5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

1 e w r !3 !8 !7 @3 @0 !9 @4 @1 @2 @6 @5 @7 @8 LVM No.

Air Catch Sensor

ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Basic type For 90 and 100 For 180 and 190 CRA1 Single flat Single flat CRQ2 MSQ MRQ D+10 0 B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge

VQ

(Value in the initial stage.) 1 (P) 3 (R) Normally closed VQZ VZ (A) 2 VS 1 (P) 3 (R) Normally open Option Specifications Latching AC Large flow capacity Type Item Normally open 1 2 VQ120-l VQ110L-l VQ110l (A) 2 VQ110U-l Model 0.7MPa 0.6MPa 0.5MPa Max. operating pressure 3 2 0.14mm2 (Cv ) 1 2 0.68mm2 (Cv ) 0.20mm 2 (Cv ) 2 1 Effective area 0.008 0.038 0.011 1 (P) 3 (R) 0.20mm2 (Cv ) 2 3 0.68mm2

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

q i o r t !

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

KT10

P F H J L N P R Option Code Specification Standard (Cv: 0.06) High flow (Cv: 0.12) No code HF O-ring material 1) Not available for material code B.

ASR

9 t t q @0 q @0 r r !4 i y !0 !1 !2 !4 i !5 !6 Component Parts Note Material No. q w e r t y u i o !0 !1 !2 !3 Description No. !4 !5 !6 !7 !8 !

Electric Slide Table / High Precision Type 《 AC servo motor 》

Specification 1.1 LECS series driver 1.1.1 How to order L E S Y H 16 D S2 A 50 S 2 A1 (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (3)Motor type (2)Motor mouting position (1) Size Symbol type Output D In-line 16 25 Size Compatible driver [W] R Right side parallel AC servo motor LECSA-S1 LECSA-S3 S2 100 16 L Left side parallel S3 200 25 (Incremental encoder) LECSB2-T5 LECSC2-T5 LECSS2-T5 T6 100

FQ1

point) Port size Rc 1/2, 3/4 3/4, 1 1/2, 3/4, 1 Material Housing/Seal SUS304/NBR or FPM Element Note) Cotton, PP, SUS304, SUS316, etc.

Compact Type Dual-Rod Cylinder Series CXSJ

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

DeviceNet-E

Pi n assi gn of I TV si de connect or I t em Pi n assi g W i re co l o r (N o te 1) +24[ V] Brow n 4 3 N . C. Pow er suppl y connect or G N D Bl ue 2 N . C. D RAI N 4 V Red 3 Com m uni cat i on connect or V Bl ack 1 5 CAN _H W hi t e 2 CAN _L Bl ue N ot e1) W i re col or w hen t he opt i on cabl e i s used.

ARJ1020F

1 !5 q u o Material Note Component Parts !4 r No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

VCB

Orifice and Port Size Combinations Class Orifice size (mm) Port size 3 2 4 5 7 10 T Conduit terminal 1/8 (6A) 2 1/4 (8A) 1/4 (8A) 3 3/8 (10A) 1/2 (15A) 1/4 ( 8A) 3/8 (10A) 4 1/2 (15A) Available types of electrical entry are either G, C and T.

XLAQ/XLDQ

Caution Bonnet assembly Bonnet Assembly: Component Part No.: q Model Flange (Valve) size Temperature specifications Indicator 16 25 40 50 XLAQ16-30-1 XLAQ25-30-1 XLAQ40-30-1 XLAQ50-30-1 General use XLAQ16A-30-1 XLAQ25A-30-1 XLAQ40A-30-1 XLAQ50A-30-1 XLAQ XLAQ16-30-1H XLAQ25-30-1H XLAQ40-30-1H XLAQ50-30-1H High temperature XLAQ16A-30-1H XLAQ25A-30-1H XLAQ40A-30-1H XLAQ50A-30-1H General

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Symbol AMD 4.6-7 Micro Mist Separator Series AMD AMD150 to AMD850 How to Order AMD 250 03 J B Body size Options J Drain guide 1/4B female thread R IN R OUT reversal 150 1 8 250 1 4 350 3 8 450 1 2 550 3 4 650 1 850 11 2 Accessories(Options) Symbol Description None Bracket T Element service indicator B N.C. auto drain C N.O. auto drain D Please refer to p.4.7-7 regarding How to Order of case

Electro-pneumatic Proportional Valve Series VEF/VEP 1

3-Rc 1/4, 3/8 Flow type: VEF2131 Flow type: VEF2141, VEF3141 Pressure type: VEP3141 3-Rc 3/8, 1/2, 3/4 P(1) port P(1) port 2-Rc A(2) port 1/4, 3/8, 1/2 A(2) port Cabtire cable O.D. 6.8 to 11.5 R(3) port Cabtire cable O.D. 6.8 to 11.5 2 port: R port plug 4-9 Mounting hole 3-7 mounting holes 14-9-16

Filter for Cleaning Solvent Quick Change Filter Series FQ1

point) Port size Rc 1/2, 3/4 3/4, 1 1/2, 3/4, 1 Material Housing/Seal SUS304/NBR or FPM Element Note) Cotton, PP, SUS304, SUS316, etc.