OM00801

N06 NPT3/4 5/16(inch) N04 2xNPT1/2 6) 5 DC24V *1G JIS B0202 ISO1603 ISO1179 8) Z 7 L L 0.3(m) 11) A NPN LO B PNP M M 0.3(m) MO 12) 9) M SI (kPa) D P (:psi) E 10) 14 GN (G) B G *7ZL212 27mm ZL212 (2 /1 , 4 ) E (2 ) F (2 ) V (1 ) 13 G 2m) W (2m) 5 No.ZL3-OM00801-A 2. 2.1 (1/P) (2/V) ZL3 ZL6 (3/E) // / (G) (2/V) 2.2 ZL6 1 ZL6 (ZL6-SC1-A) 2), 6 No.ZL3-OM00801-A 3. 3.1

Special Specifications:

20 20 34 M5 female thread 1/4 female thread Note) In the case of Rc, G: 10 In the case of NPT: 3/8 Drain Drain Drain Drain guide Drain cock Auto-drain Series AFF Series AM, AMD, AMG, AMH Size Size 2B 4B A B C Note) Select in accordance with the type of thread on the main body.

Large Bore Compact Cylinder Series CQ2

Bore size mm (in) Bore size Operating range Operating range l (mm) 180 200 15 (0.6) 15 (0.6) 9 Series CQ2 Compact Cylinder Solid State Auto Switches/Direct Mounting Type D-Y59 , D-Y69 , D-Y7P (V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch model no.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

0.1 ASS 0.2 10 ASR 0 0 0 0 0 0 10 20 5 10 5 10 ASF Number of needle rotations Number of needle rotations Number of needle rotations 15-9-65 10 Series AS-FM Construction Component Parts No.

5 Port Air Operated Valve SYA3000/5000/7000 Series

(F2) C8, N9 C10, N11 3 4 5 109.7 48.1 51.6 38.1 2 x M5 x 0.8 (Pilot port) 13.6 B A One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 2 x 4.2 (For manifold mounting) 19 42 (66) (52) 2 x 4.2 (For mounting) (5.5) 47.6 SYA7 20-02-(F2) 3 4 5 (49.5) (42.5) 30 1/4 (A, B port) 24.5 15 20 Manual override 1/4 (P port) 2 x 1.8 (Breathing hole) 0.9 2 40 (23.9) 18 30 24.5 EB P EA

HRL

-Am-20 (CH1) HRL100-Am-20 (CH1) 0.6 0.6 60 60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

Material Note PBT PBT Description Body A Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring Gasket 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 1 2 3 4 5 6 7 8 9 10 11 12 13 14 Body A Elbow body Body B Needle Seat ring Spring U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Electroless nickel plated Electroless nickel plated Electroless nickel plated Brass

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1001FM AS2001FM AS2051FM Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number of needle rotations 725 AS-FM Series Construction Component Parts No.

SYA3000/5000/7000

positioning) 1/8 (EA, EB port) 36 SYA7120-02(-F2) 1/4 (A, B port) 20 40 30 24.5 28 39.4 1740 5 Port Air Operated Valve Series SYA3000/5000/7000 Dimensions/Series SYA7000: Body Ported 2 position double SYA7220-F2) C8, N9 C10, N11 96.2 76.2 2 x M5 x 0.8 (Pilot port) 13.6 B A 2 x 4.2 (For manifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 8, 5/16" 10, 3/8" 19 42 (66) 2

LV50-OMQ0002

Remarks Weight With lead wire and M12 connector LFE-1-A3 Lead wire length: 3 m Approx. 175 g LFE-1-D Tapping screw 3 x 10, 4 pcs. Approx. 45 g Bracket LFE-2-D Tapping screw 3 x 10, 4 pcs. Approx. 70 g LFE-3-D Tapping screw 3 x 10, 4 pcs.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Selection of Dip Switch 10. Driving 45 10-1. Setting of Origin Direction 10-2. Adjustment of Air Balance 11. Error Messages & Countermeasures 46 11-1. Controller 11-2. Brake Units Life Span 12. Appendix 50 12-1.

Air/Manually Operated High Purity Chemical Valve Series LV

/N.O. with same configuration/Double acting Compatible with 100C fluid temperature 1.12-4 Integral Fitting Type Series LVC Air Operated P.1 to P.6 LVC20/23 4 4, 6 1/8, 1/4, 3/16 LVC30 8 6, 8, 10 1/4, 3/8 LVC40 10 10, 12 3/8, 1/2 LVC50 16 12, 19 1/2, 3/4 Model Orifice diameter Millimeter Tube outside dia. Inch Symbol Type Basic type Valve type N.C. PB PA PA N.O. B A B A B A PB N.C.

Compact

0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00

IDX-OM-V020

Option L . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 SPECIFICATIONS . 10-1 10.3 MOUNT THE HEAVY DUTY AUTO DRAIN . 10-2 10.4 MAINTENANCE . 10-2 Chapter 11 Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR

VVXA21/22

r B " " $6y t " 5 ' % " $60C4,D 4 B u % " " B 17-3-98 3 Series VVXA21/22 Direct Air Operated 2 Port Valve/Manifold For Air, Gas, Vacuum and Oil The VX series will be revised shortly.