MU

5 10 5 15 10 15 15 D-F7/J79 D-F7V/J79C D-F7W/F7lWV D-J79W/F7NTL D-F7BAL/F7BAVL D-F79F 20 Mountable only for equivalent bore sizes 40, 50, 63. 6.5 7 6.5 6.5 6.5 D-P5DWL 5 5 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

Short Stroke Electric Actuator Series LX

234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction _ 296 Mounting _ 299

High Vacuum Angle Valve, XL Series

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

EXxx-OMZ0016

Problem 5 Red Green Alternate Flashing OFF Red Flashing W-MS W-MS LED does not turn on green.

ITV

Regulating pressure range, by unit of standard measured pressure S1 S2 Preset pressure Unit OFF OFF P1 ON OFF P2 OFF ON P3 ON ON P4 ITV01 ITV03 Regulating pressure range ITV05 MPa kgf/cm 2 0.005 to 0.9 0.05 to 9 0.05 to 9 0.7 to 130 5 to 900 0.005 to 0.5 0.05 to 5 0.05 to 5 0.7 to 70 5 to 500 0.005 to 0.1 0.05 to 1 0.05 to 1 0.7 to 15 5 to 100 For safety reasons, it is recommended that one

C76

5 !6 !7 !

Tie-rod Type Hydraulic Cylinder

x 28l SWRM Polished round 18SPCC 113 5 18 123 5 80 clevis type C1 100 5 x 30l SWRM Polished round 20SPCC 132 7.5 20 147 5 100 clevis type E B 125 Polished round 22SPCC 5 x 35l SWRM 154 7.5 22 169 5 125 clevis type A 160 Polished round 24SPCC 5 x 35l SWRM 190 7.5 25 205 5 160 clevis type Note) Does not come with other accessories.

CJ2X/CUX/CQSX/CQ2X/CM2X

MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

) (n = 2, 3, 4, 5) D-A9mV 5 10 35 10 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 25 (n 2) (n = 2, 3, 4, 5) Band mounting D-C7m D-C80 10 15 50 15 + 40(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 20 (n 2) (n = 2, 3, 4, 5) D-H7m/H7mW D-H7BA D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 22.5 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C D-H7C 10 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 27.5

•

M14 K 1.5 '5, 1->"14",5' 18 1M16xl.5 15 17 1M) Up to 1000 ' 50 47 157 126 160 281 17 36 ::1 36 ~~ 72 :.g;' 32 ' 71 43 15"" 'l7 15 20 160 Up to 1200 56 53 I 177 144 180 32 1'00 20 40 j~ 40 :g l 80 .2, 38 78.S 42 (mm) H Z ZZ f h , Bpre sige ' K K-A' 'L ' MM N P 5 U RR WithoUt ron-:bO'O't . ,.. ,', 'i":"WitH rod boot """ , ii' ', J!

100

5 !1 !4 Component Parts No.

CJ2X/CUX/CQSX/CQ2X/CM2X

MK(2) 10 Note) 15 Note) 1 pc. 5 5 Note) Please consult with SMC for shorter stroke length than indicated in the table.

C76

5 !6 !7 !

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !

rep-filter-e

Instruction Drawing for Disassembly & Reassembly of Filter q AIR VENT e r w 5-1 t 5-2 i y u Element support Body IN OUT DRAIN qHexagon head Bolt tElement mounting bracket uJoint wHexagon Nut Spring iElement guide eCover Element holder rGasket yElement 5-1 5-2 476 Series FGC Replacement Procedure of Element 2 2. Overhaul 5.

MNB

4 @3 #3 #5 t @7 $5 !5 @4 !8 @0 !7 !9 i @2 q r y #0 $0 $2 w A C B A section $1 !2 !2 $6 !0 u @5 !6 @1 !1 $7 o $8 #4 @6 #9 @8 #6 #7 e $4 B section C section #1 #2 !2 100 80 63 50 40 32 80, 100 80, 100 Description Material Note Component Parts No. Description Material Note No.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

AS-FG/ASD-FG

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tube O.D. 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 3/16" 1/8" 5/32" 5/16" 1/4" 5/32" Inch size 3/8" 5/16" 3/16" 1/4" Flow rate flow Controlled (Free) l/min (ANR) 100 180 230 260 390 460 660 790 920 1580

5 Port Air Operated Valve Series SYA3000/5000/7000 1

for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 5 16" One-touch fitting for VR F2 With side bracket Series One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 8 One-touch fitting for 10 SYA5000 VH 3 SYA3000 5 SYA5000 SYA7000 VHS 7 SYA7000 SYA 5 1 C6 Body ported 20 40 SYA 5 1 Base

Industrial Filters Replacement Procedure

Instruction Drawing for Disassembly & Reassembly of Filter q AIR VENT e r w 5-1 t 5-2 i y u Element support Body IN OUT DRAIN qHexagon head Bolt tElement mounting bracket uJoint wHexagon Nut Spring iElement guide eCover Element holder rGasket yElement 5-1 5-2 476 Series FGC Replacement Procedure of Element 2 2. Overhaul 5.