15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

15 to +10% of rated voltageEquivalent to B type (130C)5.6 VA (50 Hz), 5.0 VA (60 Hz)3.4 VA (2.1 W)/50 Hz, 2.3 VA (1.5 W)/60 Hz1.8 WGrommet, Type D DIN terminal, Type Y DIN terminalIndicator light/Surge voltage suppressor (2)Non-locking push type (Flush),Locking type (Tool required), Locking type (Lever)

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Applications) Direct Operated Precision Regulator with Backflow Function (For Special Applications) Series ARP20K to ARP40K 10 20 2110 20 21-ARP20/ARP20K 10 20 21 -ARP30/ARP30K 10 20 21 -ARP40/ARP40K 10 20 21 Description Symbol Body size 20 30 40 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting + Semi-standard Nil R Flow direction d

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Dimensions H1 (Hexagon width across flats) Applicable tubing O.D. d H2 (Hexagon width across flats) L4 L3 L5 D1 L2 M M L1 Metric Size Inch Size L5 L5 L4 Max. L4 Max. Panel-cut dimensions Panel-cut dimensions L1 L2 L3 M d D1 H1 H2 L1 L2 L3 M D1 d H1 H2 Model Model Min. Max. Min. Max.

AS-FPQ/AS-FPG

5 15-17-5 6 Series AS-FPQ/FPG Dimensions H (width across flats) Applicable tubing O.D. d A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max. Min. Max. 1 2 Min.

Speed Controller with One-touch Fittings Series AS In-line Type 1

In-line Type Applicable tubing O.D. d Inch Size Metric Size Applicable tubing O.D. d Applicable tubing O.D. d Model Weight D1 D2 L1 L2 M1 L3 Max. Min. (g) Model Weight D1 D2 L1 L2 M1 L3 Max. Min.

AMP

Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)

Clean Rodless Cylinder Series CYP

e f g Nil Reed switch L R Solid state switch S h Nil L R S Operating direction Left Right a b h g d c f e Note) Lead wire length symbols 0.5m .

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

A L4 D1 L3 D2 M1 L1 L2 T M5 type H (width across flats) Applicable tubing O.D. d A A4 D1 L3 D2 M1 L1 T L2 Model Weight (g) Note 2) Tubing O.D. d T H D1 D2 L1 L2 L3 M1 L4 Max.