Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

Note 2) This filter does not include any companion flange, companion flange bolt, and O-ring. 4 x K depth L DRAIN (): Internal dimensions for FH342 type (mm) Model Weight (kg) d A B C D E F G H J J' K L M N P Q Threaded Rc Flange SSA FH340-03 FH340-04 FH342-06 FH342-08 FH34 -10 FH34 -12 FH341-16 FH440-03 FH44 -04 FH44 -06 FH44 -08 FH44 -10 FH44 -12 FH441-16 FH441-20 FH441-24 FH540-03 FH54

Fluoropolymer Piping Equipment

Applicable tubing size (inch) 1/8" x 0.086" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" LVN Size Size Symbol Symbol 1 2 3 4 5 6 03 04 06 08 10 12 19 25 03 07 11 13 19 25 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQHB LQHB 1 1/8" TL TIL 2 1/4" 3 3/8" TLM TILM 4 5 6 1/2" 3/4" 1" TD TID TH TIH Note) For details of the applicable tubing sizes, refer to page 945. Specifications Piping 1.

VQZ1000/2000/3000

PE port 18 18 Rc 1/4, 3/8 1(P) port (For Rc 1/4) (For Rc 1/4) 2-Rc 1/4, 3/8 3(R2), 5(R1) port 21 21 M5 x 0.8 external pilot port (Only external pilot type (R)) (For Rc 3/8) (For Rc 3/8) 33 L plug connector (L): VQZ3150 1(R)-L-02 03 DIN terminal (Y): VQZ3150 1(R)-Y-02 03 Indicator light 300 108.5 (Lead wire length) 72 Cover diameter 1.5 Cross section 0.23 mm2 Pg.7 111.5 Max. 10 Applicable

Prevents Micro-Bubbles

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Booster Regulator/Air Tank

SRH VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer SRP G N S L G36-10-01 AN30-03 ANA1-03 KT-VBA22A-7 AN30-03 ANA1-03 G36-10-01 AN40-04 ANA1-04 G27-20-01 AN40-

AW

-X425 Proof pressure (MPa) 3.0 Maximum operating pressure (MPa) 2.0 Set pressure range (MPa) 0.1 to 1.6 Ambient and fluid temperature (C) 5 to 60C (with no freezing) Applicable Model Model AW20 AW40 AW40-06 AW60 1/8, 1/4 AW30 AW30-03-2-X425 Port size 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 30 AW X425 2 03 BG Option/Semi-standard: Select one each for a to f.

5 Port Solenoid Valve Series VQZ1000/2000/3000

72.8 + + 57 41.6 26.5 2 x PE port 20.5 20.5 14 X 12 Y 13.5 11.5 M5 x 0.8 (Not used) 21 (18) 21 (18) M5 x 0.8 (External pilot port) 33 1/4, 3/8 [1(P), 5(R1), 3(R2) port] 66 ( ): VQZ325-G1-02 L-type plug connector (L): VQZ325 (R)-L10 1 02 03 DIN terminal (Y): VQZ325 (R)-Y10 1 02 03 136.8 [141.2] Approx. 300 (Lead wire length) 57 [64] 152.6 Max. 10 Applicable cable O.D

Hand Valve Series VH 1

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

Hand Valve Series VH

3 (R) 4 3 3 (Exhaust center) VH301-02, 03 VH311-02, 03 Rc1/4: 17(0.9) Exhaust center 2 (Position) VH302-02, 03 VH312-02, 03 2 1 (A) 2 (B) 4 VH3 1/4, 3/8 0.71 3 (Closed center) VH320-02, 03 VH330-02, 03 Rc3/8: 20(1.1) 1 (P) 3 (R) 3 (Exhaust center) VH321-02, 03 VH331-02, 03 2 (Position) VH322-02, 03 VH332-02, 03 12 3 4 3 (Closed center) VH400-02 to 06 VH410-02 to 06 Rc1/4: 45(2.5) 4 3 3 (Exhaust

Hand Valve Series VH

-02/03 3 (Exhaust center) Rc 1/4: 17 VH302-02/03 VH312-02/03 2 (Position) 1 (P) 3 (R) 2 1 VH3 0.71 1/4, 3/8 VH320-02/03 VH330-02/03 3 (Closed center) Rc 3/8: 20 Exhaust center VH321-02/03 VH331-02/03 3 (Exhaust center) (A) 2 (B) 4 VH322-02/03 VH332-02/03 2 (Position) 12 3 4 VH400-02 to 06 VH410-02 to 06 3 (Closed center) 1 (P) 3 (R) Rc 1/4: 45 4 3 VH401-02 to 06 VH411-02 to 06 3 (Exhaust

