Base Mounted Wiring: 01CD (Base Mounted Plug-in w/Multi-connector on D Side), Stations: 05 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 05 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: T (NPTF)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 05 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4)

Base Mounted Wiring: 01FD (Plug-in w/D-sub Connector on D Side), Stations: 05 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 06 (3/4), Thread: N (NPT)

Base Size: 5 (3/4), Piping: 0 (P Side) (A, B Side) (E Side), Stations: 5 Stations, Base Specifications: 1 (Common Exhaust), A, B Port Size: 04 (1/2), Thread Type: N (NPT)

Base Size: 5 (3/4), Piping: 0 (P Side) (A, B Side) (E Side), Stations: 5 Stations, Base Specifications: 1 (Common Exhaust), A, B Port Size: 04 (1/2), Thread Type: T (NPTF)

Base Mounted Wiring: 01 (Plug-in, Insert Plug w/Lead Wire), Pilot Type: Internal Pilot or None, Junction Cover: Separate Junction Cover or None, Stations: 5 Stations, Passage: 1 [P and EA,EB: Common, Port A,B: Side (Type 20/30, Port A,B: Top)], Port Size: 01 (1/8), Thread: N (NPT)

Series: 5 (VP500), Exhaust Type: 41 (Common Exhaust), Pilot Type: R (External Pilot), Stations: 5 Stations, Symbol: 1, Port Size: 03 (3/8), Thread Type: N (NPT)

Base Mounted Wiring: 10 (Non Plug-in Individual Lead Wire Entry), Stations: 5 Stations, Passage: 1 (P: Common, EA,EB: Common, Port A,B: Side), Port Size: 04 (1/2), Thread: T (NPTF)

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

VFM300

-02-08 VM-30CR VFM350-02-30R Push button (Mushroom) Black Green Yellow VM-30CB VFM350-02-30B VM-30CG VFM350-02-30G VM-30CY VFM350-02-30Y Red VM-32CR VFM350-02-32R Manual operation Push button (Extended) Black Green Yellow VM-32CB VFM350-02-32B VM-32CG VFM350-02-32G VM-32CY VFM350-02-32Y With a set of red, black, green, yellow VM-33C VFM350-02-33 Push button (Flush) Red VM-34CR VFM350-02-34R

Speed Controller with Indicator

30.2 (30.3) 23 (24) AS221FS-02-03 (S) 5/32" 8.2 AS221FS-02-07 (S) 1/4" 11.2 23.4 32.7 (32.8) 24 (24) AS221FS-02-09 (S) 5/16" 13.2 23.9 33.2 (33.3) 14.2 24 (25) AS221FS-02-11 (S) 3/8" 15.5 26.4 35.7 (35.8) 15.6 25 (26) AS321FS-02-07 (S) 1/4" 3/8 19 11.2 16.6 21.8 32.1 36.4 63.1 61.7 57.9 56.5 13.3 24.5 28.5 9.3 19.2 47 (48) AS321FS-02-09 (S) 5/16" 13.2 22.7 33 14.2 AS321FS-02-11 (S) 3/8"

Clean Gas Filter

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 NPT 1/ 4 (Female

2/3 Port Valve

-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360-03 VX2260-04 VX2360-04 2.0 1.5 2.0 1.5 1.5 1.5 1.0 1/8 (6A) 0.9 0.5 1.1 0.6 0.5 0.5 1.0 Construction/Components 260 0.4 0.2 0.45 0.2 0.2 0.15 0.45 2.0 1.5 2.0 1.5 1.5 1.5 1.0 Water oil air 3.0 Steam 1.0 VX21/22/23 (Orifice

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

EA EB P M5 x 0.8 62.8 107.2 [111.6] (Lead wire length) G: Approx. 300 H: Approx. 600 (Pilot EXH port) 22 50.6 [57.6] 9.5 18 18 28 (P, EA, EB port) 1/4 56 L plug connector (L): 10-SY5240(R)-L-02 M plug connector (M): 10-SY5240(R)-M-02 DIN terminal (D, Y): 10-SY5240(R)-02 M8 connector (WO): 10-SY5240(R)-WO-02 D Y Applicable cable O.D. 3.5 to 7 (Lead wire length) 127

VQZ1000/2000/3000

AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 2-7-5.

Series SV

-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions

ZP3

L N S U F GN GS 02 13 5.5 2 KQ2H02-M3G Width across flats K ZP3 T 015 02 035 U J K 3 6 1.2 04 14.5 8 4 KQ2H04-M3G J Dimensions Per Vacuum Inlet: Barb Fitting Model J K Fitting part min. hole size Fitting part no. Vacuum inlet direction q Pad dia.

SX

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

VZS

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position