Thermo-chiller/

Thermo-chiller/ Rack Mount Type HRR Series How to Order Option U Air-cooled Refrigeration HRR A 20 012 (UL Standards) Cooling capacity Option 012 1000/1200 W (50/60 Hz) 018 1600/1800 W (50/60 Hz) 024 2000/2400 W (50/60 Hz) 030 2500/3000 W (50/60 Hz) Nil None DM With electric conductivity control function, Applicable to DI water piping M Applicable to DI water piping T High-pressure pump mounted

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

How to Order w e q r t y u i o !0 !

KPQ/KPG

KPQ/KPG Series Clean One-touch Fittings How to Order KP H 06 KP P 08 Q 01 KQ2 Applicable fitting size Clean One-touch fittings Made to Order KQB2 04 06 08 10 12 4 6 8 10 12 Specifications X53 With pipe tape Grease-free Symbol Q G KS KX Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel 304 Rubber material: EPDM (Fluorine-coated) X193 Note 1) Gasket: M-

KQ2-G

Gasket for M5 thread: M-5G2 E Bulkhead union v v Bulkhead connector v v A KQ2 H 06 00 1 4, 6 (Oval type release button) Oval type release button KQ2 H 08 00 A 8 to 16 (Round type release button) Port size/Applicable tubing O.D.

VXE21/22/23

Nil T F N Rc NPTF G NPT Refer to page 43 for ordering coil only. Suffix Oil-free Nil Z Electrical entry Select Nil because the solenoid valve V, M options are oil-free treatment. G-Grommet C-Conduit Port size Refer to Table (1) shown below for availability.

Emitter Cartridge Type: D (High Speed Static Neutralization Cartridge), High Voltage Cable Length: 2 (2m), One-touch Fitting: 7L (ø1/4" Elbow), Power Supply Cable Direction, Length: T (Entry Direction: Angled, Length: 5 m), Communication Cable Entry: T (Entry Direction: Angled, Length: 5 m), Nozzle Bracket: F (Angle Adjustment Bracket), DIN Rail Mounting Bracket: U (Controller: Included;

Series: 344 (VP300), Pilot Type: R (External Pilot), Pressure Specification: Standard (0.7MPa), Coil Specification: T (w/Power Saving Circuit, DC Only), Voltage: 5 (24VDC), Electrical Entry: M (M-type Plug Connector, 300mm Lead Wire Length), Light & Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: 02 (1/4), Thread Type: T (NPTF), Actuation

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 40 (Base Mounted), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 03 (Base Mounted w/Sub-plate 3/8), Thread: T (NPTF

: T (NPTF)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: N11 (3/8" One-touch Fitting), Thread: T (NPTF)

: T (NPTF)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: T (NPTF

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: T (NPTF

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: T (NPTF

Fitting), Thread: T (NPTF), Option: F2 (Side Bracket)

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector w/Lead Wire 0.3m), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: T (NPTF

Exhaust Cleaner for Clean Rooms AMP Series

Description AMP320 AMP220 AMP420 AMP-EL220 AMP-EL320 AMP-EL420 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 4 Exhaust Cleaner for Clean Rooms Series AMP Dimensions (mm) 1in = 25.4mm N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting

Rotary One-touch Fittings Manifold Series KM

Rc(PT) T Part No.

Fluoropolymer Piping Equipment

Basic size With reducer Refer to the pamphlet High-Purity Fluoropolymer Fittings Hyper Fitting/LQ1, 2 Series Work Procedure Instructions (M-E05-1) for connecting tubing and special tools. (Downloadable from our web site.)

Speed Controller: Standard Type Series AS In-line Type 1

Description Material Part no. t y u i 1429138 142964 9 x 7 x 1 M-5G1 Valve seat U seal O-ring Gasket Brass HNBR NBR PVC 15-9-29