Gun Type Ionizer

Parts Description w r LED indicator q No. Description Contents q Nozzle Discharge ionized air w Slide cover Protective cover for the mode setting switch e Mode setting switch Switch for setting blow and trigger (Default setting: Set no. 0) e r Flow adjustment knob (With indicator) Turn the knob to adjust the flow rate.

VT317

Component Parts Operation principles Spool valve w is pushed upward by the return spring e, port P is closed, and port A and port R are opened. Caution 1. Since this valve has slight air leakage, it can not be used for vacuum holding (including positive pressure holding) in the pressure container. Specifications different from standard are as follows.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT 1/8 NPT 1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) {Nl/min} Flow rate 38 7 12 Controlled flow Effective area mm 0.6 0.1 0.2 l/min (ANR) {Nl/min} 420 Flow rate 105 280 Free flow 6.5 1.6 4.3 Effective area mm Note) Flow rates are values measured with

IR1000/2000/3000

Standard part number X1 Clean room specifications Specifications Non-grease specifications Cleanliness Bleed port Class 10 With M5 fitting (applicable tube O.D. 6) Manifold Specifications (except type IR2120 and series IR3000) 6 IR1000/2000: M5 fitting (applicable tube O.D. 6) IR3000: Rc(PT) 1/2 female thread EXH port Grease Teflon grease 2 to 8 station manifold type regulators.

E,R.L.

:llv thn alphabtic:lly (Ex.: 27N.40(40/,m), 2N R Body g Port orl.d.--64, r NNFT Construction./Parts List Main Parts Parts List 1 1074-58 1 1 1 1r 1 636 NC4otr r 1185 l t l Series NAF Air Filter Float Type Flow Characteristics NAF5OOO N.O tvpe/ NAD44 With no pressure inside the bo!

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

0 Section AA' @0 u @8 r y !6 @3 @4 e !7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !

Fluoropolymer Tubing Variations

0.4 0.1 0.05 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Operating temperature C How to Order 1.2 Metric size Max. operating pressure MPa D 20 TLM0425 N 1.0 0.8 E Tubing designation Length per roll Symbol 10 20 50 100 2S 0.6 F Type Length 10 m 20 m 50 m 100 m 2 m 0.4 Color indication G Roll Symbol N R BU B Color Translucent (Material color) Red (Translucent) Blue (Translucent) Black

Single Axis Electric Actuator Serriies LJ1S Slider Guide

W Axial Right F R L T B Cable length Left Top 2m 3m 4m 5m 2 3 4 5 Motor specification Standard motor Matsushita Electric Industrial Co., Ltd.

CE2

r t y u i o !

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock 47 Programless Controller (With Stroke Study) Series LECP2 LEMB LECP2 LECP1 LECP6 LEC-G LEMC LEMH/HT Model Selection Specific Product Precautions Controller Details e r No. Display Details Description t Power supply ON/Servo ON : Green turns on.

VXZ

, NBR u Stainless steel, NBR r Stainless steel i o !

Title not found

Plug conneclor (l Loosen the Phillips head machine screw using a Phillips type scfewdriver 10 remove lhe plate 6 ; ' 6 9 ] 0 : O After exchanging connectors in desired posilions. re affix the plate with a Phillips type screwdriver to the case. (* i l r (Flf -.-.r--r ll U,F* [ tL_ -T Plate r connector Rectanoular lilulti-Connector Series KDM Separation Loosen the clamp bolt to separate the

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

Safety Instructions

Leakage voltage Particularly when using a resistor in parallel with a switching element and using a C-R element (surge voltage suppressor) to protect the switching element, take note that leakage current will flow through the resistor and C-R element, etc., creating a danger that the valve may not shut OFF.

AN

valve Measurement distance: 1m R(PT) R(PT) M3 M5 1 8 1 8 Port size Fluid Noise reduction dB(A) 16 21 13 18 Compressed air Max. operating press Ambient and fluid temperature 1.0MPa 5 to 50C Effective area (mm2) Weight (g) Dimensions (mm) 20 35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Note) NPT thread for AN101 and AN110 is alsoavailable.

Digital Gap Checker

Spacer 1 Stations Part no. 2 ISA-16-2 3 ISA-16-3 4 *1 ISA-16-4 5 ISA-16-5 6 *1 ISA-16-6 w Seal for extra station ISA-15 e Threaded plug with seal ISA-12-m 1 pc. Piping Part no. Rc1/8 ISA-12-A G1/8 ISA-12-C q Joint screws (2 pcs.) ISA-161 e Threaded plug with seal ISA-12*1: Spacers are included for 4 and 6 stations. Bracket ISA-14 DIN rail ISA-5-m L Stations Part no.

Compact End Lock Cylinder Series CBQ2

non-locking type manual release ( ) MO I HR HN D M Z E K 2P (port size) M Q Q End lock mechanism dimensions (mm) B + Stroke L J E Bore size (mm) HN (Max.)

Electric Actuator with Integrated Guide Series LTF

F G LTF 6 100 R 2 X10 Motor specification Lead screw lead Series Series 6 Nil X10 Standard motor F H L 6 8 6mm Cable length Non-standard motor 10mm Series 8 2 3 4 5 2m 20mm Motor specification 3m Motor output Standard motor Nil G R Y 4m Brake Matsushita Electric Industrial Co., Ltd. 5m Nil K None E F 100W Mitsubishi Electric Corporation Switch specification Yasukawa Electric Corporation 200W

Thermo-chiller

: 32C, w Circulating uid: Tap water, e Circulating uid ow rate: Rated ow, r Power supply: 200 VAC 4 q Ambient temperature: 32C, w Circulating uid: Tap water, e Circulating uid temperature: CH1 20C/CH2 25C, r Load: Same as the cooling capacity, t Circulating uid ow rate: Rated ow, y Power supply: 200 VAC, u Piping length: Shortest 5 With the pressure control mode by inverter.

Air cooled Thermo-con (Compact type)

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice. ii HEF002-A6 Contents Contents 1 PREPARATION FOR COMMUNICATION -1-1 2 OPTIONS OF COMMUNICATION METHOD -2-1 2.1