MX-OMP0051

35.9 35.9 41.9 50.9 75.9 75.9 75.9 MXQ25(A,C) 32.4 23.4 23.4 23.4 23.4 23.4 23.4 23.4 23.4 42.7 41.7 41.7 41.7 54.7 54.7 40.7 79.7 77.7 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 16 5.4 5.4 5.4 5.4 5.4 15 25.6 25.6 31.6 48.6 25.6 MXQ8B 27 11.9 11.9 11.9 11.9 11.9 11.9 16 23.1 23.1 31.1 31.1 50.1 50.1 MXQ12B 14.5 14.5 14.5 14.5 14.5 14.5 14.5 14.5 38.1 32.1 32.1 39.1

AIR SLIDE TABLE

18.6 18.6 34 28 28 35 35 41 60 60 MXQ20(A,C) 30.2 19.2 19.2 19.2 19.2 19.2 19.2 19.2 19.2 34.9 35.9 35.9 35.9 41.9 50.9 75.9 75.9 75.9 MXQ25(A,C) 32.4 23.4 23.4 23.4 23.4 23.4 23.4 23.4 23.4 42.7 41.7 41.7 41.7 54.7 54.7 40.7 79.7 77.7 A Stroke Stroke Model 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 16 5.4 5.4 5.4 5.4 5.4 15 25.6 25.6 31.6 48.6 25.6 MXQ8B 27 11.9

Quick Exhaust Valve Series AQ 1

(Refer to pages 15-6-3 to 15-6-5 for details.) ASP ASN Model Applicable tubing O.D.

VZ1000

Compact size (Width: 15 mm) Low power consumption: 1.8 W DC Valve configuration Pilot type 4 port solenoid valve Air 0.15 to 0.7 10 to 50 (No freezing. Refer to page 3-13-4.) 15 or less 15 Refer to the table below.

ZCUK

20, 25, 30 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50 TN TF R Rod piping/ Pad direct mounting 32 32 mm Note) In the case of rod piping (Q, R), TF (G1/8) is not available.

PF2D

1 q t i 385 PF2D Series Dimensions: Remote Type Sensor Unit PF2D504-11/520-13 60 70 176 40 15 A Model PF2D504 PF2D520 9.52 12.7 62 52 42 A 4 x 4.5 52 1 18 PF2D540-19 Internal Circuits and Wiring Examples 78 86 186 -1/2 Analog voltage output Analog current output 56 15 Sensor Monitor PF2D3 Black Output for PF2D3 4 8 Switch output Main circuit Main circuit Main circuit Main circuit 3 7 U DC

MLGP

5 10 20 25 804 724 643 563 482 402 322 241 161 804 OUT 2 pcs. 15 5 15 20 25 16 32 603 543 482 422 362 302 241 181 121 603 IN Note) D-P5DWL can only be mounted on bore sizes 40 through 100. 1257 1131 1006 880 754 629 503 377 251 1257 OUT 16 40 1056 950 845 739 634 528 422 317 211 1056 IN Auto Switch Mounting Bracket Part No. for D-P5DW 1963 1767 1570 1374 1178 982 785 589 393 1963 OUT 20

30

32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41 41 4.5 5 5 6 6 6 7.5 7.5 7 8 8 11 11 11 14 14 7 8 8 11 11 11 13.5 13.5 13 17 17 22 22 22 27 27 30.5 34 34 38 38 38 44.5 44.5 8 9 9 13 13 13 15 15 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 0.03 0.05 0.05 0.11 0.11 0.11 0.22 0.22 JC20-8-100 JC25-10-150 JC32

Aluminum High Vacuum Angle Valve

M: Size 16, 25, 40 only.

VCW

Valve model VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket) are included

7.4

S0700 S0700 S0700 Body Ported Base Mounted Blanking plate assembly SS0700-10A-2/SS0700-10A-5 It is used by attaching on the manifold block for being prepared for removing a valve for maintenance reasons or planning to mount a spare valve etc. 40.5 40 2 B 4 A Applicable manifold Part no.

Soft Start-up Valve

size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/

Soft Start-up Valve

size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/

Rotary Actuator with Solenoid valve Ｃ ( Ｄ ) ＶＲＡ１＊＊＊３０～１００－＊＊Ｚ

Allowable voltage fluctuation is -15% to +5% of the rated voltage for 115VAC or 230VAC.

TS/TISA

Refer to pages 15-18-3 to 4 for Safety Instructions and Common precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 11 for Precautions on every series. Min. bending radius (mm) 12 15 23 27 31 60 12 15 23 30 40 Operating temperature 20 to +60C (No freezing) Nylon 11, Nylon 12 Material Caution 1.

AC Servo Motor Driver (CC-Link Type)

The highest value in the past 15 seconds is displayed relative to the rated torque of 100%. 0 to 400 % 14 Instantaneous torque Torque that occurred instantaneously is displayed. The value of the torque that occurred is displayed in real time relative to the rated torque of 100%. 0 to 400 % 15 Within one-revolution position Position within one-revolution is displayed in encoder pulses.

Servo Motor Controller (24 VDC)

Keep the input signal combination for 15 ms (30 ms if possible) or longer.(2) Refer to Positioning (P.40) 49 - The actuator goes out the stroke limit specified by the basic parameters, Stroke (+) and Stroke (-) if it performs the requested operation.

Series VCS

For sonic range Where P1 = 0.10132 (P2 + 0.1013) Formula based on Cv factor Q = 98.9Cv (P1 + 0.1013) kg/h Formula based on effective area Q = 5.5S (P1 + 0.1013) kg/h 1 5 20 3 4 20 1 0 30 40 30 20 40 20 30 30 40 20 50 60 60 50 40 30 20 3 4 30 40 50 Figures inside [ ] indicate the saturated steam holding heat (kcal/kg). Figures inside ( ) indicate the saturation temperature (C).

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

A B Insulation: Red (+) Manual override 2 x 3.2 (Mounting holes for manifold) 16.2 36 2 x 1/8" A (4), B (2) port (2 x 3.2 Mounting holes) (37) 44 (For E type) 0.3 mm2 (40.2) (36.7) 40 32.5 20.5 14.7 1.55 111.8 (1.2) (32.3) 109.1 L (11.7) (Lead wire length) 3 x 1/8" {P (1), EA (5), EB (3) port} 32.3 0.8 15 1.6 (20) EB P EA 32.5 10.5 2 x 2.2 (Positioning for manifold gasket) 27.2 (45) L plug

K35-OMW0030

20 250 450 30 200 15 320 350 30 530 40 68 8-6-4.