SMC Pneumatic Clean Series 5 6 6 40 45 55 65 22 22 28.5 30 11 13 14 16 5 5 5 7 66 82 100 120 86 106 125 150 70.5 82.5 101 121 Other dimensions are the same as basic style.
to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.
to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke.
No code M V X 4) PTFE recommended for applications such as within a process tool. 5) Not available with SH material.
HW ConfigEX245-SPN1 HW Config Module information 1 . 5-1 1 US2 DiagnosisEnable /(US2)2 EX245-DX147 39 No.EX-OMU0020CN Module information (General) . 5-2General (IO Device Diagnostics) . 5-3IO Device Diagnostics 40 No.EX-OMU0020CN 2 . 5-4 2 EX245-SPN1 1 3 EX245-SPN1 1 Module information (Communication Diagnostics) . 5-5 Communication Diagnostics 41 No.EX-OMU0020CN 3 . 5-6 Communication
No. 1 LED 2 () 3 4 5 () -18No.EX-OMN0035CN-A EX600-DXE No. 1 LED 2 () 3 4 D-sub (No.4-40 UNC) 5 6 () EX600-DXF No. 1 LED 2 () 3 4 5 () -19No.EX-OMN0035CN-A (1)EX600-DXB/EX600-DXD 1 24 V() 2 2 3 0 V() 4 1 5 FE M12 (4 ) EX600-DXPB/EX600-DXPD EX600-DXNB/EX600-DXND 1 24 V 1 24 V 2 2 2 2 2.7 k 2.7 k DC24 V DC24 V 3 0 V 3 0 V 4 4 1 1 2.7 k 2.7 k 5 5 FE FE
AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390
VQ4 VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Connector wiring diagram (mixed wiring) VQZ 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 VQD 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2
4-3/8 4-1/2 4-3/4 4-3/4 4-7/8 5 150 5-3/8 5-3/8 5-3/8 5-1/2 5-1/2 5-1/2 5-3/4 6 CAUTION: Horizontal or angle mounted cylinders (anything other than vertical) creates a bend stress on the rod when extended, just from the weight of the rod and cylinder itself.
4-3/8 4-1/2 4-3/4 4-3/4 4-7/8 5 150 5-3/8 5-3/8 5-3/8 5-1/2 5-1/2 5-1/2 5-3/4 6 CAUTION: Horizontal or angle mounted cylinders (anything other than vertical) creates a bend stress on the rod when extended, just from the weight of the rod and cylinder itself.
stroke adjuster at retraction end) I 5 11 10 9.5 8 8.5 5 4.75 8.5 5 18.5 NA-M4 x 0.7 thread depth 5 K KA 18.5 31.5 (With stroke adjuster at extension end) Stroke adjuster at extension end Stroke adjuster at retraction end N-M4 x 0.7 thread depth 5.5 (Insert) 5 9 5 1 15 (With stroke adjuster at extension end) 2.5 (With stroke adjuster at retraction end) 20 47 50 28 38 16 F 4H9 depth 3.5 +0.030
5 10 5 15 10 15 15 D-F7/J79 D-F7V/J79C D-F7W/F7lWV D-J79W/F7NTL D-F7BAL/F7BAVL D-F79F 20 Mountable only for equivalent bore sizes 40, 50, 63. 6.5 7 6.5 6.5 6.5 D-P5DWL 5 5 5 Since this is a guideline including hysteresis, not meant to be guaranteed.
1/4 3 12.5 19 35.5 8, 5/16 8, 5/16 5 13.5 21 38.5 Note) The O-ring is attached.
5 10 5 15 10 15 15 D-F7/J79 D-F7V/J79C D-F7W/F7lWV D-J79W/F7NTL D-F7BAL/F7BAVL D-F79F 20 Mountable only for equivalent bore sizes 40, 50, 63. 6.5 7 6.5 6.5 6.5 D-P5DWL 5 5 5 Since this is a guideline including hysteresis, not meant to be guaranteed.
234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction _ 296 Mounting _ 299
XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric
Problem 5 Red Green Alternate Flashing OFF Red Flashing W-MS W-MS LED does not turn on green.
Regulating pressure range, by unit of standard measured pressure S1 S2 Preset pressure Unit OFF OFF P1 ON OFF P2 OFF ON P3 ON ON P4 ITV01 ITV03 Regulating pressure range ITV05 MPa kgf/cm 2 0.005 to 0.9 0.05 to 9 0.05 to 9 0.7 to 130 5 to 900 0.005 to 0.5 0.05 to 5 0.05 to 5 0.7 to 70 5 to 500 0.005 to 0.1 0.05 to 1 0.05 to 1 0.7 to 15 5 to 100 For safety reasons, it is recommended that one