8 2 7/8 3 1/8 3 3/8 3 5/8 4 1/8 4 5/8 5 1/8 5 5/8 #6-32UNC-1 7/8 2 2 1/8 2 1/4 2 3/8 2 1/2 2 5/8 2 7/8 3 1/8 3 3/8 3 5/8 4 1/8 4 5/8 5 1/8 5 5/8 #6-32UNC-2 1/8 2 1/4 2 3/8 2 1/2 2 5/8 2 3/4 2 7/8 3 1/8 3 3/8 3 5/8 3 7/8 4 3/8 4 7/8 5 3/8 5 7/8 #10-24UNC-2 1/4 2 3/8 2 1/2 2 5/8 2 3/4 2 7/8 3 3 1/4 3 1/2 3 3/4 4 4 1/2 5 5 1/2 6 #10-24UNC-2 3/8 2 1/2 2 5/8 2 3/4 2 7/8 3 3 1/8 3 3/8 3 5/8 3 7
VQZ335-G1-02 VQZ L-type plug connector (L): VQZ3 5 (R)-L10 1 3 4 5 02 03 DIN terminal (Y): VQZ3 5 (R)-Y10 1 3 4 5 02 03 SQ 150.3 [154.7] Approx. 300 (Lead wire length) 48.9 [51.1] VFS VFR 57 [64] VQ7 Max. 10 166.1 56.8 Applicable cable O.D. 3.5 to 7 69.4 16.9 Pg7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC M-type plug connector (M): VQZ3 5 (R)-M10 1 3 4 5 02
L D 10 39.5 23.4 12.5 10 5 10 10 2 13 16 40 23.9 13 10.5 E2 2 M5 x 0.8 20 25 46.5 29.3 15.5 12.5 B5 N S U F GN GS 30 8 12 12 3 32 47 29.8 16 13 40 49.5 32.3 18.5 12.5 2.5 19 5 50 50.5 33.3 19.5 13.5 20 25 B8 (Rotating angle) 04 06 08 ZP R F 10 to 32 46.5 29.3 15.5 12.5 2 M8 x 1.25 8 12 12 3 32 47 29.8 16 13 40 49.5 32.3 18.5 12.5 2.5 19 5 50 50.5 33.3 19.5 13.5 M Width across flats H F G
D A L Series Part no. 10-SZ3000 SZ3000-114-2A Dimensions Applicable fitting size d Model A L D 10-KQP-04 10-KQP-06 10-KQP-08 10-KQP-03 10-KQP-07 10-KQP-09 4 16 32 6 6 18 35 8 8 20.5 39 10 5/32" 16 32 6 1/4" 18 35 8.5 5/16" 20.5 39 10 383 Cassette Type Manifold 10-SZ3000 Manifold Option DIN rail dimensions / Weight D-sub connector (25 pins) / Cable assembly Directional Control Valves Air Grippers
10 0 Transfer load m (kg) 1000 a = 1000 to 3000 L2 500 Mer m 5 10 0 Transfer load m (kg) a 1000 Mey a = 1000 to 3000 500 m L3 5 10 0 Transfer load m (kg) Refer to page 304 for deflection data. 254 2 Phase Stepper Motor/Without Motor Brake Series LXS Dimensions/LXSH2SA Scale: 25% F G x I +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section
A at the next station. 1 2 3 4 5 6 7 8 9 10 Terminal no. (Looking it by the double solenoid valve) SOL. () A B () () A B A B A B A B Note) Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-28. Double Double Single A side B side 3 position Stations 1 2 3 4 5 The places of asterisk are not used.
7/8" 1" x 7/8" 3 x 2 4 x 3 4 x 3 3 x 2 6 x 4 6 x 4 8 x 6 6 x 4 10 x 8 10 x 8 6 x 4 8 x 6 10 x 8 12 x 10 12 x 10 19 x 16 19 x 16 25 x 22 1 2 4 x 3 1/4" x 5/32" 2 6 x 4 3/8" x 1/4" 3 1/4" x 5/32" 10 x 8 3 1/2" x 3/8" 4 8 x 6 4 12 x 10 3/8" x 1/4" 5 19 x 16 6 3/4" x 5/8" 25 x 22 5 B side 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1" x 7/8" C side A side 6 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/
50 30 20 20 Usable range 10 10 10 Usable range Usable range 5 5 5 1 0 1 2 3 4 5 6 10 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 1 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 80 REAR40 50 40 30 REAR32 REAR25 20 Load weight
12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,
OUTLINE DRAWINGS 9 1 to 9 5 9.1 Driver . 9 2 9.2 Connector . 9 4 10.
XLFV (With solenoid valves) High speed operation 10-5 to atmospheric pressure O-ring seal 10-10 10-10 XLG High volume operation (Size 16: None) P.436 to P.447 Double acting XLA XLGV (With solenoid valves) XL XL XLQ XLD XM XY Standard Prevents turbulence of particulates.
5 6 6 6 6 No. 1 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 6 6 6 6 Class Applicable tubing size (mm) 4 x 3 3 x 2 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.
10 12 16 2 2.5 3 4 5 6 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5 10.9 14.1 17.9 21.8 34.6 41.4 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 MHZ2-103 (2)(3) 0 0.2 +0.025 0 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 5.4 MHZ2-163 (2)(3) 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.030 0 7.4 MHZ2-203 (2)(3) 11.6 MHZ2-253 (2)(3) 16 MHZ2
0.4 MPa 0.3 MPa 0.2 MPa MHW 5 L MRHQ 0 10 20 30 40 50 Misc.
13 13 5 5 10 10 5-M5 X 0.8 10 10 5-M5 X 0.8 28 (Piping port) 28 (Piping port) [ ] for AC Other dimensions are the same as the grommet style. [ ] for AC Other dimensions are the same as the grommet style. 1.2-16 Series SYJ3000 3 Position Closed Center/Exhaust Center/Pressure Center 3 4 5 G H Grommet (G), (H): SYJ3 40-l ll-M5 10 9 5 10 SY 16.5 33.5 SYJ 2-1.8 (Mounting holes) Manual override
End Plate Model EX600-ED2-l EX600-ED3-l Power specifications Power connector M12 (5-pin) plug 7/8 inch (5-pin) plug Power supply (for Control/Input) 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE Marking, UL (CSA), RoHS compliant Weight 170 g 175 g EX600-ED3-l EX600-ED2-l Handheld
Size combination Applicable tubing size (mm) 6 x 4 4 x 3 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 Connection threads Symbol 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Connection threads A B C D E F A B C D A B C D A B C D Applicable tubing size (inch) No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 Class Class 1 2 3 4 1 2 3 4 5 6 1 2
motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard
Thickness 5, Width across flats 17 12 10 O.T.