IR1000/2000/3000

Conditions: Supply pressure 0.7MPa Set pressure 0.2MPa Flow rate 0 l/min (ANR) IR3000-03 IR3000-03 IR3000-03 Conditions: Supply pressure 0.5MPa Conditions: Back pressure 0.5MPa 0.204 0.5 0.2 Set pressure P2 MPa Set pressure MPa Set pressure MPa 0.202 0.4 Setting point 0.15 0.200 0.3 0.1 0.198 0.2 0.196 0.05 0.1 0.194 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500 3000

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L plug connector (L): VQZ315 (R)lLl 0 1 02 03 DIN connector (Y): VQZ315 (R)lYl VQZ Indicator light 107.5<108.5> 300 VQD (Lead wire length) 71<72> VZS Pg.7 VFS MAX.10 111.5 56.5<60> Applicable cord O.D. 3.5 to 7 VS Indicator light Cover diameter 1.5 Cross section 0.23mm2 VS7 < >: AC 86 78.5 0 1 02 03 M plug connector (M): VQZ315 (R)lMl 60.5 Cover diameter 1.5 Cross section 0.23mm2 (Lead

E-P HYREG ® Series VY1

Nijverheidsstraat 20 B-2160 Wommelgem Belguim TEL: 03-355-1464 FAX: 03-355-1466 TAIWAN SMC Pneumatics (Taiwan) Co.,Ltd. 17, Lane 205, Nansan Rd., Sec.2, Luzhu-Hsiang, Taoyuan-Hsien, TAIWAN TEL: 03-322-3443 FAX: 03-322-3387 POLAND SMC Industrial Automation Polska Sp.z.o.o. ul.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Example PSS5YJ5-20-03 1 pc. (Manifold base) SYJ5120-5G-M5 2 pcs. (Valve) SYJ5000-21-1A 1 pc. (Blank plate ass'y) PSS5YJ5-43-03-C4 1 pc. (Manifold base) SYJ5140-5LZ 1 pc. (Valve) SYJ5240-5LZ 1 pc. (Valve) SYJ5000-21-1A 1 pc.

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Nijverheidsstraat 20 B-2160 Wommelgem Belguim TEL: 03-355-1464 FAX: 03-355-1466 TAIWAN SMC Pneumatics (Taiwan) Co.,Ltd. 17, Lane 205, Nansan Rd., Sec.2, Luzhu-Hsiang, Taoyuan-Hsien, TAIWAN TEL: 03-322-3443 FAX: 03-322-3387 POLAND SMC Industrial Automation Polska Sp.z.o.o. ul.

Precision Regulator

Supply pressure: 0.3 to 1.0 MPa Set pressure: 0.2 MPa Flow rate: 0 L/min (ANR) IR3000-03 IR3000-03 IR3000-03 Supply pressure: 0.5 MPa Back pressure: 0.5 MPa 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) Set pressure (MPa) 0.202 0.4 Set point 0.15 0.200 0.3 0.1 0.198 0.2 0.196 0.05 0.1 0.194 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500 3000

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

-06SK 17 39.3 27.8 6 12.8 57 KE AS32 1FE-03-08SK 18.5 41 29.5 8 15.2 60 14 19 R 3/8 46.5 51.5 51.7 56.7 23 19.8 AS32 1FE-03-10SK 21 43.3 31.8 10 18.5 62 AS-FG AS32 1FE-03-12SK 22 44.3 32.8 12 20.9 64 AS42 1FE-04-10SK 21 47.9 33.6 10 18.5 103 AS-FP 17 24 R 1/2 51.5 56.5 58.8 63.8 24.5 28.6 AS42 1FE-04-12SK 22 49.5 35.2 12 20.9 105 Note 1) Reference dimensions Note 2) Reference dimensions of

Compact Cylinder with Air Cushion

YA-03 Joint. YU-03 Joint part no. RS M W V T2 Applicable mounting bracket Bore size (mm) Weight (g) Joint 2D through 2O counter bore T1 B E J A type mounting bracket B type mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Carbon steel (nickel plated) mm 80 YU-08 YA-08 YB-08 90 100 YU-10 YA-10 YB-10 160 Bore size (mm) Part no.

Precision Regulator Series IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 l/min (ANR) IR3000-03 IR3000-03 IR3000-03 Supply pressure: 0.5 MPa Back pressure: 0.5 MPa 0.204 0.5 0.2 Set pressure P2 (MPa) Set pressure (MPa) Set pressure (MPa) 0.202 0.4 ARJ Set point 0.15 0.200 AR425 to 935 0.3 0.1 0.198 0.2 AMR 0.196 0.05 0.1 ARM 0.194 ARP 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 500 1000 1500 2000 2500