VXH

Material C37 Note Bonnet Body 2 3 C37 Epoxy mold Coil assembly Core assembly Class B insulation 4 Stainless steel, Cu 5 Stainless steel, NBR Armature assembly Diaphragm assembly Return spring Retainer Upset bolt Bracket Wave washer Name plate O-ring Terminal assembly Seal 6 Stainless steel, NBR 7 Stainless steel 8 Stainless steel 9 Stainless steel 10 SPC Option 11 Stainless steel 12 AL 13 NBR 14

Slit Valve

gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM, Kalrez 4079 (Option) Seal material Bellows AM350 Gate A6063 Main material of vacuum part Body A5052 Bonnet A5052 Others Stainless steel 304 Exhaust direction Free Mounting direction Vertical Port size M5 x 0.8 Rc 1/8 End-lock mechanism With lock mechanism at opening/closing position Note 5) Cylinder volume (L) 0.12 0.2 Non-cassette type 8 14

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

L ZY O L ZF G H F ZP K J SP ZCUK B C E D I A 2 x 4.5 AMJ AMV AEP HEP Related Equipment A B C D E F G H I J K L Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC051-01 ZFC051-03 58.5 12.75 12.75 2 3.2 33 25 10 10.5 10.5 12 8.5 13.75 4 58 12.5 12.5 1/8" 5/32" ZFC100-04 4 ZFC100-06 6 30 10 18 11.6 19.5 23 20 29 53.2 9.1 14.1 ZFC101-03 5/32" ZFC101-07 1/4" ZFC200-06 6 ZFC200-08 8 34 14 22 15.6 23.1 27

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

Recommended tightening torque Unit: Nm Connection thread 3/4 28 to 30 1/8 7 to 9 1/4 12 to 14 3/8 22 to 24 1/2 28 to 30 1 36 to 38 Torque 1939 Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes (Double Action Type) Series VHS4510/5510 Model When in the exhaust position, the valve may be padlock secured. This prevents erroneous operation.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Note 2) (Max EB) Note 3) 5 9 2.4 25 (Max EA) 1.4 32 5.5 (mm) Size EA EB HA 6.6 CRJU05 CRJU1 5.6 33.8 6.5 3.1 5.6 35.8 7.5 (mm) Size Rotating angle 90 A BA BB BC BD BE BF BG BH BI CA CB D DD J JA JB JC JD H N Q S SD UU W 21.5 32.4 43 CRJB05 19.5 30 9.5 11 6.5 3.5 17.1 20 7 5.5 5g6 10h9 M4 x 0.7 5.8 3.5 M4 x 0.7 5 14.5 12.5 13.5 3.4 28 4.5 180 27 43.4 54 90 24 37.4 48 CRJB 1 23.5 35 12.5 14

1

MHS2 2 finger 20-MHS3 3 finger 20-MHS4 4 finger Wedge cam operation slide guide air gripper Series MHK Standard type 20-MHK Wide opening air gripper Series MHL Standard type 20-MHL2 180 angular style gripper Series MHW 20-MHW2 Standard type 180 angular style gripper Series MHY Standard type 20-MHY Rotary gripper Series M(D)HR Standard type MHR2 Nominal size 10, 15 MDHR2 With auto switch 12-14

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP 44 73.5 HL 38.6 64.9 HI 23 39 HG 8.5 19 HB 8.5 19 HA 19.5 39 H 45 75 G 6.5 8.5 F 12.5 25 EK 4 6 ED 9.5 13 E 4H9 6H9 B 9.5 14

08-cm2r-e

.: GR-S-010 (10 g) 14 A

10-my1h-z-e

NBR No. 8 Rod seal 1 Piston seal 9 KB00217 KB00217 KB00217 1 NBR O-ring 12 KA00037 KA00037 KA00037 1 NBR O-ring 14 KA00048 KA00048 KA00048 2 NBR Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 96

Series: NCA1 (Standard), Mounting: X (MP1, Double Rear Clevis), Bore Size: 600 (6" - Large Bore), Stroke: 1400 (14")

Magnet: D (Built-in), Mounting: L (Foot), Cushion: A (Air Cushion), Bore Size: 63 (2 1/2"), Stroke: 1400 (14")

Magnet: D (Built-in), Mounting: U (MT1, Rod Trunnion), Bore Size: 400 (4"), Stroke: 1400 (14"), Air Cushion: Both Ends (Air Cushion), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC35 (with Coil Scraper)

Series: NCA1 (Standard), Mounting: R (MS4, Side Tapped), Bore Size: 325 (3 1/4"), Stroke: 1400 (14")

Magnet: D (Built-in), Mounting: U (MT1, Rod Trunnion), Bore Size: 250 (2 1/2"), Stroke: 1400 (14"), Air Cushion: Both Ends (Air Cushion), Adjustment Range: B (0 to 2"), Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), X Option: XC9 (Adjustable Stroke, Retraction Type)

Magnet: D (Built-in), Mounting: E (Double End), Bore Size: 088 (7/8"), Stroke: 1400 (14"), Cushion: C (Urethane), Auto Switch: None, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Temperature Option: Standard, Stainless Steel Option: X6009 (All Stainless Steel)

Series: NCA1 (Standard), Mounting: F (MF1, Front Flange), Bore Size: 400 (4"), Stroke: 1400 (14"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: SF (Short Female, Threaded), Adjustment Range: Not Applicable, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.

Pressure Range: 0~0.97MPa, Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 14 (NPN Open Collector 1 Output, w/o Analog Output, 3 Rotation Setting), Wiring Specification: CL (Connector Style Lead Wire Length 3.0m)

Valve Mounting Direction: Solenoid on the Side Opposite to A Port, Piping: Base Mounted, Stations: 14 Stations, Port Size: Base Mounted M5X0.8, Thread: -

Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 14, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Cushion: Rubber bumper (standard), Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Support bracket: None, Auto Switches: Without

Stations: 14 Stations, Option 2: Name Plate, Port Size: P, R Port Inch