Cylinder with Lock

0.6 55 50 70 15 76 96 13.5 20 19 11 353.5 393.5 Rotating Angle Bore size [mm] A B A + B + 90 32, 40 25 45 160 50, 63 40 60 190 80, 100 30 55 175 32 C96N Series Construction (Double Rod) @0!

SMC Pneumatic Clean Series

M5 x 0.8 depth 9 26-0.033 0 1/4 1/8 1/8 26-0.033 0 27 22 11 8 21.5 15 9 7 M8 x 1.25 depth 14 M6 x 1 depth 11 8 22 27 Series CBM2 10-/1121-/22Cylinder with end lock/ 20, 25, 32, 40 (Head side lock) How to Order Clean series 10 11 Relief type Vacuum suction type 10 C D B M 2 B 20 100 H N H7B 21 C D B M 2 B 20 100 H N H7B Nil Built-in magnet No Number of auto switches D With auto switch (Built-in

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

0.4

A B A B A B A B A A 93.5 116 42 (35) 66 75 80 (54) 36 (40) (5.5) 2 11 2 x M5 mounting hole 4 x M4 mounting hole 8 7 6 5 4 3 2 1 n D side Stations U side 4 x G 1/2 Conduit port 90.7 2.6 C8: 8 One-touch fitting 2 x C8: [3(R) EXH port] DIN rail clamp screw R R 62.5 X 3 X 3 55.5 7.7 40.5 B B B B B B B B 12 12 P P 25 1 1 A A A A A A A A 18.7 9.5 (12) 33.5 (7.5) C8: 8 One-touch fitting C8 [1(P

SYJ3000/5000/7000

8 173 161 9 192 180 10 211 199 11 230 218 12 249 237 13 268 256 14 287 275 66 Series SYJ7000 Type 21: Top Ported/SS5YJ7-21Stations (-00) [ ]: AC Grommet (G) Approx. 300 (Lead wire length) L1 4-4.5 (For mounting) 10 L2 15.3 (DIN 16.6) 1.5 (DIN 2.8) 16.5 3 11.5 122 [126.4] 107.4 [111.8] 61.5 (DIN 62.8) 62.3 (DIN 63.6) R P R A B A B A B A B A B 30 R P R 21 21 83.7 [85.9] 84.5 [86.7] 17 21 60

Tie-rod Type Hydraulic Cylinder

Hs Auto switch 12 D-B5/B6 15 22.5 A B 33 410 Auto Switch Mounting CHA Series Auto Switch Proper Mounting Positions (mm) D-G5/K59 D-G5W/K59W D-G59F/G5BA D-G5NT D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-G39/K39D-A9/A9V D-A5/A6 D-A59W D-B5/B64 D-B59W D-A3/A44 Bore size (mm) CHQ A B A B A B A B A B A B A B A B A B A B A B CHK 40 20.5 21.5 17 18 22 23 12.5 13.5 10.5

5 Port Air Operated Valve Series SYA3000/5000/7000 1

15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11)

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 10 11 Relief type Vacuum suction type 10 C D B M 2 B 20 100 H N M9BW C 21 C D B M 2 B 20 100 H N M9BW C Nil Built-in magnet Number of auto switches Cylinder stroke (mm) No Nil S n 2 pcs. 1 pc. "n" pcs.

SMC Pneumatic Clean Series

With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.

CL

11 11 11 11 16 16 18.5 8 0 0 0 0 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 51 58 58 71 72 110 110 120 8 11 11 13 16 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 11 11 14 17 17 30 24 26 22 19 22 237 245 254 262 296 305 315 324 379.5 402.5 382 405 419 440 9-3-10 43 Series CL1 Lock-up Cylinder Double Acting, Single Rod Rod Side Flange Style (F)/Long

Battery-less

Brown 12 Black 13 Red 7 Black 6 Orange 9 Black 8 Yellow 11 Black 10 Black 3 Robotic cable A B-2 A A-2 B B-3 B A-3 SD+ (RX) B-4 SD (TX) A-4 Signal Connector C terminal no.

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

CJ2

B H Part no. B H C C d d 10 Y-J010B 15.2 8 21 M4 x 0.7 CP95 SNJ-006B 16 Y-J016B 6 NTJ-006A 16.6 11 21 M5 x 0.8 M6 x 1.0 4 8 9.2 6 M3 x 0.5 2.4 5.5 6.4 SNJ-010B 10 NTJ-010A M8 x 1.0 4 11 12.7 10 M4 x 0.7 3.2 7 8.1 NDd9 NDH10 NX R1 U1 Part no.

2/3 Port Valve

Class B H B Class H DIN connector or DC not available.

Aluminum High Vacuum Angle Valve

XLG50, 63, 80, 100, 160/ Air operated (b) D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY DJ K XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 70 183 80 31 10.5 75 52 77 29 10.5 88 209 100 39 11 87 95 70 76.5 36 9 90 250 117 45.5 11 114 110 83 105 44 9 108 270.5 154 55 11 134 130 102 92 58 9 138 339 200 65 11

Air Fittings & Tubing

D1 Port B min. port size Weight (g) a b H (Hex.)

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators FT F 4 x FD 0 E0.05 FX0.15 B B FX0.15 (mm) FT 6 7 7 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 80 104 40 3 82 11 11 100 128 50 3 100 14 14 FD 5.5 5.5 6.6 6.6 FX 28 32 38 46 F 2 2 2 2 E 12 14 18 25 B 40 44 53 61 Bore size 20 25 32 40 Note) End boss is machined on the flange for E. Other dimensions are the same as basic type.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Proposals for Energy Saving

No. of tubes Color Black (B) Black (B) Black (B) Black (B) Black (B) Black (B) Black (B) Max. operating length m Model O.D. TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 1 1.5 4 2.5 2 1 3 2 1 6 4 1.5 2 1 3 8 5 2 1 Best Pneumatics Best Pneumatics Refer to page 2.5-3 of No. 4 for details.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

port 1 24 2 60 (69) 18.5 34 D-97/93A 15 30 11-5-11 11 Series MSUA These drawings indicate the condition when the B port is pressurized.