XL

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Step Motor Controller

B-1 A-1 B-3 A-3 Connection of shield material Circuit Lock (+) Lock () Sensor (+) Note) Red Black Brown Black 4 5 1 2 Sensor () Note) Note) This is not used for the LEF series. 32 Series LECP6 Series LECA6 (mm) Option: I/O Cable LEC CN5 1 Controller side PLC side (Terminal no.) (8.9) B1 A1 A1 Cable length (L) [m] 1 3 5 A13 B1 (22.4) 1.5 3 5 (14.4) L B13 B13 A13 Dot color Dot mark Insulation

Possible to transfer a workpiece at low-speed.

D1 = C1 = C Y = L2 = C2 C1 L2 + (3 x P) Q2 = M C2 = C L2 = L1 = X = D2 = (mm) (mm) L1 max X 2 X 2 X 2.5 X 3 X 3 X 3 to 18 3 to 20 3.5 to 30 4 to 32 4 to 36 Size 10 15 20 30 40 D2 3.5 to 4.9 3.5 to 5.9 5 to 9.9 5 to 11.9 5 to 14.9 Y 1 to 18 1 to 20 1 to 30 1 to 32 1 to 36 D1 3.5 to 4.9 3.5 to 5.9 5 to 9.9 5 to 11.9 5 to 14.9 L2 max Y Y Y Y Y Size 10 15 20 30 40 (mm) Q2 M3, M4 M3, M4

HRX-OM-X071

cooled type) . 2-4 2.3 Function of Parts . 2-5 2.4 Operation display panel . 2-6 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.2 Installation . 3-2 3.2.1 Environment . 3-2 3.2.2 Location . 3-4 3.2.3 Installation and Maintenance Space . 3-6 3.3 Installation . 3-7 3.3.1 Mounting. 3-7 3.3.2 Electrical wiring . 3-8 3.3.3 Preparation and wiring of power supply cable .3-10 3.3.4

EtherNet/IP TM Compatible Fieldbus System

Output: SI unit (32 output) is connected.

CXT

Long stroke (mm) Slide bearing Standard stroke Long stroke Ball bushing bearing Standard stroke Long stroke X Y Z Bore size (mm) Stroke range (mm) SCXT Tube bore size A, #1(#1+#3) SCXT Tube bore size B, #1(#1+#3) 12 50, 75, 100 32 7.5 7.5 16 50, 75, 100 32 7.5 7.5 SCXT Tube bore size A, #2(#2+#3) SCXT Tube bore size B, #2(#2+#3) 20 75, 100, 125, 150, 175, 200 41 9 9 25 75, 100, 125, 150,

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 8 6.5 N x M3 x 0.5 thread depth 4.5 Note 1) Note 2) Retraction end adjuster Extension end adjuster 3 depth 3 +0.03 0 22.5 (Extension end adjuster) 3.5 6.5 4 0.7 6.5 (Extension end adjuster) 0.3 22.2 15 17 36 24 16 32 1 12 16 F 3 depth 3 +0.03 0 5 4 x M3 x 0.5 thread depth 4 2 N 1 x F 10 30 3 x M4 x 0.7 thread depth 6 M 24 14.6 KA NA x M3 x 0.5

JXCx-OMT0023

Servo-on SON DICOM (Note 3) ALM Trouble RA DOCOM 3 3 3.

High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

REC

X 1.25 5 33.5 5 18 15.5 13 26 8 13 10 41 150 to 700 20 REA M10 X 1.25 25 6 37.5 5.5 22 19.5 17 32 10 13 10 45 150 to 700 26 M10 X 1.25 32 6 46.5 5.5 22 19.5 17 32 12 13 11 45 150 to 1000 26 REC M14 X 1.5 40 8 56.2 7 24 21 22 41 14 16 12.5 50 200 to 1000 32 20, 25 NA S TD TT TX TY TZ Z ZZ NN P N Bore size Stroke range RHC 1 8 1 8 1 8 1 4 30 20 M20 X 1.5 146 8 10 32 32 52 36 200 150 to 700

IIIIIII

O F 5.07 lbs. (2 3 kg.)

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Wire color 1 Orange (Black 1) 6 Orange (Black 2) 11 Orange (Black 3) 16 Orange (Black 4) 21 Orange (Red 1) 26 Orange (Red 2) 31 Orange (Red 3) 36 Orange (Red 4) 2 Gray (Black 1) 7 Gray (Black 2) 12 Gray (Black 3) 17 Gray (Black 4) 22 Gray (Red 1) 27 Gray (Red 2) 32 Gray (Red 3) 37 Gray (Red 4) 3 White (Black 1) 8 White (Black 2) 13 White (Black 3) 18 White (Black 4) 23 White (Red 1) 28 White

EXxx-OMK0006

(Output on) Index 6320h Write Outputs 32-Bit This object shall set a group of 8 outputs lines as 32-Bit of information.

Mechanical Valves Series NVM, NVFM, NVZNI

O F 5.07 lbs. (2 3 kg.)

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Rc 3/8 (Port) W CH LH RR SS NE RR SS H PP QQ NH NC Cushion needle 2-Rc 3/8 (Hexagon socket head taper plug) 2-Rc 3/8 (Hexagon socket head taper plug) GA TT UU UU TT GC Rc 3/8 (Port) Rc 3/8 (Hexagon socket head taper plug) G NW A GB N Z + Stroke Rc 3/8 (Hexagon socket head taper plug) WW WW Rc 3/8 (Port) Rc 3/8 (Hexagon socket head taper plug) Rc 3/8 (Port) XX XX Centralized piping Centralized

7ND9071en

8 10 mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm or 3/8" 67.0 67.0 60 121 7380 1 10 mm or 3/8" 75 189 11500 1 10 mm or 3/8" 502 195 11900 1 10 mm or 3/8" 130.0

CQS

NPN) 5V A96V A96 IC 3 wire (NPN) F9NV F9N 3 wire (PNP) F9PV F9P Mounting Bracket Part No.

o

"* (D r 1 How to Order fB(acket ln case of Type ol actuation I 2 position single 2 2 position double 3 3 position closed center 4 3 position exhaust center 5 3 position pressure center -: Without subplate M5: @@ With 10-32 Nom.

o

"* (D r 1 How to Order fB(acket ln case of Type ol actuation I 2 position single 2 2 position double 3 3 position closed center 4 3 position exhaust center 5 3 position pressure center -: Without subplate M5: @@ With 10-32 Nom.

SY

SS5Y33, #3 (#3 + #7 + #8 + #9) SS5Y3-45-AD .