Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

S n Nil 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm Auto switch 10 16 20 25 32 40 Without auto switch (Built-in magnet) Nil Open/Close stroke (mm) Symbol Bore size 40 100 160 200 10 16 20 25 32 30 60 80 40 80 100 20 40 60 50 100 120 70 120 160 Nil 1 2 Copper, fluorine and silicone-free + Low particle generation 22 Vacuum suction type Action Port thread type

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 12-REA63 Note 1) Stroke exceeding the standard stroke but below the maximum manufacturable stroke is available as special orders.

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

(Nil) Cylinder stroke (mm) Model Lubrication Action Effective cushioning stroke (mm) Bore size (mm) 20 25 32 40 20 25 32 40 Standard stroke (mm) Auto switch mounting Cushion Port size Model 10-REC20 10-REC25 10-REC32 10-REC40 11-REC20 11-REC25 11-REC32 11-REC40 Relief type Vacuum suction type 150 to 700 45 1/8 200 to 1000 150 to 1000 60 50 Air cushion 1/4 Double acting Non-lube (Both sides

CVJ3

DC specifications AC specifications (50/60 Hz) Magnet installed even without auto switch 1 2 3 4 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Auto switch mounting Rail mounting style Band mounting style Symbol A B Example Rail mounting style Band mounting style CDVJ5B15-60-A CDVJ5B10-45-B For the applicable auto switch model, refer to the

FH99

(Including O-ring for element) FH FH With relief valve Without relief valve Model Element size 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) HOW FH990-04/06 FH990-08/10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28/32 65 x 90 82 x 133 104 x 177 104 x 177 132 x 212 132 x 212 155 x 193 EM520-105N EM620-105N EM720-105N EM820-105N EM920-105N

FHIA

HOW Replacement Element Part No. 74 m (200 mesh) 105 m (150 mesh) 149 m (100 mesh) Element size Port size (Nominal size) 04 (1/2B) 06 (3/4B), 08 (1B) 10 (1 1/4B), 12 (1 1/2B) 16 (2B) 20 (2 1/2B), 24 (3B) 28 (3 1/2B), 32 (4B) 65 x 90 85 x 110 100 x 160 120 x 180 140 x 200 180 x 260 EM001H-074N EM101H-074N EM201H-074N EM301H-074N EM401H-074N EM501H-074N EM001H-105N EM101H-105N EM201H-105N EM301H

HAA

Symbol Description Port size Nil Symbol Size Applicable model D Auto drain F Dust-protecting filter S Mounting bench 3 4 06 Rp socket 10 1B union 14 1 union HAA7 HAA15 HAA22, 37 1 2B Source voltage Symbol Voltage Applicable model 1 2 3 Single phase 100 VAC Single phase 200 VAC Three phase 200 VAC HAA7, 15 HAA7 HAA15, 22, 37 How to Calculate Outlet Air Temperature Outlet air temperature can

Thermo-chiller/

Pipe thread type Nil Rc F G (With Rc-G conversion tting set) N NPT (With Rc-NPT conversion tting set) Power supply Single-phase 200 to 230 VAC (50/60 Hz) 9 A

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Also, when exceeding the air cushion stroke ranges on page 1346, the piston speed should be 100 to 200 mm per second. Note 2) The piston speed is 100 to 1000 mm/s for centralized piping. Note 3) Use at a speed within the absorption capacity range. Refer to page 1346.

Thermo-chiller

INFORMATION Thermo-chiller Air-cooled 460 V Type Standard Type (Pending for UL Standards) How to Order HRS 200 A 46 S Option Cooling capacity Nil None A With caster adjuster-foot 200 20.5 kW Cooling method A Air-cooled refrigeration K1 With uid ll port Pipe thread type 1 This is a manual fluid fill port that is different from the automatic fluid fill port.

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

/200 to 208 VAC 10% Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 10 15, 30, 45, 60, 75, 100, 125, 150 400 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 400 Symbol Specications -XAl Change of rod end shape -XC3 Special port location -XC9 Adjustable stroke cylinder/Adjustable retraction type Note 1) Manufacture of intermediate strokes at 1 mm intervals is possible.

Refrigerant R407C (HFC) Series IDF100FS/125FS/150FS Applicable Compressor Size: 100 kW, 125 kW, 150 kW (Max. inlet air temperature: 140°F (60°C) (Max. ambient temperature: 113°F (45°C)

Heat exhausting direction Voltage Symbol Description Nil Heat exhaust from the rear 1 Heat exhaust from the right Note) Symbol Voltage 30 Three-phase 200 VAC (50 Hz) 200/220 VAC (60 Hz) 2 Heat exhaust from the left Note) 3 Heat exhaust from the top Note) Note) The combination of 1, 2 and 3 is not available. (Heat exhausting face can be specied on one side only.)

NAMUR Interface 3 Port Solenoid Valve VFN200N Series [Option]

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual

SYJ300

DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Bracket Nil: Without bracket F: With bracket AC (50/60 Hz) 3 port 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, DC voltage is only available. Type of actuation Bracket 1 2 Normally closed Normally open (For manifold type 20, 20R) Bracket is mounted.

Clean Air Filter SFD Series

SFD100/200 AMG SFD200 only AFF Rc 1/4 NPT 1/4 G 1/4 Female thread SFD100/200 AM Different diameters for IN and OUT ports are Made to Order. For details, refer to page 326. AMD Relationship between Operating Temperature and Max.

V100

Rated voltage For DC 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC B: Locking slotted For AC (50/60 Hz) 1 2 3 4 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] Electrical entry 24 V, 12 V, 6 V, 5 V, 3 VDC/100 V, 110 V, 200 V, 220 VAC Grommet L plug connector M plug connector Indicator light and surge voltage suppressor G: 300 mm lead wire L: With 300 mm lead wire M: With 300 mm lead wire

5.0 MPa Pilot Operated 2 Port Solenoid Valve Series VCH40

5.0 MPa Pilot Operated 2 Port Solenoid Valve Series VCH40 How to Order Valve type 1 D G VCH4 1 06 Voltage N.C. 1 2 3 4 5 6 100 VAC 200 VAC Thread type (Conforming to ISO1179-1 on the pneumatic/hydraulic G thread) 110 VAC 220 VAC 1 24 VDC Port size 2(OUT) 1(IN) 12 VDC 06 10 3/4 Consult with SMC for other voltages. CE marking compliant products are only available with 50 VDC or less.

Coolant Valve Series SGH

NBR FKM Pressure range 0 to 7 MPa Rc G (ISO1179-1) NPT NPTF 3/8 1/2 3/4 1 Nil G N T Y u Pilot valve o Electrical entry T: Conduit terminal D: DIN terminal (Pitch between the terminals: 11 mm) W: M12 connector (4-pin type) Note 2) V: M12 connector (5-pin type) Note 3) DO: DIN terminal without connector Note 1) V116 i Rated voltage 1 2 3 4 5 6 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC [115