SZ3000

Stations Stations Scale: 37% [With external pilot] 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 17.8 16.2 17 36.7 34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 R 3 B 2 PE X A 4 A 4 A 4 A 4 A 4 P 1 A 4 A 4 A 4 A 4 P 1 A 4 2-One-touch fitting 2-One-touch fitting (P, R ports) Applicable tube O.D.: 8 (X, PE ports) Applicable tube O.D.: 6 2n1-M5

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

2..3 Byte swap 0: direct, 1: 16 bit, 2: 32 bit, 3: all 4..7 Reserved 0 0: Clear / PD Out valid 1: Hold 2: Clear / PD Out invalid 0..1 Fault output (IO-Link) 0: Clear 1: Hold 2: Force ON 2..3 Fault output (DO) 3 0: Clear / PD Out valid 1: Hold 2: Clear / PD Out invalid 4..5 Idle output (IO-Link) 0: Clear 1: Hold 2: Force ON 6..7 Idle output (DO) 0: 2 / 2 / 2 / 2 1: 4 / 4 / 4 / 4 2: 8 / 8 /

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Same surface) 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 With 1 pc. 70 75 80 85 90 10 With 2 pcs.

CG5-S

2 !1 i r !3 y o q u e !0 w Parts list Material No. 1 2 3 4 5 6 7 Description Material No.

OMU0023

(ii) Function codes to be used 03h / 10h (iii) Memory map Address Number of registers(Bytes) Details D0600 2 Alarm number of alarm entry 1 D0601 2 Alarm number of alarm entry 2 D0602 2 Alarm number of alarm entry 3 D0603 2 Alarm number of alarm entry 4 D0604 2 Alarm number of alarm history 5 D0605 2 Alarm number of alarm history 6 D0606 2 Alarm number of alarm history 7 D0607 2 Alarm number

IDX-OM-M050

Transportation and installation 2 . 1 Transportation . 2 1 2 . 2 Installation . 2 2 2. 2. 1 Environment . 2 2 2. 2. 2 Fixing of product . 2 3 2. 2. 3 Change of ventilation direction . 2 4 2. 2. 4 Pneumatic piping . 2 5 2. 2. 5 Draining piping . 2 5 2. 2. 6 Draining piping for condensed water . 2 6 2. 2. 7 Electric wiring . 2 7 2 . 3 Reinstallation of the product . 2 9 Chapter 3 Start and

VZ100/300/500

Internal pilot Series VZ100 Series VZ300 Series VZ500 4-6-2 3 Series VZ100/300/500 Precautions Be sure to read before handling.

VQZ1000/2000/3000

2 2 A A A 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5

IIIIIII

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8

Mechanical Valves Series NVM, NVFM, NVZNI

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8

Compact Manifold Regulator

Metric size Inch size Stations Symbol Elbow Straight Elbow Note) OUT side Mounting position IN side Straight 6 8 10 8 6 10 4 6 4 6 Elbow Straight Elbow Note) OUT side Mounting position IN side Straight 1 2 3 4 5 6 7 8 9 M 1 station 2 stations 3 stations 4 stations 5 stations 6 stations 7 stations 8 stations 9 stations 10 stations Fitting type Symbol Fitting type Symbol 1/4 5/16 3/8 5/16 1

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

2 !8 !7 !2 y o !1 !6 !5 u Parts list No. Description No.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

HRX-OM-R016

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-R016 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Electric

Micro Mechanical Valve Series VM1000

T.T. 6 2 x M20 x 1 Lock nut Thickness 6, Width across flats 27 Max. 10 Symbol 2 port 56 (A) 2 23 R port (3 port only) 52 33.5 12 10 1 (P) (108) 3 port (A) 2 22 13 12 10 32 1 (P) 3 (R) 16 * 0.5 MPa supply 2 x 1/4 2 x 5.5 mounting hole 30 25 F .O.F .* 56 N P .T. 3.5 mm O.T. 2 mm T.T. 5.5 mm 40 16 Series VM200 Series VM200 Toggle lever VM220-02-08A VM230-02-08A Panel mounting hole T.T. 6 2

VQ5000

Note 2) Refer to page 2-6-39 for details on external pilot specifications.

CL

2 !3 !4 !5 !6 !7 !8 !

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

HRX-OM-X010

See section 6.2 Troubleshooting in Chapter 6 Error Message and Troubleshooting on page 6-2 for alarm numbers and messages. 5.3.7 Menu screen POWER ON 1 2 3 Figure 5-9 Menu screen Table 5-7 Menu screen No.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

1u @7 @6 q!7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.