Compact Cylinder Series NCQ8

Mounting bolt C D Mounting Bolt Size for NCDQ8B056 to 250(With Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCDQ8B056-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B075-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B106-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B150-025 037 050 062 075 087 100 125 150 175 200 250

CE

CC RB J D-X 20Data 10-12-11 11 Series CEP1 Dimensions: 12 Direct mounting, rod side tapped style: CEP1B12 Stroke 4 depth 4 (Positioning pin hole) Cable end + 0.05 + 0.02 17 40 4 depth 4 Without connector + 0.05 + 0.02 (Positioning pin hole) 4 45 4-M5 x 0.8 Thread depth 10 6 Metal connector M14 x 1 4-M5 x 0.8 depth 6 (Bottom 4.3 through-hole) 7.5 counterbore depth 4 (500 or 3000) 25 70 0.5

CE

CC RB J D-X 20Data 10-12-11 11 Series CEP1 Dimensions: 12 Direct mounting, rod side tapped style: CEP1B12 Stroke 4 depth 4 (Positioning pin hole) Cable end + 0.05 + 0.02 17 40 4 depth 4 Without connector + 0.05 + 0.02 (Positioning pin hole) 4 45 4-M5 x 0.8 Thread depth 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Furthermore, when mounting supply/exhaust block assemblies on both sides of type B with a 2 to 10 station manifold, calculate the weight W using the formula for 11 to 16 stations.

Rubber Seal 5 Port Solenoid Valve Series SX3000/5000

200 185 235.5 225 201 17 260.5 250 233 137.5 121 187.5 169 237.5 217 13.5 11.5 14.5 12.5 15.5 13.5 Stations SS5X5-45GUBC4 C6 C8 Stations L1 L2 L3 L4 2 148 3 4 5 6 7 8 9 10 173 198 248 185.5 175 155 15 210.5 200 187 235.5 225 203 16 260.5 250 235 285.5 275 251 17 137.5 123 162.5 139 17 187.5 171 237.5 219 12.5 13.5 11.5 14.5 12.5 13 14 15 16 11 298 Stations L1 L2 L3 L4 12 323 348 373 310.5

OMR0032

[ms] Deceleration time: 20 80 = 250 [ms] Flow chart (Reference) Controller (1) Turn "TL" signal OFF.

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

CQS

9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.

Thermo-con/Rack Mount Type

Communication connector D-sub 9 pin (socket) Holding screw: M2.6 6 Contact a for output cutoff alarm (open when alarm occurs) 7 Common for output cutoff alarm 9 15 10 11 12 13 14 Pin no.

CE

9 M10 x 1.5 Rc(PT) 1/4 89.5 35 19 64 Refer to page 11 regarding the rod end nut which is included.

Compressed Air Preparation Filter

20 8 60 80 Size 60 2 1 191.2 45 93.1 30 45 70 50 70 11 20 8 60 80 Number of components Model Combination example r A N F J M Pressure Relief 3-port Valve VHS30-03-D 1 pc.

Series CQ2

Bushing CDQ2B only A set of Nos.11, 12 and 13 from the table above 180 9 CQ2WB180-PS Magnet Nickel plated 200 10 Rolled steel CQ2WB200-PS Rod end nut Mounting 1in = 25.4mm Mounting/Through hole type mounting bolts are available. How to order: Add "Bolt" in front of the bolts to be used.

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12

240

2 16 Step motor (Servo/24 VDC) 392 Electric Actuator Miniature Slide Table Type LEPS Series Step Motor (Servo/24 VDC) Dimensions LEPS6 D C B A 3.5 4 5.2 LEF 19 LEJ LEL ( ) +0.025 0 ( ) +0.025 0 2.5H9 depth 2.5 2.5H9 depth 2.5 2 x M4 x 0.7 thread depth 8 LEM LEY 4 x M4 x 0.7 thread depth 6 20 11 19 LES J 25 11 LEPY LEPS LEPY LEPS LER Table operating range Note 1) LEH Motor cable length 300

Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

(Connection port center) (Connection port center) F (Bracket mounting dimensions) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bracket (Option) B C A INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model Port size Rc 4 1 63 63 80 85 90 100 141

Table of Contents

11 !2 !33 !4 !5 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-7-11 to 11-7-12 for dimensions.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-7-11 to 11-7-12 for dimensions.

LG1H

Refer to pages starting with 181 for mounting. 30 95 B 100 95 8(4)-6.2 (160) () () 110 95 20 95 A (140) () () A B Stroke Model LG1H202PA-100-F LG1H202PA-200-F LG1H202PA-300-F LG1H202PA-400-F 100 200 300 400 50 150 250 70 170 270 Dimenstions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.)