VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

RZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Additional cylinder tube length Full stroke RHC CDQ2 MK(2) RS Q G Overall length of cylinder tube RS H A Comparison of cylinder tube overall length (mm) RZQ Full stroke = 300 mm (150 + 150 = 300 mm in case of CG1BN) MI W S CG1BN150+150-XC11 Dual stroke

Compact Cylinder

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Built in magnet Nil S n 2 pcs. 1 pc. n pcs.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Please change the parameter in the initial setting. *3 The travel distance of the actuator per 1 pulse should be 10 [m/pulse]. 11 - LECSC LEFB25 LEFB25U LEFB32 LEFB32U LEFB40 LEFB40U Lead symbol S Series Lead 54 Parameter Para. No.

Air-hydro Unit

bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load Load ratio Load ratio Load ratio Load ratio Bore size (mm) Bore size (mm) Bore size (mm) CCVL10/11/12/13 4.

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

steel rod Rod side nose mounting Head side pivot mounting Double end mounting Block mounting O O O O O O O S S O O O O O O NCA S S S S S O O O S O O N N S S S S S S N N N O O O O S 1 1 1 1 1 2 1 1 1 3, 4 1 DN S S S S S S O O O O N S S O S S S O O O O N -X N N O N N N O O O O O N N N O O O O O 20N N O O O O O O N N O O O O S Data N O O O O S O O O O O O O O O 1, 5, 6 O Combination

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

01(R) Note 1) Option Note 2) When two or more symbols are specified, indicate them alphabetically. (2) 01 [Rc 1/8] 02 [Rc 1/4] 02 [Rc 1/4] 03 [Rc 3/8] VQZ200 VQZ200-S(2) VQZ300 VQZ300-S(2) Note) Symbol R indicates an external pilot.

IR1000/2000/3000

0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 1000 0 200 400 600 800 Flow rate ( /min (ANR)) Relief flow rate ( /min (ANR)) Supply pressure P1 (MPa) 14-5-11 11 Series IR1000/2000/3000 Series IR3000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform to JIS B 8372.

HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

16-11 11 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F 10, 15, 25 How to Order CY1F R 10 300 F9BW Number of auto switches Magnetically coupled rodless cyinder, low profile guide type Nil S n 2 pcs. 1 pc. n pcs.

Sine Rodless Cylinder Series REA

0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 10 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center: L0 (cm) Distance from cylinder shaft center: L0 (cm) Note: 1N = 0.2248lbf 1kg = 2.2046lb 1in = 25.4mm 1in = 2.54cm 100 80 REA63 REA50 50 40 30 REA40 REA32 20 Load weight W (kg) REA25 10 1 100 200 300 Maximum speed U mm/s 3 Series

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

VP300/500/700

Wiring 1) Pass them through the cable (7) in the order of cable ground (4), washer (5), rubber seal (6), and then insert into the housing (2). 2) From the terminal block (3), loosen the screw (11), then pass the lead wire (10) through, then again tighten the screw (11). Note) Tighten within the tightening torque of 0.5 Nm 15%.

Guide Table Series MGF ø40, ø63, ø100 1

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D120 -X 2011.5 48.5 + Stroke Data 10 60 + Stroke 20 9 2-Rc 1/4 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 46 Port for retracting cylinder 4-M10 x 1.5 through M6: T-slot for hexagon bolt K 50 140 160 146 4 11 6-K (6 places) 73 146 8-23-11 12 Series MGF Dimensions

VXR21/22/23

Z S L, Z S Note ) PAX 1 1 4 1 2 PB AC Ordering example (Example) Series VXR21, Rc 3/4, 24 VDC, Conduit terminal (Part no.)

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

Piping connection type Connection size Piping connection system Size and part no. 1/4 3/8 KK4P-02MS Nil N F Rc NPT G 02 03 11 Port size Screw-in type Plug part no. Note1) With S coupler plug Note 1) In case of a type with an S coupler plug, specify no symbol (Rc) for the piping connection type. The size is Rc 1/4.

LEH_C

1 LECP1 ( 1 NPN NPN 64 32 32 32 32 64 PNP PNP 1P 1P 80 40 40 40 40 80 AN LECPA ( AN LECPA NPN NPN AP AP PNP PNP (m) () 8 8 8 8 L L 1.5 1 1.5 1 A A 10 10 3 3 3 3 B B 15 15 5 5 5 C C 20 20 5 () () R R S S / P.42 7.3 <> (NPNPNP) LEHF10K2-16 3 - 3.3 9 13 16 10 18 15 8 11 6 ( 12 4 5 7 2 1 3 17 14 1 2 A 3 B 4 + 5 6 + 7 + 8 9 10 A 11 B 12 13 NBR 14 15