SMC Corporation of America
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Table 1 shows the tightening torque for reference. LQHB Table 1 Tightening Torque of Union Nut TL TIL 6.

JIS Symbol Construction/Dimensions AD402 AD600 Rc 1/4, 3/8, 1/2 Valve assembly Body Rc 3/4, 1 O-ring Body Gauze Lever Valve HA O-ring Chamber Piston assembly AT Float Spring Case ID Long hole of chamber Piston O-ring AMG Rc 3/4, 1 Drain guide Component Parts AFF Drain Rc 3/8 No. q Description Body Material Aluminum die-casted AM Working principle (AD402) When no pressure is applied internally

Other lengths available based on minimum order quantity TG-2 TG-1 SMC Tubing Accessories TK-1 Tube Cutter (Tubing 13mm or less) TK-2 Tube Cutter (Tubing 18mm or less) TK-3 Tube Cutter (Low Cost) TG-1 Tube Release Tool (4, 6mm tube) TG-2 Tube Release Tool (1/8 , 1/4 tube) TK-3 TK-1 SMC Offers a Rainbow of Standard color choices 33 TIUB 05 BU 20 TU 0425 BU Polyurethane Tubing Polyurethane Tubing

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Specifications FGH200 FGH300 Model FGH100 Number of built-in elements (element length) (mm) 1(125) 1(250) 1(500) Operating pressure MAX. 1 MPa MAX. 80C (Not above the boiling point) Operating temperature Each kind of fluid (See the table of applicable fluids on pages 63 and 64) Applicable fluid Port size (Rc) 3/8, 1/2, 3/4, 1 Housing Stainless steel 316 (Electrolytic polishing) Material Seals

Fix switches outside 1 to 4 mm further than the values in the above table (if 1 switch is used, make sure that it turns ON and OFF properly; if 2 switches are used, make sure that both switches turn ON). Note 3) ( ) in column W is the dimensions of D-A93.

Fix switches outside 1 to 4 mm further than the values in the above table (if 1 switch is used, make sure that it turns ON and OFF properly; if 2 switches are used, make sure that both switches turn ON). Note 3) ( ) in column W is the dimensions of D-A93.

Metric size 4, 6 6, 8, 10 10, 12 Inch size 1/8, 1/16, 1/4 1/4, 3/8 3/8, 1/2 Orifice diameter 4.4 8 10 Flow characteristics Av x 10-6m2 12 33.6 52.8 VC Cv 0.5 1.4 2.2 Withstand pressure (MPa) 1 VDW Operating pressure (MPa) 0 to 0.5 Fluid temperature (C) 5 to 90 VQ Ambient temperature (C) 0 to 60 VX2 Weight (kg) 0.055 0.115 0.185 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

B 0 Normally Closed/Single unit Electrical option Nil None Port size S With surge voltage suppressor L With indicator light 02 03 04 Rc 1/4 Rc 3/8 Rc 1/2 With light/surge voltage suppressor Z Refer to the table (1) given below for availability.

Element Description Power supply connector 1 Unused. 1 Power input connector Supplies power for output devices.1 2 To obtain the operation manual about this product and control unit, please refer to the SMC website (URL http://www.smcworld.com) or contact SMC directly. Power LED Indicates the power supply status. 3 2 1: Refer to for the Wiring.

Do not supply air pressure from ports other than 1(P) port. The valve will malfunction when air pressure is supplied from other ports. 3. Do not use the valve under negative pressure. Component Parts No. Zinc die-casted Aluminium die-casted Material Note q Description Valve guide Body Chromated Chromated Chromated Selection w e Handle r Brass Valve Zinc alloy Caution 1.

Operation light (OUT2) White Switch output 2 2 DO 1 3 Blue 0 V L3 2 URL https://www.smcworld.com Communication data (IO-Link)/ Switch output 1 (SIO) Black C/Q 4 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 DOWN button UP button Note: Specifications are subject to change without prior notice and any obligation on the part

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32

(mm) H2 Q P L W H1 Model TMA-06 TMA-08 TMA-10 TMA-12 28 21.7 172.5 31.8 25.4 151.2 35 28.1 167.3 37 19 151 17.9 20.3 24.3 26.7 18.6 18.6 22 22 11.4 12.6 15 16.2 6 12 10 8 15-6-32 1 Related Products: Tube Cutter Series TK Tube Cutter: TK-2 Possible to cut a tube up to 18 mm.

Six station manifrcld ass'y: sta. 1-4) NVF'I'10-5G-017 sta. 5-6) NVF1 10-3G-017 NW3F1 -30-061-017 No. ot Stgliorg I l 5 I F Mounting Brackets tPoding 01 ,d' NPIF DltrlENSlON D E F G H J x ll ta o P n s T u w x z AA BB 3.78 (96) 3.41 1.77 (,r5)0.39 (10) o.59 (15) 0.20 (5) 0.63 (16) 1.O2 (28t 3.50 (89) 1 . 1 8 (30) 0.59 (15) 2.76 (70) o.87 (21) o_20 {5) 1 . 1 8 {30} 0.67 ltTl 0.59 (ls) o.32