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/LEFS /P12,13 2.2 /LEFB BK RLS DC24V(+) /P40 6.6 2 /CN1 BK RLS DC24V(+) -43- No.LEF-OM00601 2012 10 UL 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com -44-

Revision Addition / Side parallel type No.LEF-OM00404 Nov / 2013 Revision Addition / lead H for ball screw drive No.LEF-OM00405 May / 2015 Revision Addition / Stroke for ball screw drive No.LEF-OM00406 Jul / 2015 Revision No.LEF-OM00407 Jul/ 2016 Revision No.LEF-OM00408 Dec/ 2016 Revision No.LEF-OM00409 Mar/ 2017 Revision No.LEF-OM00410 Dec/ 2019 Revision 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

Anodized 17 Band holder Stainless steel 7 Seal band holder Synthetic resin 18 Dust seal band Stainless steel 8 Housing A Aluminum die-cast Chromating 19 Bearing 9 Housing B Aluminium alloy Anodized 20 Bearing 10 Bearing holder Aluminium alloy 21 Roller shaft Stainless steel 11 Motor mount Aluminium alloy Anodized 22 Wiper Assy Bearin 8 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

die casting Paint 18 Dust seal band Stainless steel 7 Seal magnet 19 Bearing 8 Motor cover Aluminum alloy Alumite treatment 20 Bearing 9 End cover Aluminum alloy Alumite treatment 21 Nut fixed pin Carbon steel 10 Roller shaft Stainless steel 22 Magnet 11 Roller Synthetic resin 23 Pipe Stainless steel 12 Bearing pusher Carbon steel 7 - Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

. -24- Revision history NO.LES*-OMZ0014 May / 2021 First edition 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights Reserved -25-

Design the system that allows required space for maintenance. 26 No.JXC-OMW1019-A Revision history A: Contents revised in several places [February 2019] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

P.16 6.4 I/O P.23 2.2 P.7 7.1 P.25 BP.37 2.2 P.7 81 No.JXC-OMU0004-A Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All Rights Reserved No.JXC-OMU0004-A

() EMG() 1000 1 48 - /(Best Pneumatics No) UL UL1310 Class2 15.2 () () 49 - 15.3 90 100 (DC24V)SVON () a) b) c) d) e) D (100) 50 - 15.4 1. 2. () 3. () 4. 5. 6. 7. 8. () (-10603585%) 51 - 15.5 5 15.6 OFF 52 - 16. 16.1 / 16.2 ON 53 - 5 () 54 - 16.3 50mm 16.4 () 55 - 16.5 16.6 D(100) 16.7 56 - Revision history No.JXC-OMT0034CN 2018 3 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

EMG() 10001 44 - /(Best Pneumatics No) ULUL1310Class2 15.2 () () 45 - 15.3 90100 (DC24V)SVON () a) b) c) d) e) D(100) 46 - 15.4 1. 2. () 3. () 4. 5. 6. 7. 8. () (-10603585%) 47 - 15.5 5 15.6 OFF 48 - 16. 16.1/ UL1310Class2 16.2 ON 49 - 5 () 50 - 16.3 50mm 16.4 () 51 - 16.5 16.6 D(100) 16.7 52 - Revision history No.JXC-OMT0032CN 20183 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

BU BR YE OR G/Y / IDFA60/70/80/90 Series 12-4 IDX-OM-W094 V 13 V V 13.1 0 () 13.2 (12mm) 12mm IDF-S0534 1.6MPa ON 0.510 OFF 0.55 IDFA60/70/80/90 Series 13-1 IDX-OM-W094 V 13.3 TEST TEST OFF ON OFF ON 3 2 6 4 1 2 4 8 5 0.5 10 0.5 min s IDFA60/70/80/90 Series 13-2 IDX-OM-W094 14 14.1 / IDFA60/70/80/90 Series 14-1 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

101 kPa500 kPaAir/Non-corrosive, non-flammable gas12 to 24 VDC ?10%, Ripple (P-P) 10% or less (With power supply polarity protection)17 mA or less at 24 VDC5 ms or less?1% F.S. or lessEnclosureOperating temperature rangeOperating humidity rangeVibration resistanceImpact resistance?3% F.S. or less1000 VAC for 1 min.

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum / 0 to -101 kPa / NPN 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: B [With One Bracket for Mounting a Single Unit (Mounting Screw is Attached)], Individual

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)]

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: A2 [URJ1/4 (Face Seal Fitting)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: Unit Selection Function, Piping Specification: 01 (R1/8), Connector Type: S (M12 Connector Type)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A, Vertical Mounting)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: M5 (Female Thread, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel Mount Adapter)

Body, Exhaust Type: A (Single Unit - Silencer Exhaust), Nominal Nozzle Size: 15 (ø1.5), Air Operated: Q1 (Air Operated, Supply Valve; N.C; Release Valve: N.C.), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: Y (For Pressure Switch for Vacuum: 2m Lead Wire w/Connector; Pressure Sensor Assembly: 3m w/Lead Wire), Vacuum, V Port: 08 [ø8 One-touch