Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Bottom Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None, Operation Manual: w/o Operation Manual

Rated Vacuum Range: -101 to 0 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Operation Manual: -

Rated Vacuum Range: -100 to 100 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: None, Operation

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: w/o Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N02 [NPT1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount

2-Color Display High Precision

OUT OUT 1 1 R1/8, NPT1/8 (With M5 female thread), Rc1/8, G1/8, M5 female thread 4, 6 one-touch fitting Piping OUT OUT 2 2 Features 1 2-Color Display High Precision Digital Pressure Switch How to Order Series ZSE40A(F)/ISE40A Rated pressure range ISE40A 14.5 to 145.0 psi ISE40A 01 X P For positive pressure For vacuum/ compound pressure ZSE40A 01 Y P Made to Order Specifications/Description

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

Digital Flow Monitor

Common setting Output mode Hysteresis mode Switch operation Normal output Set value (P) 80 Hysteresis (H) 30 Initial setting Zero cut-off setting CUt: 1.0 (displays 0 for a value below 30 L/min) Switch ON point 80 L/min or more Switch OFF point Below 50 L/min Change the zero cut-off setting. The set value (P) and hysteresis (H) cannot be changed.

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

GR-S-010(10g) GR-S-020(20g) 6 - R/L side parallel type LEKFS16 18 26 25 Component Parts No. Description Material Note No.

Digital Flow Switch (Remote type sensor unit)

K S Model PF3W504S--T 115 50 81.2 69.5 67.5 PF3W520S--T 123 54 85.2 73.5 71.5 PF3W540S--T 153 71 105.5 90 89 -45No.PF-OMN0010-J PF3W511-U25/PF3W521-U30 (Vinyl chloride piping) Piping port A B D E F J K L N P Q 25 A 154 46 77 57.6 23 77 63 28 18 3.5 depth 14 32 32 A 146 56 91 71.6 28.5 73 60.5 25 27.5 3.5 depth 14 38 Bracket dimensions Piping port S T U V W Y Z 25 A 59 36 48 58 70 7 2 -46No.PF-OMN0010

lVFl 10

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solens 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

High-precision Digital Pressure Switch ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 35 mA or less Protection Polarity protection Display accuracy 2%F.S.1 digit (at ambient temperature 253 oC) Accuracy Repeatability 0.5%F.S. Temperature characteristics (25 oC standard) 5%F.S. Output type Select from NPN or PNP open collector output.

End Lock Cylinder Series CBG1

Non-lube type Type Air Fluid 1.5MPa Proof pressure 1.0MPa Maximum operating pressure 0.15MPa Minimum operating pressure Without auto switch: 10C to 70C (with no freezing) Ambient and fluid temperature With auto switch: 10C to 60C (with no freezing) Pulling force Stroke (mm) Bore size (mm) Piston speed 50 to 700mm/s 50 to 1000mm/s Thread size N st + 1.4 0 to 1000 mm Stroke length tolerance

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | Solens 'r io vAc 3 _ KYPS" 4-2mVAC E l{vF 1100-oc{17 @io.rg None F Foot Bracket --R(PT),Mekic' T NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

S Couplers

IDK Fluid: Water, Air Operating temperature range: 5 to 150C Note) This product should not be used with steam. 341 KKA Series Plug (P) Socket (S) Part no. Male thread type Male thread type Body size Body size Part no.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

SU) S 2 YA View With internal shock absorber MSQAR MSQBR High precision type MSQAA 11221122DA M5 x 0.8 depth (Vacuum suction port) 1122DB DC (HD) HB HA HE (Max.

60

H S U P EXH. H S EXH. U H S P U P G H F SUP. SUP.

Serial Network

(U, D)-SCS1 EX124 (U, D)-SCS2 EX140-SCS1 EX140-SCS2 EX120/121/122-STA1 EX123(U, D)-STA1 IN313-TA1 N N Y Y 16 8 16 8 16 8 16 16 16 16 8 16 8 0 0 0 0 0 0 0 0 0 0 0 0 0 VQ, SX, SY & SV VQ2000/4000/5000 CompoBus/S OMRON N N N Y SQ1000/2000, SZ3000/5000 VQ, SX, SY & SV VQ2000/4000/5000 (N)VFR/S, (N)VZS, ISO SYSBUS N EX120/121/122-SSL1 N VQ, SX, SY & SV EX120/121/122-SSL2 N S-Link SUNX EX123 (