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Cassette base 1OS EM D W SSsV W 165 -In",o"u," set Valvestations B E port position 2 stalions Note 1) Doube wiring speciiication I stalions 2 siaiions Specitied tayoul (Up lo 16 solonoids possible ) 16 slations U side (2 to 10 slations) D side (2 to l0 slalions) Both s des (2lo 16 statpns) Supply/Exhaust block assembly specification Nole 1l Doube wn.g specilicalon Shgle doubeafdlJ poston

Digital Gap Checker ( compatible)

-2 3 ISA-16-3 4 ISA-16-4 5 ISA-16-5 6 ISA-16-6 With connector lead wire ZS-31-B With connector lead wire ZS-31-C : Spacers are included for 4 and 6 stations.

Cylinder with Lock Series CLS

(same side) 25 + 55 125 + 55 135 + 55 BT-12 BT-12 BT-16 F5W, J59W, F5BAL, F5F n = 2, 4, 6, 8 ... n = 4, 8, 12, 16 ... n = 4, 8, 12, 16 ... 2pcs. (different side, same side), 1pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 35 145 155 BS1-125 BS1-140 BS1-160 D-A3, A4, G39, K39 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 KAL23-M5 15 9.6 16 15.5 M5 0.8 M6 1.0 7 6 8 8 15.5 19.5 21 3.4 2.9 8 4 5 3.2 1 8 KAL23-M6 KAL23-U01 10 17.5 10 KAL04-M5 15.5 M5 0.8 M6 1.0 16 8 3.5 3.5 8 KAL04-M6 16 10.4 16 18 4 1 8 KAL04-U01 20 20.5 4.2 4.2 8 14 10 10 1 4 KAL04-U02 22 21.5 14 KAL06-M5 16 M5 0.8 M6 1.0 9 5 6 18 8 3.5 3.5 8 KAL06-M6 16.5 Uni thread 17 1 8 KAL06-U01 3 8 KAL06-U03 24 23 21.5 20 14 12.8 6 10 23.5

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

B 210.5 198 185.5 173 160.5 148 135.5 123 110.5 98 L dimension 53.3 50.1 46.9 43.8 40.6 37.4 34.3 31.1 28 24.8 Weight (g) A 19 18 17 16 15 14 13 12 11 10 No. 335.5 323 310.5 298 285.5 273 260.5 248 235.5 223 L dimension 84.9 81.7 78.6 75.4 72.2 69.1 65.9 62.7 59.6 56.4 Weight (g) Series For SY3000 (8) A 16 22 25 25 C 51 80.8 97 98 Model AN203-KM8 AN200-KM10 AN300-KM10 AN300-KM12 Effective

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

16 Bore size 90 93 99 111 126 132 20 25 32 40 50 63 735

High Power Cylinder:

) AS3000, AS3500 (12.3) AS4001F (16) AS3000, AS3500 (12.3) AS4001F (16) AS3000, AS3500 (12.3) AS4001F (16) AS3000, AS3500 (12.3) AS2051F (4.5) AS3000, AS3500 (12.3) AS3001F (10) AS3000, AS3500 (12.3) AS4001F (16) AS3000, AS3500 (12.3) AS4001F (16) AS4000 (25.5) AS4000 (25.5) AS4000 (25.5) AS32l1F (10) AS33l1F (10) AS4001F (16) AS32l0 (13) AS3000, AS3500 (12.3) AS4001F (16) AS32l0 (13) AS3000

JXCx-OMX0009

(0410)h to (041F)h Step data (No.1) 16 (0420)h to (042F)h Step data (No.2) 16 . . . . . . . . . . . . . . . (07F0)h to (07FF)h Step data (No.63) 16 Please refer to the example of the following in a detailed address of each step data.

Fieldbus system (PROFIBUS DP compliant)

No.4 No.5 No.6 Output point COM A COM B COM C COM D OFF OFF OFF 64 16 16 16 16 OFF OFF ON 0 OFF ON OFF 16 8 8 OFF ON ON 24 8 8 8 ON OFF OFF 32 8 8 8 8 ON OFF ON 48 16 16 16 ON ON OFF Reserve ON ON ON : It cannot be set to 0 simultaneously for input and output point. -23No.EX-OMI0032-G 3.

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 12. Note 2) A model with PD port (M3) is available as an potion. Refer to page 12.

VQ7-6/7-8

AXT632-45-14 AXT632-45-16 AXT632-45-17 AXT632-45-18 AXT632-45-19 No.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

Stainless Steel 316

(inch) Model KQGH03-00 KQGH07-00 KQGH09-00 KQGH11-00 KQGH13-00 5/32 KQGU03-00 KQGU07-00 KQGU09-00 KQGU11-00 KQGU13-00 5/32 1/4 1/4 5/16 5/16 3/8 3/8 1/2 1/2 Male Elbow Male Elbow Bulkhead Union Bulkhead Union Applicable tubing O.D. (inch) Connection thread Model Applicable tubing O.D.

AC Servo Motor Driver (SSCNET /H Type)

Encoder initial communication error 1 16.7 Encoder initial communication Transmission data error 3 DB 16.A Encoder initial communication Process error 1 DB 16.B Encoder initial communication Process error 2 DB 16.C Encoder initial communication Process error 3 DB 16.D Encoder initial communication Process error 4 DB 16.E Encoder initial communication Process error 5 DB 16.F Encoder initial

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

) (Station n) (Station 1) (Station n) (Station 1) (Light/surge voltage suppressor) 54.1 [61.1] + + + + A A 19.2 9.4 38.7 21 25.5 (Pitch) P=17 21 1/8 (A port) 19.2 9.4 A A 18.5 (Pitch) P=16 16 M5 x 0.8 (A port) L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 49 49 49 49 57.2 [59.4] 36.2 67 [69.2] 52.2 58.7 76.1 Max. 10 66.1 77 Pg7 65.2 [72.2] Approx. 300 (Lead

Compact Manifold Regulator

IN Fitting Type Inch size Metric size ARP Common supply block (S) Common supply block with pressure switch (P) Fitting type Fitting type Straight 6 8 10 8 6 10 Elbow Straight 1/4 5/16 3/8 5/16 1/4 3/8 Elbow Symbol Symbol IR-A 01 02 03 13 14 15 51 52 53 63 64 65 5 56 56 5 IR 0.4 0.2 0.6 0.5 SMC 20 MPa 24 20 17 24 56 IRV 0.3 0.1 VEX 32.5 SRH 4.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK ASS ASR Flow Rate and Effective Area ASF Model AS121FM AS131FM AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 3.2, 4, 6 6, 8 3.2, 4 8, 10 4 6 Metric size Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" 5/32" 3/16" Inch size Air flow (l/min(ANR)) 7 12 38 Controlled flow JIS Symbol 0.1 Effective area (mm2) 0.2 0.6 Flow rate (l/min(ANR)) 230 180 460 260 390

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) Reed auto switch Solid state auto switch D-A9 D-M9 D-M9W Hs 16 A Hs 24.5 B 16 A and B are the dimensions from the end of the head cover/ rod cover to the end of the auto switch. A 22 B A and B are the dimensions from the end of the head cover/ rod cover to the end of the auto switch.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 20 27 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 20 27 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 25 32 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110 20 16 10 M26 x 1.5 M12 x 1.75 depth 22 Up to 300 60 41 30 37 3 40 50 26 (mm) Bore size (mm) Stroke range (mm) 20 25 32 40 50 63