Microspeed Cylinder

x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 Female threads Rod end threads Male threads Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port JIS class 2 +1.0 0 mm M5 x 0.8 (10-32 nominal) M5 x 0.8 (10-32 nominal) 11 Clean Room Series Microspeed Cylinder Series 10-, 11-CM2X Series 10-, 11CM2X How to Order Clean room series 10 11 Mounting Relieving type Vacuum type

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

3 Port Solenoid Valve

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MXS Series Air Slide Table

60 Air Slide Table MXS Series Dimensions MXS 16 With shock absorber (16) MXS16BS, BT, B 19 A 10 37.5 37.5 18 18 55 (mm) Stroke adjustment range Retracting 5 10 20 20 15 20 20 20 A dimension (Retracted side mounting) Extending Model Shock absorber at retraction end Stroke 10 MXS16-10 MXS16-20 MXS16-30 MXS16-40 MXS16-50 MXS16-75 MXS16-100 MXS16-125 11 21 31 31 26 32 32 32 Shock absorber at

RSQ

, Chamfered, Roller 0.74 0.80 0.86 Double acting with spring loaded REC 40 Model C 5 D 40 48 53 55 60 65 60 65 70 75 80 85 75 80 85 Mounting bolt M3 x 45l M3 x 55l M3 x 60l M5 x 55l M5 x 60l M5 x 65l M5 x 60l M5 x 65l M5 x 70l M5 x 75l M5 x 80l M5 x 85l M6 x 75l M6 x 80l M6 x 85l Lever with built-in shock absorber 0.97 1.01 1.05 RSQB12-10 RSQB16-10 -15 RSQB20-10 -15 -20 RSQB32-10 -15 -20

CRQ2

(Example) For M4: L2 = 8 mm Applicable shaft types; S, W L1 L1 = L1 = Q1 = M Q1 = M Q1 = M Q1 = M L1 = L1 L1 = Q2 = M Q2 = M L2 = L2 = Q1 Q1 Size 10, 15 Size 20, 30, 40 Size 10, 15 Size 20, 30, 40 (mm) (mm) (mm) Size 10, 15 Size 20, 30, 40 Size Size Size 10 15 20 30 40 10 15 20 30 40 10 15 20 30 40 Thread Thread Thread M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M3

MK

C 8 8 8.5 8.5 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 X 50l M3 X 60l M3 X 50l M3 X 60l M5 X 75l M5 X 85l M5 X 75l M5 X 85l M5 X 85l M5 X 95l M5 X 75l M5 X 85l M6 X 95l M6 X 130l M8 X 100l M8 X 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50 PTo attach and detach

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

GB TT UU (Hexagon socket head plug) G NW GB 10 A N Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ (WW) M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) GB PP XX XX G Centralized piping type Centralized piping type 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom ported (Applicable O-ring) Y J M5 x 0.8 M6 x

XL

alloy Bellows: Stainless steel Seal: FKM (fluoro rubber) Principle materials Exterior: Hard anodized Interior: Machined for clean environment Surface treatment 0.4 to 0.7 (58 to 101psi) Actuation pressure MPa M5 (10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 15 17.5 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20 20.5 7 32 5 M3 x 0.5 11 32 10 3 M5 x 0.8 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 M4 x 0.7 20.4 39 Rc1/8 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

7 4 5 19 18 11 10 6 MVGQ 17.5 15 26 5 5 M3 x 0.5 14 26 6 2.8 M6 x 1 M5 x 0.8 10 7 25 15 12 8 CC 20.5 20 7 32 5 M5 x 0.8 M3 x 0.5 11 32 10 3 M8 x 1.25 14 10 28 20 14 12 RB 25 25 8 40 6 Rc1/8 M4 x 0.7 20.4 39 M10 x 1.5 14.5 2.5 12 12 15 34 25 11 J RG MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 PE RA RB RC RE RD RF SA SB SC PD DModel

CQM

10 10 2 pcs. 10 15 20 2 pcs. 5 10 15 15 20 20 15 32, 40, 50 32, 40, 50 5 15 10 5 1 pc. 10 10 20 1 pc. 5 5 10 15 15 20 15 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

35H9 10 26H9 86.7 71.4 56 22 158.1 130 12 5 3 7.5 32 28 18 11.5 72.9 20 (mm) J JA JB JC JD K NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5

High Vacuum Angle Valve, XL Series

alloy Bellows: Stainless steel Seal: FKM (fluoro rubber) Principle materials Exterior: Hard anodized Interior: Machined for clean environment Surface treatment 0.4 to 0.7 (58 to 101psi) Actuation pressure MPa M5 (10-32 nominal) Rc(PT) 1/8 XLA Actuation port size M5 (10-32 nominal) Ports P, R1/R2 Rc(PT) 1/8(Port P): M5(10-32 nominal) Ports R1/R2 XLAV 0.05 0.06 0.09 0.11 0.3 0.35 Actuating

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

27 27 32 41 0 0 0 10 10 10 10 10 26 31 38 47 58 72 89 110 15.5 19.5 19.5 27 32 32 37 37 93 93 95 87 102 102 122 122 5 6 6 8 11 11 13 16 6 8 10 14 18 18 22 26 20 25 32 40 50 63 80 100 Up to 200 201 to 1500 18 22 22 30 35 35 40 40 24 29 35.5 44 55 69 86 106 7 7 7 9 10 10 10 10 0 0 0 23 23 20 20 20 163 173 175 187 218 218 264 264 35 40 40 50 58 58 71 71 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8

Slider Type/Ball Bushing Bearing

Guide Number of auto switches 10 Bore size (mm) Symbol 15 20 25 32 Nil S n 2 pcs. 1 pc. n pcs. 1 axis 2 axis Nil T Auto switch Bore size Nil Without auto switch (Built-in magnet) 10 15 20 25 32 Port thread type 10 mm 15 mm 20 mm 25 mm 32 mm For the applicable auto switch model, refer to the table below.