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common) Number of solenoid valves 32 outputs Valve output Applicable valve series Solenoid valve with surge voltage suppressor of 24 VDC and 1.0 W or less (manufactured by SMC) Output setting during communication fault HOLD / CLEAR / Force ON Protection Short circuit protection Enclosure IP67 (manifold assembly) 1 Operating temperature range -10 to 50 oC Storage temperature range -20 to 60

Ethernet connector of base 5HVSRQVLEOH3DUW\86&RQWDFW,QIRUPDWLRQ 5 60&&RUSRUDWLRQRI$PHULFD 60&%OYG1REOHVYLOOH,186$ 3KRQH After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly. Safety cannot be assured in the case of unexpected malfunction. Provide grounding to assure noise resistance of the product.

Setting range: 0.1/0.2/0.5/1/2/5/10/30/60 s (Initial value 1 s) The analogue input update time is set for every wireless slave unit. Analogue input update time Define the address assignment direction of the EX600 I/O units connected to the wireless master unit. The address assignment direction is changed by mode 1/mode 2. Be careful about the I/O map.

PROFINET connector of base 5HVSRQVLEOH3DUW\86&RQWDFW,QIRUPDWLRQ 5 60&&RUSRUDWLRQRI$PHULFD 60&%OYG1REOHVYLOOH,186$ 3KRQH After maintenance is complete, perform appropriate functional inspections. Stop operation if the equipment does not function properly. Safety cannot be assured in the case of unexpected malfunction. Provide grounding to assure noise resistance of the product.

40% 92% 8% 0.525.0 L/min 0.526.3 L/min 026.3 L/min 5.00 V 20.0 mA 90% 10% PFM725 80% 20% 0.520.0 L/min 0.521.0 L/min 021.0 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 1.050.0 L/min 1.052.5 L/min 052.5 L/min 5.00 V 20.0 mA 90% 10% PFM750 80% 20% 1.040.0 L/min 1.042.0 L/min 042 L/min 4.20 V 16.8 mA 70% 30% 60% 40% 92% 8% 2100 L/min 2105 L/min 0105 L/min 5.00 V 20.0 mA 90% 10% PFM711 80% 20%

: Abnormal 15 System error 0: Normal 1: Abnormal 16 to 31 CH4: Flow measurement value With symbol 16 bit 32 to 47 CH3: Flow measurement value With symbol 16 bit 48 to 63 CH2: Flow measurement value With symbol 16 bit 64 to 79 CH1: Flow measurement value With symbol 16 bit Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH1: Flow measurement value (PD) Bit offset 63 62 61 60

Flow Rate: 5.6 CFM / 9.6 m3/hr / 159 LPM , 5.6 CFM / 9.6 m3/hr / 159 LPM, Max Vacuum: 25.4 in HgV / 115 Torr / -861 mbar , 25.4 in HgV / 115 Torr / -861 mbar, Horsepower (60 Hz): .59, Voltage (60 Hz): 200 - 277 / 346 - 480, Voltage (50 Hz): 200 - 255 / 346 - 400, Frequency (Hz): 50 / 60, Phase: 3-phase, Item Dimensions: Length: 9.8 in / 249 mm Width: 6.14 in /

Static Load B W3max=60Nm (Checked from graph with Va) W3 15 Load Rate a1= = =0.25 W3max 60 B M2max=2Nm (Checked from graph with Va) M2=Wx L1=15x0.05=0.75Nm M 2 0.75 Load Rate a2= = =0.375 M 2max 2 3.

15.4 ()[820m] . 60 15.5 . 62 15.6 . 62 15.7 . 62 15.8 DeviceNet . 62 15.9 . 63 16 . 64 16.1 . 64 16.2 . 65 17/ . 70 18/ . 71 18.1 . 71 18.2 . 72 18. 3 . 73 18.4 . 74 18.5 . 75 18.6 . 75 19 . 76 19.1 / . 76 19.2 . 77 19.3 . 78 19.4 . 78 19.5 . 79 19.6 . 79 19.7 . 79 20 . 80 21. . 85 22 . 86 3 - JXCD1/ 1.

I/O . 36 6.1 . 36 6.2 (NPNPNP ) . 36 (1) I/O . 36 (2) I/O . 37 6.3 . 38 (1) I/O1 . 39 (2) I/O2 . 42 6.4 I/O . 44 (1) NPN . 44 (2) PNP . 46 7. . 48 7.1 . 48 7.2 . 49 7.3 . 51 7.4 . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I . 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 8. . 56 8.1 . 56 8.2 . 57 8.3 . 60 8.4 . 64 8.5 . 67 8.6 . 71 2 No.SFOD-OMT0009CN-B 8.7 . 73 8.8 . 73

EtherNet/IP . 43 8. . 44 8.1 . 44 (1) PLC (PLC) . 44 (2) PLC (PLC ) . 44 8.2 . 44 (1) PLC . 44 (2) PLC . 46 9. . 48 9.1 . 48 9.2 . 49 9.3 . 51 9.4 . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I . 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 10. . 56 10.1 . 56 -2No.JXC-OMT0001CN-C 10.2 . 57 10.3 . 60 10.4 . 64 10.5 . 67 10.6 . 71 10.7 PLC . 73 10.8 . 73 11. . 74 11.1 . 74 11.2

() 2 () () () 3 7.1 12 64 ()() No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 28 - () (TB) () No. No. 063 No. TB No.

(DC24V) DC24V10 (1) 3A 5A 2 (3) 11 () 13 () A/B (800 /) RS485 Modbus EEPROM LED LED/1 I/O 5m 20m 0~40 90%RH ) -10~60 90%RH ) ()FG 50MDC500V 150g() 170g(DIN ) 1 2 3UL UL1310 Class2 11 - 3.2. ( SV1.00 ARX8300073 ()"SV1.00" ON/ ()/ 1 PWR LED() (LED()) () 2 ALM LED() ON/ 3 CN5 I/O (26 ) I/O PLC (11 COM 13 COM ) 4 CN4 I/O (8 ) 5 CN3 (16 ) 6 CN2 (6 ) 7 CN1 5 (DC24V)