2/3 Port Valve Refer to p.4.0-11 "Applicable Fluid Check List".
D-T791C/T792C 11-11-30 D-F8N/F8P/F8B D-M9N/M9P/M9B D-M9NV/M9PV/M9BV D-Y59A/Y7P/Y59B D-Y69A/Y7PV/Y69B 11-11-31 Grommet 11-11-24 D-F79W/F7PW/J79W Rail Grommet D-Y7NW/Y7PW/Y7BW D-Y7NWV/Y7PWV/Y7BWV Direct Grommet D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV 11-11-25 D-F59W/F5PW/J59W Tie-rod Grommet 11-11-26 11-11-27 D-F79F Grommet Rail 11-11-28 D-F59F 11-11-29 Rail D-F7BAL/F7BAVL 11-11-32 Tie-rod
M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5
L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.
www.stevenengineering.com I 5.5 AIR PREPARATION MODULAR TYPE D I M E N S I O N S NAR1000~NAR5000 D I M E N S I O N S NAR6000 Model A B C D E F G H J K L M N NAR1000 25 61.5 11 25 26 25 18 30 4.5 6.5 40 2 20.5 NAR2000 40 95 17 40 56.8 30 30 45 5.4 15.4 55 2.3 33.5 NAR2500 53 102.5 25 48 60.8 30 34 44 5.4 15.4 55 2.3 33.5 NAR3000 53 127.5 35 53 60.8 41 40 46 6.5 8 53 2.3 42.5 NAR4000 70 149.5
27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 93 149 44 to 500 50 1/4 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 109 176 55 to 600 63 1/4 35 32 27 90 38 20 70 11 9 21 14 58 11 72 M10 x 1.5 7 18 7 M18 x 1.5 109 176 69 to 600 80 3/8 40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 130 210 80 to 750 100 1/2 40 37 41 125 60 30
0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35
How to Order 11 CXSJ M Bore size Stroke Auto switch Bore size/Stroke 6 10 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bearing type M L Slide bearing Ball bushing bearing Only ball bushing bearing is available for clean room specification 12-.
How to Order 11 CXSJ M Bore size Stroke Auto switch Bore size/Stroke 6 10 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bearing type M L Slide bearing Ball bushing bearing Only ball bushing bearing is available for clean room specification 12-.
14 102 73 64 45 86 30 111 12.5 11 10 65 359 14 22 + 0.084 0 22 MB-B08 80, 100 55 30 175 116 73 64 45 86 30 111 12.5 11 10 65 379 + 0.084 0 14 22 22 10 Series MNB Dimensions of Accessories Dimensions of Accessories Knuckle joint pin Clevis pin Rod end nut (standard equipment) 30 d Dd9 2d D C L l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.
-102 to 103 13-11-104 to 105 13-11-106 to 110 13-11-106 to 110 13-11-111 to 112 13-11-113 to 116 Buffer stroke Adsorption is possible even on a slanted surface.
to 22 2 to 22 40 6.5 to 30 4.5 to 30 3 to 30 4.5 to 30 Symbol: A57 Symbol: A58 Both the long shaft and the short shaft are shortened.
Bore size/Stroke (mm) 6 10, 20, 30, 40, 50 8 10, 20, 30, 40, 50, 75 12 10, 20, 30, 40, 50, 75, 100 16 10, 20, 30, 40, 50, 75, 100, 125 20 10, 20, 30, 40, 50, 75, 100, 125, 150 25 10, 20, 30, 40, 50, 75, 100, 125, 150 Adjuster option Nil Without adjuster Functional option AS Extension end adjuster AT Retraction end adjuster Nil Standard A Both ends adjuster P Note) Axial piping CS Extension
12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650
XLF-80 12 11 11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.
VZ1000-11-4L 8 5.5 (35) (25) (10) Rail mounting hole pitch 12.5 No. 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 L dimension 98 110.5 123 135.5 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 273 285.5 298 310.5 323 Weight [g] 24.8 28 31.1 34.3 37.4 40.6 43.8 46.9 50.1 53.3 56.4 59.6 62.7 65.9 69.1 72.2 75.4 78.6 81.7 No. 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 L dimension
10 55 20 89 41 5 25 113 60 C76 Mounting style (E) C85 C95 CP95 NCM NCA D-X 20Bore size (mm) d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 Data 32 11 10 38 51 10 21 18 26 31 32 10 6.6 7 8 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 15 12 50 65 12 33 30 32 45 45 12 9 11 12 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5
0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 38 12 25 12 16 18 35 5 6.6 55 11 5.5 50 46.5 15 27 16 21 20 40 5 51 9 65 15 6.5 63 56.5 15 32 16 21 23 45 5 9 75 15 6.5 80 72 18 36 20 25 27 45 5 11 95 18 10 100 89 18 41 20 25 30 55 11 115 18 10 5 6-13-11 11 Series CP95 Dimensions: Cylinder Mounting Accessory DS and ES [First angle projection] Mounting style (DS) Courtesy of
C0.5 file chamfer R sphere 30 30 30 Symbol: A12 Symbol: A13 Symbol: A11 Symbol: A14 Symbol: A15 30 30 30 C0.5 R sphere R sphere Symbol: A19 Symbol: A16 Symbol: A18 Symbol: A17 Symbol: A20 30 30 30 30 30 Symbol: A21 Symbol: A22 Symbol: A23 Symbol: A24 Symbol: A25 30 30 30 Symbol: A29 Symbol: A28 Symbol: A26 Symbol: A30 Symbol: A27 30 30 30 30 30 20 Series MB1 Special port locations XC3
the piping: Circulating fluid temperature: 30 This product Users equipment Serial communication Fluid discharge temperature: 30 Heat dissipation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 When only the "set circulating fluid temperature" needs to be the same as the circulating temperature supplied to the user's equipment: Use "MODE 1" of the